The measurement of Nano Scale film thickness using optical interferometry

광 간섭 현상을 이용한 나노 스케일의 유막두께 측정

The interferometer method with nano-scale spatial resolution has been developed in this study. To enhance the accuracy of the previous developed method, the 14 bit cooled CCD camera with 1280 by 980 spatial resolution was applied to the measurement. And optical alignment has been carried out on the highly accurate position sensors with 500nm resolution so as to be able to calibrate the detected interference image with the field of view. Also the measurements were applied to the ultra thin oil film between the Al coated cylinder mirror with 38.1mm radius and 0.5mm cover glass to verify the developed method. The measured result showed the good agreement with the used cylinder curvature with ${\pm}$5.18run uncertainty.