• 제어로봇시스템학회:학술대회논문집
• /
• 2005.06a
• /
• pp.502-505
• /
• 2005

Researches about micro technology travel lively in these days. Such many researches are concentrated in the field of materials and a process field. But properties of micro materials should be known to give results of research developed into still more. In these various material properties, mechanical property such as tensile strength, elastic modulus, etc is the basic property. To measure mechanical properties in micro or nano scale, actuating must be very precise. PZT is a famous actuator which becomes a lot of use to measure very precise mechanical properties in micro research field. But PZT has a nonlinearity which is called as hysteresis. Not precision result is caused because of this hysteresis property in PZT actuator. Therefore feedback control method is used in many researches to prevent this hysteresis of PZT actuator. Feedback control method produce a good result in processing view, but cause a loss in a resolution view. In this paper, hysteresis is compensated by open loop control method. Hysteresis property is modeled in Mathematical function and compensated control input is constructed using inverse function of original data. Reliability of this control method can be confirmed by testing nickel thin film that is used in MEMS material broadly.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.78-78
• /
• 2013

Recently, many platinoid metals like platinum and ruthenium have been used as an electrode of microelectronic devices because of their low resistivity and high work-function. However the material cost of Ru is very expensive and it usually takes long initial nucleation time on SiO2 during chemical deposition. Therefore many researchers have focused on how to enhance the initial growth rate on SiO2 surface. There are two methods to deposit Ru film with atomic layer deposition (ALD); the one is thermal ALD using dilute oxygen gas as a reactant, and the other is plasma enhanced ALD (PEALD) using NH3 plasma as a reactant. Generally, the film roughness of Ru film deposited by PEALD is smoother than that deposited by thermal ALD. However, the plasma is not favorable in the application of high aspect ratio structure. In this study, we used a bis(ethylcyclopentadienyl)ruthenium [Ru(EtCp)2] as a metal organic precursor for both thermal and plasma enhanced ALDs. In order to reduce initial nucleation time, we use several methods such as Ar plasma pre-treatment for PEALD and usage of sacrificial RuO2 under layer for thermal ALD. In case of PEALD, some of surface hydroxyls were removed from SiO2 substrate during the Ar plasma treatment. And relatively high surface nitrogen concentration after first NH3 plasma exposure step in ALD process was observed with in-situ Auger electron spectroscopy (AES). This means that surface amine filled the hydroxyl removed sites by the NH3 plasma. Surface amine played a role as a reduction site but not a nucleation site. Therefore, the precursor reduction was enhanced but the adhesion property was degraded. In case of thermal ALD, a Ru film was deposited from Ru precursors on the surface of RuO2 and the RuO2 film was reduced from RuO2/SiO2 interface to Ru during the deposition. The reduction process was controlled by oxygen partial pressure in ambient. Under high oxygen partial pressure, RuO2 was deposited on RuO2/SiO2, and under medium oxygen partial pressure, RuO2 was partially reduced and oxygen concentration in RuO2 film was decreased. Under low oxygen partial pressure, finally RuO2 was disappeared and about 3% of oxygen was remained. Usually rough surface was observed with longer initial nucleation time. However, the Ru deposited with reduction of RuO2 exhibits smooth surface and was deposited quickly because the sacrificial RuO2 has no initial nucleation time on SiO2 and played a role as a buffer layer between Ru and SiO2.

• Advances in nano research
• /
• v.17 no.2
• /
• pp.181-195
• /
• 2024

This study introduces a novel functionally graded material model, termed the "Coated Functionally Graded Graphene-Reinforced Composite (FG GRC)" model, for investigating the free vibration response of plates, highlighting its potential to advance the understanding and application of material property variations in structural engineering. Two types of coated FG GRC plates are examined: Hardcore and Softcore, and five distribution patterns are proposed, namely FG-A, FG-B, FG-C, FG-D, and FG-E. A modified displacement field is proposed based on the higher-order shear deformation theory, effectively reducing the number of variables from five to four while accurately accounting for shear deformation effects. To solve the equations of motion, an analytical solution based on the Galerkin approach was developed for FG GRC plates resting on a viscoelastic Winkler/Pasternak foundation, applicable to various boundary conditions. A comprehensive parametric analysis elucidates the impact of multiple factors on the fundamental frequencies. These factors encompass the types and distribution patterns of the coated FG GRC plates, gradient material distribution, porosities, nonlocal length scale parameter, gradient material scale parameter, nanoplate geometry, and variations in the elastic foundation. Our theoretical research aims to overcome the inherent challenges in modeling structures, providing a robust alternative to experimental analyses of the mechanical behavior of complex structures.

• Journal of the Korean Society for Marine Environment & Energy
• /
• v.16 no.2
• /
• pp.82-87
• /
• 2013

Effects of material surface property, hydrophobic or hydrophilic, on the bio-fouling occurred on the bodies submerged in the sea water are investigated experimentally. 4 test models are used in the experiment, which includes aluminum foil in common use, AAO applied hydrophobic surface, HDFS coated hydrophobic surface and hydrophilic surface. Hydrophobic surfaces with numerous micro & nano-scale pillars on it seems to play very important role of preventing them from fouling in initial stage while the effects disappear in long term sense of fouling process. It is concluded that the surface hydrophobicity retards the initial fouling until the fouling thickness is smaller than the heights of the pillars on it but the effects diminish with the fouling proceeds so that the thickness grows bigger than the pillar heights.

• Journal of the Korean Society for Heat Treatment
• /
• v.35 no.3
• /
• pp.139-149
• /
• 2022

In the automobile and shipbuilding industries, various materials and components require superior surface strength, excellent wear resistance and good resistance to repeated loads. To improve the surface properties of the materials, various surface heat treatment methods are used, which include carburizing, nitriding, and so on. Among them, carburizing treatment is widely used for structural steels containing carbon. The effective carburizing thickness required for materials depends on the service environment and the size of the components. In general, however, there is a limit in evaluation of the surface properties with a standardized mechanical test method because the thickness or cross-sectional area of the carburized layer is limited. In this regard, the nanoindentation technique has lots of advantages, which can measure the mechanical properties of the material surface at the nano and micro scale. It is possible to understand the relationship between the microstructural change in the hardened layer by carburizing treatment and the mechanical properties. To be spread to practical applications at the industrial level, in this paper, the principle of the nanoindentation method is described with a representative application for analyzing the mechanical properties of the carburized material.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.29 no.4
• /
• pp.293-298
• /
• 2009

The ultrasonic atomic force microscope(UAFM) has been developed in order to enhance the characterization technology for nano-scale surface combining ultrasonic property to atomic force microscope. This UAFM technique enables elasticity imaging due to the physical properties on the heterogeneous surface in addition to the novel topography of surface height in the nano-surface layer. In this study, the prototype UAFM system was constructed and applied to several materials, silicon deposited wafer, spherodized cold heading steel, and carbon fiber reinforced plastic specimen. Clear elastic contrast was successfully obtained using this developed prototype UAFM.

• Transactions on Electrical and Electronic Materials
• /
• v.14 no.3
• /
• pp.160-163
• /
• 2013

We investigated the effect of light intensity and wavelength of a solar cell device by using photoconductive atomic force microscopy (PC-AFM). The $POCl_3$ diffusion doping process was used to produce a p-n junction solar cell device based on a Poly-Si wafer and the electrical properties of prepared solar cells were measured using a solar cell simulator system. The measured open circuit voltage ($V_{oc}$) is 0.59 V and the short circuit current ($I_{sc}$) is 48.5 mA. Also, the values of the fill factors and efficiencies of the devices are 0.7% and approximately 13.6%, respectively. In addition, PC-AFM, a recent notable method for nano-scale characterization of photovoltaic elements, was used for direct measurements of photoelectric characteristics in local instead of large areas. The effects of changes in the intensity and wavelength of light shining on the element on the photoelectric characteristics were observed. Results obtained through PC-AFM were compared with the electric/optical characteristics data obtained through a solar simulator. The voltage ($V_{PC-AFM}$) at which the current was 0 A in the I-V characteristic curves increased sharply up to 1.8 $mW/cm^2$, peaking and slowly falling as light intensity increased. Here, $V_{PC-AFM}$ at 1.8 $mW/cm^2$ was 0.29 V, which corresponds to 59% of the average $V_{oc}$ value, as measured with the solar simulator. Also, while light wavelength was increased from 300 nm to 1,100 nm, the external quantum efficiency (EQE) and results from PC-AFM showed similar trends at the macro scale, but returned different results in several sections, indicating the need for detailed analysis and improvement in the future.

• Korean Chemical Engineering Research
• /
• v.55 no.1
• /
• pp.115-120
• /
• 2017

In recent, it is worldwide issued that nanoscale science and technology as a solution have supported to increase the sensing performance in carbon nanotube based biosensor system. Containing material chemistry in various nanostructures has formed their high potentials for stabilizing and activating biocatalyst as a bioreceptor for medical, food contaminants, and environmental detections using electrode modification technologies. Especially, the large surface area provides the attachment of biocatalysts increasing the biocatalyst loading. Therefore, nano-scale engineering of the biocatalysts have been suggested to be the next stage advancement of biosensors. Here, we would like to study the electrical mechanism depending on the exposure methods (soaking or dropping) to the sample solution to the assembled carbon nanotubes (CNTs) on the gold electrodes of biosensor for a simple and highly sensitive detection. We performed various experiments using polar and non-polar solutions as sampling tests and identified electrical response of assembled CNTs in those solutions.

• Journal of the Computational Structural Engineering Institute of Korea
• /
• v.31 no.4
• /
• pp.173-181
• /
• 2018

Recently composite materials have dominated most engineering fields, owing to their better performance, increased durability and flexibility to be customized and designed for a specific required property. This has given them unprecedented superiority over conventional materials. With the help of the ever increasing computational capabilities of computers, researchers have been trying to develop accurate material models for the complex and integrated properties of these composites. This has led to advances in virtual testing of composite materials as a supplement or a possible replacement of laboratory experiments to predict the properties and responses of composite materials and structures. This paper presents a review on the complex multi-scale modelling framework of the virtual testing machines, which involve computational mechanics at various length-scales starting with nano-mechanics and ending in structure level computational mechanics, with a homogenization technique used to link the different length scales. In addition, the paper presents the features of some of the biggest integrated virtual testing machines developed for study of concrete, including a multiscale modeling scheme for the simulation of the constitutive properties of nanocomposites. Finally, the current challenges and future development potentials for virtual test machines are discussed.