• 제목/요약/키워드: Nano-processing

검색결과 548건 처리시간 0.025초

RIE 공정을 이용한 유기발광다이오드의 광 산란층 제작 (Fabrication of Scattering Layer for Light Extraction Efficiency of OLEDs)

  • 배은정;장은비;최근수;서가은;장승미;박영욱
    • 반도체디스플레이기술학회지
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    • 제21권1호
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    • pp.95-102
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    • 2022
  • Since the organic light-emitting diodes (OLEDs) have been widely investigated as next-generation displays, it has been successfully commercialized as a flexible and rollable display. However, there is still wide room and demand to improve the device characteristics such as power efficiency and lifetime. To solve this issue, there has been a wide research effort, and among them, the internal and the external light extraction techniques have been attracted in this research field by its fascinating characteristic of material independence. In this study, a micro-nano composite structured external light extraction layer was demonstrated. A reactive ion etching (RIE) process was performed on the surfaces of hexagonally packed hemisphere micro-lens array (MLA) and randomly distributed sphere diffusing films to form micro-nano composite structures. Random nanostructures of different sizes were fabricated by controlling the processing time of the O2 / CHF3 plasma. The fabricated device using a micro-nano composite external light extraction layer showed 1.38X improved external quantum efficiency compared to the reference device. The results prove that the external light extraction efficiency is improved by applying the micro-nano composite structure on conventional MLA fabricated through a simple process.

UV 임프린팅 공정을 이용한 금속막 필터제작 (Fabrication of Metallic Nano-Filter Using UV-Imprinting Process)

  • 노철용;이남석;임지석;김석민;강신일
    • 소성∙가공
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    • 제14권5호
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    • pp.473-476
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    • 2005
  • The demand of on-chip total analyzing system with MEMS (micro electro mechanical system) bio/chemical sensor is rapidly increasing. In on-chip total analyzing system, to detect the bio/chemical products with submicron feature size, a filtration system with nano-filter is required. One of the conventional methods to fabricate nano-filter is to use direct patterning or RIE (reactive ion etching). However, those procedures are very costly and are not suitable fur mass production. In this study, we suggested new fabrication method for a nano-filter based on replication process, which is simple and low cost process. After the Si master was fabricated by laser interference lithography and reactive ion etching process, the polymeric mold was replicated by UV-imprint process. Metallic nano-filter was fabricated after removing the polymeric part of metal deposited polymeric mold. Finally, our fabrication method was applied to metallic nano-filter with $1{\mu}m$ pitch size and $0.4{\mu}m$ hole size for bacteria sensor application.

Si 태양전지 금속배선 공정을 위한 나노 Ag 잉크젯 프린터 제작 및 응용 (Manufacturing of Ag Nano-particle Ink-jet Printer and the Application into Metal Interconnection Process of Si Solar Cells)

  • 이정택;최재호;김기완;신명선;김근주
    • 반도체디스플레이기술학회지
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    • 제10권2호
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    • pp.73-81
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    • 2011
  • We manufactured the inkjet printing system for the application into the nano Ag finger line interconnection process in Si solar cells. The home-made inkjet printer consists of motion part for XY motion stage with optical table, head part, power and control part in the rack box with pump, and ink supply part for the connection of pump-tube-sub ink tanknozzle. The ink jet printing system has been used to conduct the interconnection process of finger lines on Si solar cell. The nano ink includes the 50 nm-diameter. Ag nano particles and the viscosity is 14.4 cP at $22^{\circ}C$. After processing of inkjet printing on the finger lines of Si solar cell, the nano particles were measured by scanning electron microscope. After the heat treatment at $850^{\circ}C$, the finger lines showed the smooth surface morphology without micropores.

압력센서 개발을 위한 탄소 나노 튜브 기반 지능형 복합소재 전왜 특성 연구 (A Study on Piezoresistive Characteristics of Smart Nano Composites based on Carbon Nanotubes for a Novel Pressure Sensor)

  • 김성용;김현호;최백규;강인혁;이일영;강인필
    • 드라이브 ㆍ 컨트롤
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    • 제13권1호
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    • pp.43-48
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    • 2016
  • This paper presents a preliminary study on the pressure sensing characteristics of smart nano composites made of MWCNT (multi-walled carbon nanotube) to develop a novel pressure sensor. We fabricated the composite pressure sensor by using a solution casting process. Made of carbon smart nano composites, the sensor works by means of piezoresistivity under pressure. We built a signal processing system similar to a conventional strain gage system. The sensor voltage outputs during the experiment for the pressure sensor and the resistance changes of the MWCNT as well as the epoxy based on the smart nano composite under static pressure were fairly stable and showed quite consistent responses under lab level tests. We confirmed that the response time characteristics of MWCNT nano composites with epoxy were faster than the MWCNT/EPDM sensor under static loads.

나노인프로세스 형상계측 및 미세가공용 프로브의 개발 (Development of a New Probe to Realize Nano/Micro Mechanical Machining and In-Process Profile Measurement)

  • 권현규;최성대
    • 한국기계가공학회지
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    • 제2권1호
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    • pp.75-84
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    • 2003
  • In this paper, a new nano/micro-mechanical processing test machine was developed. This new test machine, which is based on the principle of the scanning force controlled probe microscope, can realize nano/micro-mechanical machining and in-process profile measurement. Experimental results of nano/micro indentation and scratching show that the controllable cutting depth of the test machine can be controlled by PZT actuator. Profile measurement of the machined surface has also been performed by using the test machine and a conventional AFM(Atomic Force Microscopy). A good agreement of the two measurement results have been achieved.

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나노 단위 금속 원자의 인장 및 접합 공정 시뮬레이션 (The simulation of tensile and bonding process in nano-size)

  • 박성재;이세헌
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.1182-1185
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    • 2003
  • Recently, the research of the nano technology has been done on a lot of area over the world. Especially, the interest of them is much higher for semiconductor companies and other super accuracy processing area. In this thesis, we have approached the characteristic of the tensile and bonding of copper, frequently used to nano wires, by molecular dynamics simulation. And the simulation was done by EAM, Embedded Atom Method which has the most highest accuracy for metal. Then the feature of copper at atom space is understood through the simulation of nano wire.

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In-Situ 측정에 의한 나노 Cu 분말의 소결 공정 시 치밀화 거동 (In-Situ Measurement of Densification Behavior of Nano Cu Powders during Sintering)

  • 윤승채;복천희;곽은정;이창규;김형섭
    • 소성∙가공
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    • 제16권3호
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    • pp.210-214
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    • 2007
  • Manufacturing bulk nanostructured materials with least grain growth from initial powders is challenging because of the bottle neck of bottom-up methods using the conventional powder metallurgy via compaction and sintering. In the study, densification behavior of nano Cu powders during pressureless sintering was investigated using an in-situ optical dilatometer technique. The initial heating and steady temperature stages during the sintering of nano Cu powder compacts were observed. At the initial heating stage, the powder compact has many porosities and full densification needs high temperature and/or high pressure sintering. In the experimental analysis, changes in geometry and density were measured and discussed for optimal consolidation and densification by the in-situ optical dilatometer.

자동차 부품용 Fe계 저합금 분말 소결품의 마찰마모 특성 연구 (A Study on Tribological Characteristics of Sintered Fe-base Low Alloy Powder for Automobile Parts)

  • 김태현;김상윤;김태규
    • 한국기계가공학회지
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    • 제11권6호
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    • pp.139-144
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    • 2012
  • In the automobile industry, the various efforts to lower their industrial cost and enhance fuel efficiency have been made through process improvement or weight saving of automobile parts. Gear is one of significant parts of transmission, which is made by cast iron or alloy steel. It is expensive due to complex processing, inferior materials and large machining allowance. In this study, alternative gear cars oil which is based on fluid applications materials is produced by reducing surface induction hardening and carburizing hardened in production. And then, wear characteristic and mechanical properties such as hardness of the sintered alloy which is used as a substitute for small machining allowance is investigated.