• Journal of the Korean Society for Precision Engineering
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• v.24 no.11
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• pp.108-115
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• 2007

We have designed a high transmission C-shaped aperture using finite differential time domain (FDTD) technique. The C-shaped aperture was fabricated in the aluminum thin film on a glass substrate using a focused ion beam (FIB) milling. Nano-size patterning was demonstrated with a vacuum contact device to keep tight contact between the Al mask and the photoresist. Using 405 nm laser, we recorded a 50 nm-size dot pattern on the photoresist with the aperture and analyzed the spot size dependent on the dose illuminated on the aperture.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.11
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• pp.1251-1258
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• 2011

With the help of nanoscale materials like carbon nanotube (CNT), there is the potential to develop new actuators that will provide higher work per cycle than previous actuator technologies, and generate much higher mechanical strength. In this study, the electrochemical actuation characteristics of nano carbon materials were experimentally studied to develop electrochemical actuators. The electrochemical actuators were composed of aqueous NaCl electrolyte and their actuating electrodes were made of multi-walled carbon nanotube (MWCNT)/polystyrene composite and graphene respectably. Actuation is proportional to charging transfer rate, and the electrolysis with an AC voltage input has very complex characteristics. To quantify the actuation property, the strain responses and output model were studied based on electrochemical effects between the nano carbon films and the electrolyte.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.489-490
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• 2006

To establish fabrication techniques for nano structure understanding of focused ion beam (FIB) milling process is required. In this study the mathematical model containing the factors related to FIB milling is developed to acquire the optimal fabrication condition. Then, the model is verified by comparison with various nano pattern fabricated in actual FIB system. Consequently, it is demonstrated that the nano patterns with the smallest pitch can be fabricated using developed FIB milling model.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.471-472
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• 2006

High aspect ratio of nano hairs on a plastic substrate is molded using thermoplstic materials including COC, PP, PC and PMMA. As a template for molding nano hairs, AAO membrane is adopted, which is 60um thick and 13mm in diameter. This membrane has about 109 of through-holes of which diameter is around 200nm. This AAO membrane and the pellet of materials are stacked in the mold and pressed to mold after heating up to be melted. The AAO membrane is removed using KOH to obtain the molded nano hairs. As a result, the diameter of the molded hairs is around 200nm and the length is $2um{\sim}60um$ depending on the molding conditions and materials.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.150-158
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• 2008

This research considered that the significance of the NT(Nano Technology) which gradually increased the importance of it and investigated the technology development current situation of the Korea, U.S.A, Japanese, Europe. Therefore, in domestic and foreign, this research was widely used. It includes the tendency of the technology about processing methods using the ion beam and electron beam among the In-line system related technique field for the high efficiency energy beam application nano scale manufacturing components. The technique level of Korea, the international trend of technology and cooperation research present condition are dealt in. The information about the checked out of business of research and development of the country consistency and policy establishment try to be provided.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.167-171
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• 2004

In this paper, we proposed a new method to control the length of carbon nanotube using electrochemical etching. We made a nano probe that was composed of the tungsten tip and multi-wall carbon nanotube. The nano probe was placed on the nano stage and the carbon nanotube on the nano probe was etched in the electrolyte solution with the applied voltage. The overall procedures were done under optical microscope and can be monitored. We can obtain a nano probe with proper length through this procedure.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1501-1506
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• 2005

This paper presents the design of a multiple beam optical tweezers instrument used for manipulating micro/nano-sized components. The basic equations used in designing the optical tweezers are derived and the stable and time-sharing multiple beam optical tweezers are constructed with scanning mirrors. The laser beam passes through a series of optical components such as lenses, mirrors, and scanning mirrors, and overfills the entrance aperture of microscope objective, which gives a stable trap. By rotating the laser beam with the scanning mirror, the focal positions are translated in the specimen plane and multiple micro/nano-sized objects can be moved. The constructed optical tweezers is used to manipulate cells and liposomes simultaneously and to trap multiple nano-wires. The experiments prove that the developed optical tweezers can be a very versatile manipulation tool for studying gene therapy and nano device fabrication.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.3
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• pp.111-119
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• 2006

The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 nm resolution irrespective of hysteresis and creep by the controller.

• Journal of Industrial Technology
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• v.14
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• pp.119-125
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• 1994

Ultra-precision machine tool equipped with the diamond bite tip is used to machine optical products, drums of VTR or computer hard disk. It needs nano technology in the surface roughness of workpiece. To perform the nano scale machining, ultra-precision machine tool must be designed and manufactured in consideration of the vibration characteristics. In this paper, using the finite element analysis, we investigate the modal parameters of the ultra-precision machine tool structures, which use cast iron, granite and alumina ceramic for the bed materials. To verify the numerical results, we manufacture a model of ultra-precision machine tool using granite bed and perform impulse test. Through the theoretical and experimental analyses, we could compare and estimate the vibration characteristics of the three models for the ultra-precision machine tools.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.629-632
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• 2005

ELID(ELectrolytic In-process Dressing) grinding is an excellent technique for mirror grinding of various advanced metallic or nonmetallic materials. A polishing process is also required for elimination of scratches present on ELID grinded surfaces. MAP(Magnetic Assisted Polishing) has been used as a polishing method due to its high polishing efficiency and to its resulting in a superior surface quality. This study describes an effective fabrication method combining ELID and MAP of nano-precision mirror grinding for glass-lens molding mould, such as WC-Co, which are extensively used in precision tooling material. And for the optics glass-ceramic named Zerodure, which is extensively used in precision optics components too. The experimental results show that the combined method is very effective in reducing the time required for final polishing. The best surface roughness of the polished glass-ceramic was within 1.7nm Ra in this study.