• 전자공학회논문지
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• 제51권8호
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• pp.172-177
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• 2014

두 가지 $N_2$ 프로세스(성장 중 반응성 질소 그리고 질소 플라즈마 경화)에 의해 특별히 개선된 AsGeTeS 위에 만들어진 문턱 스위칭 소자를 제시하고자 한다. 적층과 열적 안정적인 소자 구조가 가능한 두 스텝 프로세스에서의 질소의 사용은 나노급 배열 회로의 응용에서의 스위치와 메모리 소자의 집적을 가능하게 한다. 이것의 좋은 문턱 스위칭 특성에도 불구하고 AsTeGeSi 기반의 스위치는 높은 온도에서의 신뢰성 있는 저항 메모리 적용에 중요한 요소를 가진다. 이것은 보통 Te의 농도 변화에 기인한다. 그러나 chalconitride 스위치(AsTeGeSiN)은 $30{\times}30(nm^2)$ 셀에서 $1.1{\times}10^7A/cm^2$가 넘는 높은 전류 농도를 갖는 높은 온도 안정성을 보여준다. 스위치의 반복 능력은 $10^8$번을 넘어선다. 더하여 AsTeGeSiN 선택 소자를 가진 TaOx 저항성 메모리를 사용한 1 스위치-1저항으로 구성된 메모리 셀을 시연하였다.

• Smart Structures and Systems
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• 제21권4호
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• pp.397-405
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• 2018

In this paper, a novel simple shear deformation theory for buckling analysis of single layer graphene sheet is formulated using the nonlocal differential constitutive relations of Eringen. The present theory involves only three unknown and three governing equation as in the classical plate theory, but it is capable of accurately capturing shear deformation effects, instead of five as in the well-known first shear deformation theory (FSDT) and higher-order shear deformation theory (HSDT). A shear correction factor is, therefore, not required. Nonlocal elasticity theory is employed to investigate effects of small scale on buckling of the rectangular nano-plate. The equations of motion of the nonlocal theories are derived and solved via Navier's procedure for all edges simply supported boundary conditions. The results are verified with the known results in the literature. The influences played by Effects of nonlocal parameter, length, thickness of the graphene sheets and shear deformation effect on the critical buckling load are studied. Verification studies show that the proposed theory is not only accurate and simple in solving the buckling nanoplates, but also comparable with the other higher-order shear deformation theories which contain more number of unknowns.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.361.1-361.1
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• 2016

Due to their high sensitivity, fast response, small energy consumption and ease of integration, nanoelectromechanical systems (NEMS) have attracted much interest in various applications such as high speed memory devices, energy harvesting devices, frequency tunable RF receivers, and ultra sensitive mass sensors. Since the device performance of NEMS is closely related with the mechanical and flexural properties of the material in NEMS, analysis of the mechanical and flexural properties such as intrinsic tensile stress and Young's modulus is a crucial factor for designing the NEMS structures. In the present work, the intrinsic mechanical properties of highly stressed silicon nitride (SiN) beams are investigated as a function of the beam length using two different techniques: (i) dynamic flexural measurement using optical interferometry and (ii) quasi-static flexural measurement using atomic force microscopy. The reliability of the results is analysed by comparing the results from the two different measurement techniques. In addition, the mass density, Young's modulus and internal stress of the SiN beams are estimated by combining the techniques, and the prospect of SiN based NEMS for application in high sensitive mass sensors is discussed.

• Composites Research
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• 제31권3호
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• pp.111-116
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• 2018

본 논문에서는 그래핀 표면에 무전해 도금을 통해 FeCoNi 자성 나노입자를 환원 성장시킨 후 이를 다양한 계면 활성제로 분산시켜 고분자 복합필름을 제조하였다. Pyridine 계면 활성제로 분산 시킨 후 제조한 복합필름은 가장 높은 분산성과 낮은 표면저항 값(351 Ohm/sq) 및 10 GHz 주파수에서 90% 이상의 전자파 차폐 능력을 보였다. 특히, 건조과정에서 pyridine의 증발은 내부 전도체 네트워크 형성과 분산성이 높은 필름 형성을 형성 할 수 있는 것으로 확인되었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.136.2-136.2
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• 2015

반도체 제조는 chip의 성능 향상 및 단가 하락을 위해 지속적으로 pattern size가 nano size로 감소해 왔고, capacitor 용량은 증가해 왔다. 이러한 현상은 contact hole의 aspect ratio를 지속적으로 증가시킨바, 그에 따라 최적의 HARC (high aspect ratio contact)을 확보하는 적합한 dry etch process가 필수적이다. 그러나 HARC dry etch process는 많은 critical plasma properties 에 의존하는 매우 복잡한 공정이다. 따라서, critical plasma properties를 적절히 조절하여 higher aspect ratio, higher etch selectivity, tighter critical dimension control, lower P2ID과 같은 plasma characteristics을 확보하는 것이 요구된다. 현재 critical plasma properties를 제어하기 위해 다양한 plasma etching 방법이 연구 되어왔다. 이 중 plasma를 낮은 kHz의 frequency에서 on/off 하는 pulsed plasma etching technique은 nanoscale semiconductor material의 etch 특성을 효과적으로 향상 시킬 수 있다. 따라서 본 실험에서는 dual-frequency capacitive coupled plasma (DF-CCP)을 사용하여 plasma operation 동안 duty ratio와 pulse frequency와 같은 pulse parameters를 적용하여 plasma의 특성을 각각 제어함으로써 etch selectivity와 uniformity를 향상 시키고자 하였다. Selective SiO2 contact etching을 위해 top electrode에는 60 MHz pulsed RF source power를, bottom electrode에는 2MHz pulse plasma를 인가하여 synchronously pulsed dual-frequency capacitive coupled plasma (DF-CCP)에서의 plasma 특성과 dual pulsed plasma의 sync. pulsing duty ratio의 영향에 따른 etching 특성 등을 연구 진행하였다. 또한 emissive probe를 통해 전자온도, OES를 통한 radical 분석으로 critical Plasma properties를 분석하였고 SEM을 통한 etch 특성분석과 XPS를 통한 표면분석도 함께 진행하였다. 그 결과 60%의 source duty percentage와 50%의 bias duty percentage에서 가장 향상된 etch 특성을 얻을 수 있었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 추계학술발표대회
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• pp.31.1-31.1
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• 2009

In an approach to acclimate ourselves torecent ecological consciousness trend, a lead-free piezoelectric material, bismuth sodium titanate (abbreviated as BNT) based bismuth sodium barium titanate (abbreviated as BNT-BT), was considered as an environment-friendly alternative for a lead based piezoelectric system. Ceramic specimens of0.94[(BixNa0.5)TiO3]-0.06[BaTiO3] (x = 0.500~0.515) compositions were prepared by a modified mixed oxide method. To increase the chemical homogeneity andre action activity, high energy mechanical milling machine and pre-milled nanosized powder has been used. In this method (BixNa0.5)TiO3 (x=0.500~0.515) andBaTiO3 were prepared separately from pre-milled constituent materials at low calcination temperature and then separately prepared BNTX (X=1, 2, 3 and 4) and BT were mixed by high energy mechanical milling machine. Without further calcination step the mixed powders were pressed into disk shape and sintered at $1110^{\circ}C$. Microstructures, phase structures and electrical properties of the ceramic specimens were systematically investigated. Highly dense ceramic specimens with homogenous grains were prepared in spite of relatively low sintering temperature. Phase structures were not significantly influenced by the excess amount Bi. Large variation on the piezoelectric and dielectric properties was detected at relative high excess Bi amounts. When $x{\leq}0.505$, the specimens exhibit insignificant variation in piezoelectric and dielectric constant though depolarization temperature is found to be decreased. Considerable amount of decrease in piezoelectric and dielectric properties are observed with higher excess of Bi amounts ($x{\geq}0.505$). This research indicates the advantages of high energy mechanical milling and importance of proper maintenance of Bi stoichiometry.

• Carbon letters
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• 제26권
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• pp.31-42
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• 2018

Adsorption is one of the best methods for wastewater purification. The fact that water quality is continuously decreasing requires the development of novel, effective and cost available adsorbents. Herein, a simple procedure for the preparation of a magnetic adsorbent from agricultural waste biomass and ferrofluid has been introduced. Specifically, ferrofluid mixed with wheat straw was directly pyrolyzed either by microwave irradiation (900 W, 30 min) or by conventional heating ($550^{\circ}C$, 90 min). Magnetic biochars were characterized by X-ray powder diffraction, $M{\ddot{o}}ssbauer$ spectroscopy, textural analysis and tested as adsorbents of As(V) oxyanion and cationic methylene blue, respectively. Results showed that microwave pyrolysis produced char with high adsorption capacity of As(V) ($Q_m=25.6mg\;g^{-1}$ at pH 4), whereas conventional pyrolysis was not so effective. In comparison to conventional pyrolysis, one-step microwave pyrolysis produced a material with expressive microporosity, having a nine times higher value of specific surface area as well as total pore volume. We assumed that sorption properties are also caused by several iron-bearing composites identified by $M{\ddot{o}}ssbauer$ spectroscopy ([super] paramagnetic $Fe_2O_3$, ${\alpha}-Fe$, non-stoichiometric $Fe_3C$, ${\gamma}-Fe_2O_3$, ${\gamma}-Fe$) transformed from nano-maghemite presented in the ferrofluid. Methylene blue was also more easily removed by magnetic biochar prepared by microwaves ($Q_m=144.9mg\;g^{-1}$ at pH 10.9) compared to using conventional techniques.

• 한국지반공학회논문집
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• 제21권3호
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• pp.65-77
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• 2005

본 연구에서는 계단식 보강토 옹벽에 대한 측소 모형실험 수행하고 그 결과를 토대로 계단식 보강토 옹벽의 파괴 메카니즘을 분석하였다. 보강토 옹벽의 모형설험은 5m 높이의 현장옹벽에 대해 상사법칙을 적용하여 축소$\cdot$모사하였으며 상사법칙 적용 결과에 따라 보강재를 선택하여 실험을 실시하였다. 또한, 파괴 메카니즘 분석을 위해 자중에 의한 파괴를 성공적으로 유도하였다. 실험결과를 토대로 보강토 옹벽의 상$\cdot$하단 옹벽의 이격거리와 보강재 길이가 파괴 양상에 미치는 영향을 분석하였으며 아울러 현재 적용되고 있는 설계기준의 타당성 검토하였다.

• 한국수소및신에너지학회논문집
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• 제17권1호
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• pp.69-74
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• 2006

Thick film $H_2$ sensors were fabricated using $SnO_2$ loaded with $Ag_2O$ and $PtO_x$. The composition that gave the highest sensitivity for $H_2$ was in the weight% ratio of $SnO_2 : PtO_x : Ag_2O$ as 93 : 1 : 6. The nano-crystalline powders of $SnO_2$ synthesized by sol-gel method were screen printed with $Ag_2O$ and $PtO_x$ on alumina substrates. The fabricated sensors were tested against gases like $H_2$, $CH_4$, $C_3H_8$, $C_2H_5OH$ and $SO_2$. The composite material was found sensitive against $H_2$ at the working temperature $130^{\circ}C$, with minor interference of other gases. The $H_2$ gas as low as 100 ppm can be detected by the present fabricated sensors. It was found that the sensors based on $SnO_2-Ag_2O-PtO_x$ system exhibited the high performance, high selectivity and very short response time to $H_2$ at ppm level. These characteristics make the sensor to be a promising candidate for detecting low concentrations of $H_2$.

• 한국수소및신에너지학회논문집
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• 제20권3호
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• pp.238-244
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• 2009

We investigated the electrochemical properties of lithium/molybdenum sulfide(Li/MoS$_2$) using tetra (ethylene glycol) dimethyl ether(TEGDME) electrolyte. The Li/TEGDME/MoS$_2$ cell showed the first discharge capacity of 288mAhg$^{-1}$. From the XRD, SEM results of the MOS$_2$ electrode in various cut-off voltage during charge-discharge process, MoS$_2$ partly changed into Li$_2$S and Mo during discharge and Li$_2$S partly recovered into MOS$_2$ and Li during charge. Full charged MOS$_2$ electrode showed lump shape of big size, which might be related to agglomerate of MoS$_2$ particles. Therefore, the degradation might be related to decrease of active material for electrochemical reaction by agglomeration of MOS$_2$.