• Journal of Magnetics
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• 제11권4호
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• pp.160-163
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• 2006

We have prepared crystalline Ag nanoparticles with an average size of 4 nm in diameter by using an inductively coupled plasma reactor equipped with the liquid nitrogen cooling system. Our magnetic data show that the nano-sized effect of Ag nanoparticles on the magnetic properties is ferromagnetic, instead of a diamagnetic component of the Ag bulk and a superparamagnetic component of magnetic nanoparticles. We have also studied the magnetic properties of Ag-Cu nanocomposites with an opposite concentration profile between surface and core. These comparisons indicate that the ferromagnetic component strongly depends on the surface of Ag nanoparticles, while the paramagnetic component is strongly affected by the outer oxide layer, with the background of a diamagnetic component from the core of Ag.

• 열처리공학회지
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• 제23권2호
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• pp.75-82
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• 2010

A new advanced combined PVD/CVD technique of DLC film deposition has been developed. Deposition of a DLC film was carried out using a pulsed carbon arc discharge in vapor hydrocarbon atmosphere. The arc plasma enhancing CVD process promotes dramatic increase in the deposition rate and decrease of compressive stress as well as improvement of film thickness uniformity compared to that obtained with a single PVD pulsed arc process. The optical spectroscopy investigation reveals great increase in radiating components of $C_2$ Swan system molecular bands due to acetylene molecules decomposition. AFM, Raman spectroscopy, XPS and nano-indentation were used to characterize DLC films. The method ensures obtaining a new superhard DLC nano-material for deposition of protective coatings onto various industrial products including those used in medicine.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2005년도 춘계 학술대회
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• pp.121-124
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• 2005

Getter는 진공을 이루고 유지하는데 사용되는 물질로, 잔존가스 및 불순가스를 흡수 & 제거하는 물질을 말한다. FPD나 PDP같은 평판 디스플레이는 내부에 진공을 요구하며 작동중에 발생하는 불순가스에 의해 진공도가 떨어져, plasma 방전시 방전개시전압이 상승하는 결과를 초래하기에 이에 적절한 getter의 필요성이 대두되고 있다. 본 연구의 최종 목적은 PDP 제조시 발생하는 잔존가스 및 운전중 발생하는 불순가스의 제거를 효율적으로 하여 PDP의 수명이 연장되는 고성능 getter 재료를 제조 하고자 하는 것이며, 이에 thermal plasma를 이용하여 nano size로 getter를 제조하였다. 전체적으로 $10\~30$ [nm] 크기의 Setter가 제조되었지만 응집이 많이 일어나 군집된 형상이 발생하였으며, 이는 입자가 완전히 성장하기까지 충분한 열을 받지 못하여 응집이 먼저 발생한 것으로 생각된다.

• 한국분말재료학회지
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• 제18권2호
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• pp.112-121
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• 2011

This study investigated the effect of solvent on the fabrication of Ni-free Fe-based alloy nano powders by employing the PWE (pulsed wire evaporation) in liquid and compared the alloy particles fabricated by three different methods (PWE in liquid, PWE in Ar, plasma arc discharge), for high temperature oxidation-resistant metallic porous body for high temperature soot filter system. Three different solvents (ethanol, acetone, distilled water) of liquid were adapted in PWE in liquid process, while X-ray diffraction (XRD), field emission scanning microscope (FE-SEM), and transmission electron microscope (TEM) were used to investigate the characteristics of the Fe-Cr-Al nano powders. The alloy powder synthesized by PWE in ethanol has good particle size and no surface oxidation compared to that of distilled water. Since the Fe-based alloy powders, which were fabricated by PWE in Ar and PAD process, showed surface oxidation by TEM analysis, the PWE in ethanol is the best way to fabricate Fe-based alloy nano powder.

• 센서학회지
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• 제24권6호
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• pp.373-378
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• 2015

The structure of the human ear is divided into the outer ear, the middle ear, and the inner ear. The inner ear includes the cochlea that plays a very important role in hearing. Recently, the development of an artificial cochlear device for the hearing impaired with cochlear damage has been actively researched. Research has been carried out on the biomimetic piezoelectric thin film ABM (Artificial Basilar Membrane) in particular. In an effort to improve the frequency separation performance of the existing piezoelectric thin film ABM, this paper presents the design, fabrication, and characterization of the production and performance of a partially etched-type ABM material. $O_2$ plasma etching equipment was used to partially etch a piezoelectric thin film ABM to make it more flexible. The mechanical-behavior characterization of the manufactured partially etched-type ABM showed that the overall separation frequency range shifted to a lower frequency range more suitable for audible frequency bandwidths and it displayed an improved frequency separation performance. In addition, the maximum magnitude of the vibration displacement at the first local resonant frequency was enhanced by three times from 38 nm to 112 nm. It is expected that the newly designed, partially etched-type ABM will improve the issue of cross-talk between nearby electrodes and that the manufactured partially etched-type ABM will be utilized for next-generation ABM research.

• 대한금속재료학회지
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• 제49권9호
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• pp.732-738
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• 2011

Silicon oxide thin films were deposited by using a plasma-enhanced chemical-vapor deposition technique to investigate the light emission properties. The photoluminescence characteristics were divided into two categories along the relative ratio of the flow rates of $SiH_4$ and $N_2O$ source gases, which show light emission in the broad/visible range and a light emission peak at 380 nm. We attribute the broad/visible light emission and the light emission peak to the quantum confinement effect of nanocrystalline silicon and the Si=O defects, respectively. Changes in the photoluminescence spectra were observed after the post-annealing processes. The photoluminescence spectra of the broad light emission in the visible range shifted to the long wavelength and were saturated above an annealing temperature of $900^{\circ}C$ or after 1 hour annealing at $970^{\circ}C$. However, the position of the light emission peak at 380 nm did not change at all after the post-annealing processes. The light emission intensities at 380 nm initially increased, and decreased at annealing temperatures above $700^{\circ}C$ or after 1 hour annealing at $700^{\circ}C$. The photoluminescence behaviors after the annealing processes can be explained bythe size change of the nanocrystalline silicon and the density change of Si=O defect in the films, respectively. These results support the possibility of using a silicon-based light source for Si-optoelectronic integrated circuits and/or display devices.

• 폴리머
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• 제33권1호
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• pp.79-83
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• 2009

Hexamethyldisiloxane(HMDSO)+$O_2$를 플라즈마 중합시켜 알루미늄 판과 알루미늄 콘덴서 케이스 표면에 전기 절연박막을 코팅하였다. 코팅된 박막들은 두께가 0.5 ${\mu}m$ 이상이면 박막의 종류에 상관없이 1.0 M$\Omega$ 이상의 저항 값을 보였으며, 박막의 표면 형태 및 접착력은 플라즈마의 공정조건에 따라 달라졌다. 박막의 증착속도 및 접착력은 $O_2$/HMDSO 유량비와 방전전력에 따라 달라졌으며, 유량비가 4이고 방전전력이 60 W일 때 가장 좋은 결과를 보였다. 집착력은 또한 알루미늄을 끓는 물에서 30분간 전처리한 경우에 박막과 알루미늅 표면 사이에 Al-O-Si 결합을 형성하면서 크게 향상되었다. 이렇게 코팅된 박막은 우수한 내약품성과 내열성을 지니고 있었다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2009년도 추계학술대회 논문집
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• pp.429-432
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• 2009

The influence of the subsequent-annealing (SA) treatment on plasma electrolytic oxidation (PEO)-treated Mg-based alloy was investigated and the dependence of the dehydration reaction on the SA temperature was also studied. For this purpose, a series of the SA treatments were carried out on the coated samples at two different temperatures, i.e. 423 and 523 K for 10 h. In contrast to the sample without SA treatment, the sample annealed at 523 K exhibited a significant difference in term of surface morphology since the MgO content in the oxide layer increased with increasing SA temperature. With increasing SA temperature, the dehydration of $Mg(OH)_2$ led to the increase in the relative amount of the MgO, which was a hard phase. From the nano-indentation results, the applied loads of the samples were seen to increase as SA temperature increased. However, the corrosion resistance of the sample annealed at 423 K was higher than that of the samples annealed at 523 K.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.233-233
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• 2015

We report on a simple method for inducing physical and chemical property-gradient on nanoimprinted patterns by intensity-regulated plasma treatment under caved sample stage. As for the size gradient, a line pattern having a linewidth of 294.9 nm was etched to have gradually varying width from 277.4 nm to 147.9 nm. Modified pattern was proven to be adaptable to replica stamp for reversal patterning. To investigate the wettability gradient, imprinted nanopatterns were coated with fluoroalkylsilane to increase the hydrophobicity, and the surface was modified to have gradually varying wettability from hydrophobic to hydrophilic (contact angle was ${\sim}160^{\circ}$ to ${\sim}5^{\circ}$ on a single chip). This method is expected to be applicable to the selective adsorption of biological entities and hydrodynamic manipulation of liquid droplets for the pumpless microfluidics.

• 한국재료학회지
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• 제19권9호
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• pp.504-509
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• 2009

The Zr-based bulk metallic glass matrix composites of a mixture of gas-atomized metallic glass powders and Fe-based nanostructured powders were fabricated by spark plasma sintering. The Fe-based nanostructured powders adopted for the enhancement of plasticity were well distributed in the matrix after consolidation, and the matrix remains as a fully amorphous phase. The successful consolidation of metallic glass matrix composite with high density was attributed to viscous flow in the supercooled liquid state during spark plasma sintering. Unlike other amorphous matrix composites, in which improved ductility could be obtained at the expense of their strength, the developed composite exhibited improvement both in strength and ductility. The ductility improvement in the composite was considered to be due to the formation of multiple shear bands under the presence of the Fe-based nanostructured particles.