• 한국진공학회지
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• 제17권6호
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• pp.544-548
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• 2008

반도체 공정에서 가장 많은 시간과 비용을 차지하는 공정 중 하나는 Photoresist strip 공정이다. 따라서 보다 빠르게 PR의 strip 공정을 단축하기 위한 연구가 계속 진행중에 있다. 하지만 기존 사용중인 strip용액을 대체하기 위한 물질을 찾는 것은 많은 비용을 수반한다. 본 연구에서는 PR의 strip 시간을 최대한 단축시키고 PR strip 잔여물의 빠른 제거를 위하여 기존 공정에서 사용 중인 strip 약액을 플라즈마에 의하여 활성화하는 방법(Plasma Liquid-Vapor Activation: PLVA)으로 PR strip 시간을 최대한 줄이는 방법에 대한 연구를 진행하였으며, 활성화된 strip용액이 더욱 빠른 strip율 성능을 나타내는 것을 확인하였다. 또한 PR strip에서 이온에 의한 영향을 받은 HDI-PR (high dose implanted photoresist)은 기존 strip용액으로 제거가 불가능하였다. 하지만 본 연구에서 제시한 PLVA 방법으로 활성화된 용액에서는 그 가능성을 확인하였고, 이러한 PLVA방법에 대한 물리적 연구를 위하여 HDI-PR 표면 내력의 변화를 측정하였다. 그 결과 PLVA 처리 전 후 HDI-PR의 표면 내력에 큰 변화를 확인하였다.

• 한국전기전자재료학회논문지
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• 제18권12호
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• pp.1069-1074
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• 2005

In this work, nano-needle structures ate formed to solve problem, related to low density of quantum dots for nano floating gate memory. Such structures ate fabricated and electrical properties' of MIS devices fabricated on the nano-structures are studied. Nano floating gate memory based on quantum dot technologies Is a promising candidate for future non-volatile memory devices. Nano-structure is fabricated by reactive ion etching using $SF_6$ and $O_2$ gases in parallel RF plasma reactor. Surface morphology was investigated after etching using scanning electron microscopy Uniform and packed deep nano-needle structure is established under optimized condition. Photoluminescence and capacitance-voltage characteristics were measured in $Al/SiO_2/Si$ with nano-needle structure of silicon. we have demonstrated that the nano-needle structure can be applicable to non-volatile memory device with increased charge storage capacity over planar structures.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.261-261
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• 2013

The smart design of nanocatalysts can improve the catalytic activity of transition metals on reducible oxide supports, such as titania, via strong metal-support interactions. In this work, we investigatedtwo-dimensional Pt nanoparticle/titania catalytic systems under the CO oxidation reaction. Arc plasma deposition (APD) and metal impregnation techniques were employed to achieve Pt nanoparticle deposition on titania supports, which were prepared by multitarget sputtering and sol-gel techniques. APD Pt nanoparticles with an average size of 2.7 nm were deposited on sputtered and sol-gel-prepared titania films to assess the role of the titania support on the catalytic activity of Pt under CO oxidation. In order to study the nature of the dispersed metallic phase and its effect on the activity of the catalytic CO oxidation reaction, Pt nanoparticles were deposited in varying surface coverages on sputtered titania films using arc plasma deposition. Our results show an enhanced activity of Pt nanoparticles when the nanoparticle/titania interfaces are exposed. APD Pt shows superior catalytic activity under CO oxidation, as compared to impregnated Pt nanoparticles, due to the catalytically active nature of the mild surface oxidation and the active Pt metal, suggesting that APD can be used for large-scale synthesis of active metal nanocatalysts.

• 한국광학회지
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• 제32권5호
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• pp.220-229
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• 2021

눈부심 방지를 위한 확산판의 투과율과 연색지수 향상을 위한 양자점 필름의 농도가 고출력 직하형 백색 LED 조명의 광특성에 미치는 영향을 조사했다. 확산판의 투과율이 감소할 경우 조명의 휘도는 줄어들었고 색좌표, 상관색온도는 별다른 변화를 보이지 않았으며 연색지수는 약간 상승했다. 시야각에 따른 광특성의 편차는 거의 없었고 휘도 분포는 람버시안 분포에 가까웠다. 양자점 필름의 농도가 증가할 경우 스펙트럼 상 적색 성분이 늘어나면서 이 성분의 비중을 표현하는 색좌표 x가 증가했고 상관색온도는 약 6000 K에서 4000 K 부근으로 현저히 감소했다. 아울러 조명의 구조를 최적화하면 연색지수가 95까지 증가함을 확인했다. 이런 결과는 적절한 투과율의 확산판과 양자점 필름의 조합을 통해 눈부심이 없고 시야각에 따른 색편차가 거의 없으며 특히 색좌표의 가변이 가능한 고연색성의 조명 구현이 가능함을 보여준다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.144-144
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• 2013

Non-thermal atmospheric pressure plasmas have recently garnered much attention due to their unique physical and chemical properties that are sometimes significantly different from those of low pressure plasmas. It can offer many possible application areas including nano and bio/medical areas. Many different types of plasma sources have been developed for specific needs, which can be one of the important merits of the atmospheric pressure plasmas since characteristics of the produced plasma depend significantly on operating parameters such as driving frequency, supply gas type, driving voltage waveform, gas flow rate, gas composition, geometrical factor etc. Among many source configurations, parallel plate type geometry is one of the simplest configurations so that it can offer many insights for understanding basic underlying physics. Traditionally, the parallel plate type set up has been studied actively for understanding low pressure plasma physics along with extensive employment in industries for the same reason. By considering that understanding basic physics, in conjunction with plasma-surface interactions especially for nano & bio materials, should be pursued in parallel with applications, we investigated atmospheric pressure discharge characteristics in a parallel plate type capacitive discharge source with two parallel copper electrodes of 60 mm in diameter and several millimeters in gap distance. In this presentation, some plasma characteristics by varying many operating variables such as inter-electrode distance, gas pressure, gas composition, driving frequency etc will be discussed. The results may be utilized for plasma control for widening application flexibility.

• 한국자동차공학회논문집
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• 제7권5호
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• pp.73-80
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• 1999

To decrease NOx and SOx using PPCP(Pulse-induced Plasma Chemical Process). This study is tried to obtain the relation and the basic data under the various conditions such the initial concentrations of NOx and SOx. The additional amount of hydrocarbon gases. The concentration of oxygen and input power etc. Especially, this study is focused on the effects of the additional hydrocarbon gases on the decrease of NOx and SOx.

• 한국결정성장학회지
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• 제15권5호
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• pp.198-201
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• 2005

Carbon nanofibers were formed on silicon substrate which was applied by negative direct current (DC) bias voltage using microwave plasma-enhanced chemical vapor deposition method. Formation of carbon nanofibers were varied according to the variation of the applied bias voltage. At -250 V, we found that the growth direction of carbon nanofibers followed the applied direction of the bias voltage. Based on these results, we suggest one of the possible techniques to control the growth direction of the carbon nanofibers.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2012년도 춘계학술발표회 논문집
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• pp.126-126
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• 2012

In this study, adhesion of plasma spray coated hydroxyapatite film on the two-step anodized dental implant was investigated. The plasma spray was carried out on the dental implant after two step anodization. The adhesion of coated HA film was investigated by FE-SEM after fatigue test. In the case of two-step anodized implant showed a good adhesion between implant and coated film.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.131-134
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• 1998

This work was carried out to develop a pattern on the nanometer scale using plasma polymerization and plasma etching. This study is also aimed at developing a resist for the nano process and a vacuum lithography process. The thin films of plasma polymerization were fabricated by the plasma po1ymerization of inter-electrode capacitively coupled gas flow system. After delineating the pattern at accelerating voltage of 30[kV]. ranging the dose of 1∼500[${\mu}$C/$\textrm{cm}^2$], the pattern was developed with dry tree and formed by plasma etching. By analysing of the molecule structure using FT-lR, it was confirmed that the thin films of PPMST contains the functional radicals of the MST monomer. The thin films of PPMST had a highly crosslinked structure resulting in a higher molecule weight than the conventional resist.

• Tribology and Lubricants
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• 제30권5호
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• pp.278-283
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• 2014

Carbon nanotubes (CNTs) are used in various composite materials to enhance electrical, thermal and mechanical properties of composite materials. In this study, we investigate the wear characteristics of polycarbonate/acrylonitrile-butadiene-styrene (PC/ABS) blends containing multi-walled carbon nanotubes (MWCNTs). PC/ABS blends are commonly used in many industrial applications such as cellular phones and display cases and MWCNTs have been added to the PC/ABS blends to improve their electromagnetic interference shielding (EMS). We performed wear tests on PC/ABS blends containing MWCNTs under reciprocating linear sliding conditions with chrome steel balls as a counterpart material. The normal loads were 10, 30, 50, 70, 100 N, the sliding speed was 10 mm/s, the stroke length was 15 mm, and the tests lasted 900 s. The MWCNTs included in the PC/ABS blends lower the wear volume and friction coefficient of the composites. We analyzed the wear debris collected from the composites during the tests in terms of the MWCNT concentration using inductively coupled plasma optical emission spectroscopy. The results show that the quantity of MWCNTs in the debris is proportional to the concentration of MWCNTs in the composite, indicating that the exposure of the MWCNTs to environments by wear could be increased with their concentration in the composite.