• Korean Journal of Metals and Materials
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• v.50 no.12
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• pp.891-896
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• 2012

Nanopowders of MgO and $TiO_2$ were made by high energy ball milling. The rapid synthesis and sintering of the nanostructured $MgTiO_3$ compound was investigated by the high-frequency induction heated sintering process. The advantage of this process is that it allows very quick densification to near theoretical density and inhibition grain growth. Nanocrystalline materials have received much attention as advanced engineering materials with improved physical and mechanical properties. As nanomaterials possess high strength, high hardness, excellent ductility and toughness, undoubtedly, more attention has been paid for the application of nanomaterials. A highly dense nanostructured $MgTiO_3$ compound was produced with simultaneous application of 80 MPa pressure and induced current within 2 min. The sintering behavior, gain size and mechanical properties of $MgTiO_3$ compound were investigated.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.217-217
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• 2011

Recently, demand for thermally stable metal nanoparticles suitable for chemical reactions at high temperatures has increased to the point to require a solution to nanoparticle coalescence. Thermal stability of metal nanoparticles can be achieved by adopting core-shell models and encapsulating supported metal nanoparticles with mesoporous oxides [1,2]. However, to understand the role of metal-support interactions on catalytic activity and for surface analysis of complex structures, we developed a novel catalyst design by coating an ultra-thin layer of titania on Pt supported silica ($SiO_2/Pt@TiO_2$). This structure provides higher metal dispersion (~52% Pt/silica), high thermal stability (~600$^{\circ}C$) and maximization of the interaction between Pt and titania. The high thermal stability of $SiO_2/Pt@TiO_2$ enabled the investigation of CO oxidation studies at high temperatures, including ignition behavior, which is otherwise not possible on bare Pt nanoparticles due to sintering [3]. It was found that this hybrid catalyst exhibited a lower activation energy for CO oxidation because of the metal-support interaction. The concept of an ultra-thin active metal oxide coating on supported nanoparticles opens-up new avenues for synthesis of various hybrid nanocatalysts with combinations of different metals and oxides to investigate important model reactions at high-temperatures and in industrial reactions.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.31 no.1
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• pp.37-42
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• 2021

The effect of chemical composition on the structural and thermal properties of TiZrN thin films was studied. As the Zr fraction in the deposited TixZr1-xN (x = 0.87, 0.82, 0.7, 0.6, and 0.28) increased, microstructural changes consisted of reduction in the grain size and a gradual transition from columnar structure to granular structure were observed. In addition, it was also confirmed that a gradual crystal phase transition from TiN to TiZrN has occurred as the Zr fraction increased up to 0.4. After heat treatment at 900℃, Ti0.82Zr0.18N and Ti0.7Zr0.3N layers were converted to a form in which rutile phase TiO2 and TiZrO4 oxides coexist, while Ti0.6Zr0.4N layer was converted to TiZrO4 oxide. Among the five compositions of TiZrN films, the Ti0.6Zr0.4N showed the best high temperature stability and produced a significant enhancement in the thermal oxidation resistance of Inconel 617 through suppressing the surface diffusion of Cr caused by thermal oxidation of the Inconel 617 substrate.

• Journal of the Korean Ceramic Society
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• v.45 no.12
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• pp.839-844
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• 2008

$TiO_2$ is an environment-friendly semiconducting material, and it has photocatalytic and hydrophilic effect. There are a lot of reports on the photocatalytic characteristics of $TiO_2$, such as organic pollutants resolving, anti-bacterial, and self-purification material. In this paper, $TiO_2$ micron-sized powders were deposited on the glass by room temperature powder spray in vacuum process, so called aerosol deposition (AD), and nano-grained $TiO_2$ photocatalytic thin films were fabricated. The thickness of the films were controlled by changing the number of deposition cycle. Morphologies and characteristics of the AD-$TiO_2$ thin films were examined by SEM, TEM, XRD, and UV-Visible Spectrophotometer. As the thickness of $TiO_2$ films increased, surface roughness increased. By this increment, the reaction area between film and pollutant was enlarged, resulting in better photocatalytic property.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2008.10a
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• pp.423-424
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• 2008

• Proceedings of the Korean Magnestics Society Conference
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• 2008.12a
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• pp.104.1-104.1
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• 2008

• Polymer(Korea)
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• v.32 no.5
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• pp.465-469
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• 2008

Hybrid thin films composed of block copolymer(BCP) and $TiO_2$ with various morphologies on the nanoscale were fabricated using self-assembly of block copolymer combined with sol-gel process. The factors governing morphology changes considered in this study are block copolymer composition, selectivity of solvent and the inclusion of an additive. We also investigated the efficiency of photoluminescence for selected films with different morphologies. Micelle or nanowire structure can be derived from the self-assembly of poly (styrene-block-4-vinyl pyridine) (PS-b-P4VP) depending on the relative selectivity of the solvent for the two blocks, and the titanium tetraisopropoxide ($Ti{OCH (CH_3)_2}_4$, TTIP) is coordinated with nitrogen in P4VP block. Addition of a third component 3-pentadecylphenol into the BCP/sol-gel mixture solution induces morphology change as a result of the change of relative volume fraction of the BCP. We confirmed that the efficiency of $TiO_2$ fluorescence changes for films depending on morphologies.

• Journal of the Korean Ceramic Society
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• v.39 no.6
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• pp.550-557
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• 2002

TiO$_2$ particles coated on fly ash composites for use in photocatalyst were synthesized by the precipitation dropping method and heated at $700^{\circ}C$ for 2 h. The pH of reaction solution, the addition rate of NH$_4$HCO$_3$, the stirring speed, the reaction temperature and the concentration of TiC1$_4$ had a pronounced effect on the nature of precipitated TiO$_2$ particles on the surface off fly ash and the crystal structure of precipitated TiO$_2$ particles. At an addition rate of NH$_4$HCO$_3$; 1.0 ml/min, the pH of the reaction solution; 6, the stirring speed; 1,000 rpm and the reaction temperature; 8$0^{\circ}C$, about 10 nm of TiO$_2$ particle size and homogeneous precipitated layer on the surface of a fly ash was achieved. On the contrary, at an addition rate of NH$_4$HCO$_3$; 0.3,0.5 ml/min, the pH of the reaction solution; 2 and 11, the stirring speed; 300~500 rpm and the reaction temperature; lower than 5$0^{\circ}C$:, Inhomogeneous precipitated layer was developed on a fly ash. TiO$_2$ particles with anatase phase was formed as-dried precipitation at the low concentration of Tic14, the high addition rate of NH$_4$HCO$_3$ and the high reaction temperature, the crystalline fraction of anatase increased with raising heat-treatment temperature and rutile phase began to formation at 80$0^{\circ}C$. The crystal size of TiO$_2$ particles increased with raising the heat-treatment temperature, the crystal size was showed about 21 m at $700^{\circ}C$. Anatase type of TiO$_2$ coated on the fly ash heated at $700^{\circ}C$ for 2 h showed 1.25 g/cm$^3$of particle density, 82.8% of strength and 69.5 Lab of whiteness and can be used as a photocatalyst.

• Journal of the Korean Ceramic Society
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• v.50 no.3
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• pp.186-194
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• 2013

The relationship between composition and properties of enamel glass was investigated by introducing a mixture design. The enamel glass was manufactured by mixing various components under the following constraints: $45{\leq}SiO_2{\leq}55$, $10{\leq}B_2O_3{\leq}18$, $6{\leq}Na_2O{\leq}15$, $1{\leq}Li_2O{\leq}6$, $5{\leq}K_2O{\leq}10$, $0{\leq}TiO_2{\leq}8$, $0{\leq}ZrO_2{\leq}8$, 13.3MO (mol %). A mathematical model for the calculation of some properties of enamel glasses as a function of their composition was developed by the experimental statistical method. The results showed that the proposed model with the experimental measurement were in good agreement and the mixture experimental design was an effective method for optimizing the composition of the enamel glass with respect to its properties.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.168-168
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• 2008

Dimension of a transistor has rapidly shrunk to increase the speed of device and to reduce the power consumption. However, it is accompanied with several problems like direct tunneling through the gate dioxide layer and low conductivity characteristic of poly-Si gate in nano-region. To cover these faults, study of new materials is urgently needed. Recently, high dielectric materials like $Al_2O_3$, $ZrO_2$, and $HfO_2$ are being studied for equivalent oxide thickness (EOT). However, poly-Si gate is not compatible with high-k materials for gate-insulator. Poly Si gate with high-k material has some problems such as gate depletion and dopant penetration problems. Therefore, new gate structure or materials that are compatible with high-k materials are also needed. TiN for metal/high-k gate stack is conductive enough to allow a good electrical connection and compatible with high-k materials. According to this trend, the study on dry etching of TiN for metal/high-k gate stack is needed. In this study, the investigations of the TiN etching characteristics were carried out using the inductively coupled $BCl_3$-based plasma system and adding $Cl_2$ gas. Dry etching of the TiN was studied by varying the etching parameters including $BCl_3$/Ar gas mixing ratio, RF power, DC-bias voltage to substrate, and $Cl_2$ gas addition. The plasmas were characterized by optical emission spectroscopy analysis. Scanning electron microscopy was used to investigate the etching profile.