• Title/Summary/Keyword: Nano size

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New Fabrication method of Planar Micro Gas Sesnor Array (집적도를 높인 평면형 가스감지소자 어레이 제작기술)

  • 정완영
    • Proceedings of the IEEK Conference
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    • 2003.07b
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    • pp.727-730
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    • 2003
  • Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro gas sensor array on silicon substrate. The tin oxide film on silicon substrate was well patterned by chemical etching upto 5${\mu}{\textrm}{m}$width and showed very uniform flatness. The tin oxide film preparation method and patterning method were successfully applied to newly proposed 2-dimensional micro sensor fabrication.

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Development of Ceria-Based Slurry with High Selectivity for STI CMP

  • Lim, G.;Kim, T.E.;Kim, J.;Lee, J.H.;Lee, H.W.
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.439-440
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    • 2002
  • Nano-Crystalline $CeO_2$ particles were dispersed in deionized water with controlled slurry chemicals for CMP test. According to the CMP test, the removal rate of $SiO_2$ layer was mainly controlled by the size and crystallinity of $CeO_2$ particles which can be controlled by the heat-treatment condition during $CeO_2$ synthesis. In contrast, the removal rate of $Si_3N_4$ layer was significantly influenced by the passivation reagent which protects the $Si_3N_4$ surface layer from excessive dissolution during CMP.

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Preparation of Nano Titania Sols and Thin Films added with Transition Metal Elements (전이금속원소들이 첨가된 나노 티타니아 졸 및 코팅막 제조)

  • Lee K.;Lee N. H.;Shin S. H.;Lee H. G.;Kim S. J.
    • Korean Journal of Materials Research
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    • v.14 no.9
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    • pp.634-641
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    • 2004
  • The photocatalytic performance of $TiO_2$ thin films coated on porous alumina balls using various aqueous $TiOCl_2$ solutions as starting precursors, to which 1.0 $mol\%$ transition metal ($Ni^{2+},\;Cr^{3+},\;Fe^{3+},\;Nb^{3+},\;and\;V^{5+}$) chlorides had been already added, has been investigated, together with characterizations for $TiO_2$ sols synthesized simultaneously in the same autoclave through hydrothermal method. The synthesized $TiO_2$ sols were all formed with an anatase phase, and their particle size was between several nm and 30 nm showing ${\zeta}-potential$ of $-25{\sim}-35$ mV, being maintained stable for over 6 months. However, the $TiO_2$ sol added with Cr had a much lower value of -potential and larger particle sizes. The coated $TiO_2$ thin films had almost the same shape and size as those of the sol. The pure $TiO_2$ sol showed the highest optical absorption in the ultraviolet light region, and other $TiO_2$ sols containing $Cr^{3+},\;Fe^{3+}\;and\;Ni^{2+}$ showed higher optical absorption than pure sol in the visible light region. According to the experiments for removal of a gas-phase benzene, the pure $TiO_2$ film showed the highest photo dissociation rate in the ultraviolet light region, but in artificial sunlight the photo dissociation rate of $TiO_2$ coated films containing $Cr^{3+},\;Fe^{3+}\;and\;Ni^{2+}$ was measured higher together with the increase of optical absorption by doping.

Granular Thin Film of Titanium Dioxide for Hydrogen Gas Sensor (입상의 이산화티타늄 박막을 이용한 수소센서)

  • Song, Hye-Jin;Oh, Dong-Hoon;Jung, Jin-Yeun;Nguyen, Duc Hoa;Cho, You-Suk;Kim, Do-Jin
    • Korean Journal of Materials Research
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    • v.19 no.6
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    • pp.325-329
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    • 2009
  • Titanium dioxide thin films were fabricated as hydrogen sensors and its sensing properties were tested. The titanium was deposited on a $SiO_2$/Si substrate by the DC magnetron sputtering method and was oxidized at an optimized temperature of $850^{\circ}C$ in air. The titanium film originally had smooth surface morphology, but the film agglomerated to nano-size grains when the temperature reached oxidation temperature where it formed titanium oxide with a rutile structure. The oxide thin film formed by grains of tens of nanometers size also showed many short cracks and voids between the grains. The response to 1% hydrogen gas was ${\sim}2{\times}10^6$ at the optimum sensing temperature of $200^{\circ}C$, and ${\sim}10^3$ at room temperature. This extremely high sensitivity of the thin film to hydrogen was due partly to the porous structure of the nano-sized sensing particles. Other sensor properties were also examined.

Research on Minimizing Output Degradation in HJT Cell Separation Using IR Laser Scribing (IR 레이저 스크라이빙에 의한 HJT 셀 분할 시 출력 감소율 최소화에 대한 연구)

  • Eunbi Lee;Sungmin Youn;Minseob Kim;Jinho Shin;Yu Jin Kim;Jeonghun Kim;Min-Joon Park;Chaehwan Jeong
    • Current Photovoltaic Research
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    • v.12 no.2
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    • pp.37-40
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    • 2024
  • One of the current innovation trends in the solar industry is the increase in the size of silicon wafers. As the wafer size increases, the series resistance of the module rises, highlighting the need for research on methods for cutting and bonding solar cells. Among these, the Infrared (IR) laser scribing technique has been extensively researched. However, there is still insufficient optimization research regarding the thermal damage caused by lasers on the Transparent Conductive Oxide (TCO) layer of Heterojunction (HJT) solar cells. Therefore, in this study, we systematically varied conditions such as IR laser scribing speed, frequency, power, and the number of scribes to investigate their impact on the performance of cut cells under each condition. Additionally, we conducted a comparative analysis of thermal damage effects on the TCO layer based on varying scribing depths.

Effect of Reaction Factors on the Fabrication of Nano-Sized Ni-ferrite Powder by Spray Pyrolysis Process (분무열분해공정에 의한 니켈 페라이트 나노 분말 제조에 미치는 반응인자들의 영향)

  • 유재근;서상기;박시현;한정수
    • Journal of Powder Materials
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    • v.11 no.3
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    • pp.202-209
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    • 2004
  • In this study, nano-sized powder of Ni-ferrite was fabricated by spray pyrolysis process using the Fe-Ni complex waste acid solution generated during the shadow mask processing. The average particle size of the produced powder was below 100 nm. The effects of the reaction temperature, the inlet speed of solution and the air pressure on the properties of powder were studied. As the reaction temperature increased from 80$0^{\circ}C$ to 110$0^{\circ}C$, the average particle size of the powder increased from 40 nm to 100 nm, the fraction of the Ni-ferrite phase was also on the rise, and the surface area of the powder was greatly reduced. As the inlet speed of solution increased from 2 cc/min. to 10 cc/min., the average particle size of the powder greatly increased, and the fraction of the Ni-ferrite phase was on the rise. As the inlet speed of solution increased to 100 cc/min., the average particle size of the powder decreased slightly and the distribution of the particle size appeared more irregular. Along with the increase of the inlet speed of solution more than 10 cc/min., the fraction of the Ni-ferrite phase was decreased. As the air pressure increased up to 1 $kg/cm^2, the average particle size of the powder and the fraction of the Ni-ferrite phase was almost constant. In case of 3 $kg/cm^2 air pressure, the average particle size of the powder and the fraction of the Ni-ferrite phase remarkably decreased.

The Effect of Phases of Starting Materials on the Grain Size at High Pressure: the Comparison of Grain Size in the Samples Using Glass and Nano Powder as Starting Materials (고압환경에서의 결정 크기에 원시료의 상이 미치는 영향: 비정질 시료와 나노파우더를 이용한 시료의 결정 크기 비교)

  • Eun Jeong Kim;Alessio Zandona;Takehiko Hiraga;Sanae Koizumi;Nobuyoshi Miyajima;Tomoo Katsura;Byung-Dal So
    • Korean Journal of Mineralogy and Petrology
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    • v.36 no.3
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    • pp.213-220
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    • 2023
  • In this study, we report the effect of starting materials on the grain size in a multi-component system at high pressure experiments. We used two different starting materials, glass and nano powders, to synthesize bridgmanite in the reduced conditions in the presence of calcium-ferrite-phase MgAl2O4 to compared the grain size of synthesized samples. After synthesizing the sample at 40 GPa, 2000 K for 20 hrs, the sample from glass showed the grain size of 50-200 nm whereas the one from nano powders has ~500 nm of grains. This difference may come from 1) the temperature of 2000 K which is low enough for glass starting materials to make more crystal nucleis than to grow crystal size or 2) the possible difference in the redox state of starting materials. It is suggested that the using of nano powders is better to synthesize bigger grains in high pressure experiments with multi-component systems rather than using glass starting materials.

Preparation of Nano-Sized Tin Oxide Powder from Tin Chloride Solution by Spray Pyrolysis Process

  • Yu, Jae-Keun;Kim, Dong-Hee
    • Korean Journal of Materials Research
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    • v.21 no.7
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    • pp.396-402
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    • 2011
  • In this study, by using tin chloride solution as a raw material, a nano-sized tin oxide powder with an average particle size below 50 nm is generated by a spray pyrolysis process. The properties of the generated tin oxide powder depending on the inflow speed of the raw material solution are examined. When the inflow speed of the raw material solution is 2 ml/min, the majority of generated particles appear in the shape of independent polygons with average size above 80-100 nm, while droplet-shaped particles show an average size of approximately 30 nm. When the inflow speed is increased to 5 ml/min, the ratio of independent particles decreases, and the average particle size is approximately 80-100 nm. When the inflow speed is increased to 20 ml/min, the ratio of droplet-shaped particles increases, whereas the ratio of independent particles with average size of 80-100 nm decreases. When the inflow speed is increased to 100 ml/min, the average size of the generated particles is around 30-40 nm, and most of them maintain a droplet shape. With a rise of inflow speed from 2 ml/min to 5 ml/min, a slight increase of the XRD peak intensity and a minor decrease of specific surface area are observed. When the inflow speed is increased to 20 ml/min, the XRD peak intensity falls dramatically, although a significant rise of specific surface area is observed. When the inflow speed is increased to 100 ml/min, the XRD peak intensity further decreases, while the specific surface area increases.

Electromagnetic-wave Shielding by Nano Particles-contained Glass Fiber Reinforced Composite Materials (나노입자 첨가 유리섬유강화 복합재료의 전자기파 차폐특성)

  • 정우균;안성훈;원명식
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.1331-1334
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    • 2004
  • The research on electromagnetic shielding has been advanced for military applications as well as for commercial products. Utilizing the reflective properties and absorptive properties of shielding material, the replied signal measured at the rear surface or at the signal source can be minimized. The shielding effect was obtained from materials having special absorptive properties or from structural characteristics such as stacking sequence. Recently researchers studied the electromagnetic properties of nano size particles. In this research {glass fiber}/{epoxy}/{nano particle} composites(GFR-Nano composites), was fabricated using various nano particles, and their properties in electromagnetic shielding were compared. For the visual observation of the nano composite materials, SEM(Scanning Electron Microscope) and TEM(Transmission Electron Microscope) were used. For the measurement of electromagnetic shielding, HP8719ES S-parameter Vector Network Analyser System was used on the frequency range of 8 GHz~12GHz. Among the nano particles, carbon black and Multi-Walled Carbon Nano-Tube (MWCNT) revealed outstanding electromagnetic shielding. Although silver nano particles (flake and powder) were expected to have effective electromagnetic shielding due to their excellent electric conductivities, test showed little shielding effect.

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A Study on the Thermal Properties of Epoxy/Micro-Nano Alumina Composites, as Mixture of Surface Modified Nano Alumina (표면개질된 나노알루미나를 혼합한, 에폭시/마이크로-나노알루미나 콤포지트의 열적특성)

  • Park, Jae-Jun
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.65 no.9
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    • pp.1504-1510
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    • 2016
  • The aim of this study is to improve properties both glass transition temperature($T_g$) and coefficient of thermal expansion(CTE) using epoxy/micro-nano alumina composites with adding glycerol diglycidyl ether (GDE:1,2,3,5g). This paper deals with the effects of GDE addition for epoxy/micro alumina contents (40, 50, 60wt%)+surface modified nano alumina(1_phr) composites. 20 kinds specimen were prepared with containing micro, nano alumina and GDE as a micro composites(10, 20, 30, 40, 50, 60, 70wt%) or a nano/micro alumina composites(1phr/40, 50, 60wt%). Average particle size of nano and micro alumina used were 30nm and $1{\sim}2{\mu}m$, respectively. The micro alumina used were alpha phase with Heterogeneous and nano alumina were gamma phase particles of spherical shape. The glass transition temperature and coefficients of thermal expansion was evaluated by DSC and TMA. The glass transition temperature decreased and coefficients of thermal expansion become smaller with filled contents of epoxy/micro alumina composites. On the other hand, $T_g$ and CTE as GDE addition variation(1,2,3,5g) of epoxy/micro-nano alumina composites decreased and increased respectively.