• 한국공작기계학회논문집
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• 제17권2호
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• pp.51-57
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• 2008

Recently, the manufacturer of microscopic structures along with the development of technology to produce electronics, communication and semiconductors allows various components to be smaller in size, with higher precision. Therefore, preoccupancy of micro/nano-level machining technology in order to product micro/nano-components and parts is key issue in the field of manufacturing. In this study, machinability of micro machining was studied through the machining of aluminum, brass and steel workpiece. Inspection of the cutting force variation patterns of large numbers of micro machining indicated that characteristics of the workpiece. Surface roughness prediction methods were developed by considering the variation of the static part of the feed direction cutting force. The accuracy of the proposed approaches were tested with experimental data and the agreement between the predictions and actual observations are addressed.

• 한국정밀공학회지
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• 제17권1호
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• pp.21-26
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• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

• Advances in nano research
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• 제7권5호
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• pp.351-364
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• 2019

In this work, dynamic behavior of functionally graded (FG) porous nano-beams is studied based on nonlocal nth-order shear deformation theory which takes into the effect of shear deformation without considering shear correction factors. It has been observed that during the manufacture of "functionally graded materials" (FGMs), micro-voids and porosities can occur inside the material. Thus, in this work, the investigation of the dynamic analysis of FG beams taking into account the influence of these imperfections is established. Material characteristics of the FG beam are supposed to be vary continuously within thickness direction according to a "power-law scheme" which is modified to approximate material characteristics for considering the influence of porosities. A comparative study with the known results in the literature confirms the accuracy and efficiency of the current nonlocal nth-order shear deformation theory.

• Steel and Composite Structures
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• 제39권5호
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• pp.565-581
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• 2021

In this paper the buckling analysis of the nanoplate made of arbitrary bi-directional functionally graded (BDFG) materials with small scale effects are investigated. To study the small-scale effects on buckling load, the Eringen's nonlocal theory is applied. Employing the principle of minimum potential energy, the governing equations are obtained. Generalize differential quadrature method (GDQM) is used to solve the governing equations for various boundary conditions to obtain the buckling load of BDFG nanoplates. These models can degenerate into the classical models if the material length scale parameter is taken to be zero. Comparison between the results of GDQ method and other papers for buckling analysis of a simply supported rectangular nano FGM plate reveals the accuracy of GDQ method. At the end some numerical results are presented to study the effects of material length scale parameter, plate thickness, aspect ratio, Poisson's ratio boundary condition and side to thickness ratio on size dependent Frequency.

• 전기전자학회논문지
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• 제22권2호
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• pp.420-426
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• 2018

가까운 미래에, 전자의 ballastic 혹은 near-ballastic 이동이 가능한 CNT(Carbon NanoTube)를 활용한 CNTFET(Carbon NanoTube Field Effect Transistor)은 현재의 실리콘 기반 트랜지스터를 교체할 유력한 후보 중 하나로 고려되고 있다. 고성능의 CNTFET으로 대규모 집적회로를 구현하기 위해서는 semiconducting CNT가 CNTFET 안에 동일한 간격과 높은 밀도로 정렬되어 배치되어야 하지만, CNTFET 공정의 미성숙으로, CNTFET 안의 CNT는 불규칙하게 배치하게 되고, 현존하는 HSPICE 라이브러리 파일은 불규칙한 CNT 배치에 의한 성능의 변화를 회로 레벨에서 평가할 수 있는 기능을 지원하지 않는다. 이러한 성능의 변화를 평가하기 위해서 선형 프로그래밍을 활용한 방법이 과거에 제안되었으나, CNTFET의 전류와 게이트 커패시턴스를 계산하는 과정에서 오차가 발생할 수 있는 문제점이 있다. 본 논문에서는 언급한 오차가 발생되는 이유에 대해서 자세히 논하고, 이 오차를 줄일 수 있는 새로운 방법을 제시하고자 한다. 시뮬레이션 검토 결과, 새롭게 제시된 방법이 기존 방법의 오차, 7.096%를 3.15%까지 줄일 수 있음을 보이고 있다.

• 한국정밀공학회지
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• 제28권3호
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• pp.292-300
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• 2011

Control systems in machinery equipment provide correction signals to motion units in order to reduce or cancel out the mismatches between sensor feedback signals and command or desired values. In this paper, we introduce a simulator for control characteristics of machinery equipment. The purpose of the simulator development is to provide mechanical system designers with the ability to estimate how much dynamic performance can be achieved from their design parameters and selected devices at the designing phase. The simulator has a database for commercial parts, so that the designers can choose appropriate components for servo controllers, motors, motor drives, and guide ways, etc. and then tune governing parameters such as controller gains and friction coefficients. The simulator simulates the closed-loop control system which is built and parameter-tuned by the designer and shows dynamic responses of the control system. The simulator treats the moving table as a 6 degrees-of-freedom rigid body and considers the motion guide blocks stiffness, damping and their locations as well as sensor locations. The simulator has been under development for one and a half years and has a few years to go before the public release. The primary achievements and features will be presented in this paper.

• Advances in nano research
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• 제12권5호
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• pp.467-482
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• 2022

In the current work, static and free torsional vibration of functionally graded (FG) nanorods are investigated using Fourier sine series. The boundary conditions are described by the two elastic torsional springs at the ends. The distribution of functionally graded material is considered using a power-law rule. The systems of equations of the mechanical response of nanorods subjected to deformable boundary conditions are achieved by using the modified couple stress theory (MCST) and taking the effects of torsional springs into account. The idea of the study is to construct an eigen value problem involving the torsional spring parameters with small scale parameter and functionally graded index. This article investigates the size dependent free torsional vibration based on the MCST of functionally graded nano/micro rods with deformable boundary conditions using a Fourier sine series solution for the first time. The eigen value problem is constructed using the Stokes' transform to deformable boundary conditions and also the convergence and accuracy of the present methodology are discussed in various numerical examples. The small size coefficient influence on the free torsional vibration characteristics is studied from the point of different parameters for both deformable and rigid boundary conditions. It shows that the torsional vibrational response of functionally graded nanorods are effected by geometry, small size effects, boundary conditions and material composition. Furthermore, for all deformable boundary conditions in the event of nano-sized FG nanorods, the incrementing of the small size parameters leads to increas the torsional frequencies.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2005년도 춘계 학술대회
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• pp.125-128
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• 2005

The equipments in semi-conductor, display and measurement fields require high precision and resolution positioning technology. High positioning control can be carried out by using linear motors with little vibration, backlash and friction. In this paper, the acceleration patterns of the moving Part are analyzed to obtain the optimum pattern which leads to the less vibration reduction of equipment. In addition, the effect of friction force in guide rail on position control accuracy is investigated to identify possibility of using current bearing system for nano-positioning control.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
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• 한국우주과학회 2003년도 한국우주과학회보 제12권2호
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• pp.27-27
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• 2003

The Automated Quantitative Knife-Edge Test (AQuaKET) method was developed for testing the surface profiles of large optics with high accuracy. Testing with the required accuracy of very large telescope is not an easy job to achieve, as it is a nano-technology. There are lots of possible error sources which can occur during the measurements and in the data processing of the AQuaKET. The error sources can be categorized into 5 areas: optics, mechanics, electronics, numerical processes, and system. In this paper, possible error sources in Optics are discussed, which are intensity variation of the light source, diffraction effects, and parallax effect. In this talk, those possible error sources in optics are presented and discussed.

• 한국생산제조학회지
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• 제20권1호
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• pp.86-95
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• 2011

Ultra-precision machining technology is the essential core technology in today's micro-electronics and electro-optical industries. The needs for processing systems to manufacture products to nanometer(nm) accuracy and sub-nanometer resolutions are increased recently. By using ion beam, it is possible to fabricate ultra-precision and ultra-fine products with nm accuracy and sub-nm resolution. In this paper, the basic research trends of ultra precision machining technology in domestic are surveyed, and the ways to reach to the world-leading level of basic research capabilities in the field of ultra-precision machining technology in domestic is suggested.