• 한국소음진동공학회논문집
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• 제21권9호
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• pp.813-819
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• 2011

This paper predicted nonlinear dynamic responses of a cantilevered carbon nanotube(CNT) resonator incorporating the electrostatic forces and van der Waals interactions between the CNT cantilever and ground plane. The structural model of CNT includes geometric and inertial nonlinearities to investigate various phenomena of nonlinear responses of the CNT due to the electrostatic excitation. In order to solve this problem, we used Galerkin's approximation and the numerical integration techniques. As a result, the CNT nano-resonator shows the softening effect through saddle-node bifurcation near primary resonance frequency with increasing the applied AC and DC voltages. Also we can predict nonlinear secondary resonances such as superharmonic and subharmonic resonances. The superharmonic resonance of the nano-resonator is influenced by applied AC voltage. The period-doubling bifurcation leads to the subharmonic resonance which occurs when the nano-resonator is actuated by electrostatic forces as parametric excitation.

• 한국소음진동공학회논문집
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• 제22권12호
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• pp.1157-1163
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• 2012

Natural frequency of a nano-resonator via nano transfer printing is studied. Through a nano transfer printing, the hybrid metal/polymer membrane may evolve a wrinkle. Natural frequency of a wrinkled hybrid membrane decreases significantly, as the amplitude to wavelength ratio becomes larger. To address the design limit of a hybrid nano resonator, we perform parametric study using finite element analysis. Specifically, we study the effects of the Young's modulus ratio of the metal/polymer membrane, thickness ratio and wrinkle amplitude to wavelength ratio, respectively. The results from the parametric studies can serve as guideline to design hybrid nano resonators.

• 센서학회지
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• 제29권5호
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2011년도 춘계학술대회 논문집
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• pp.447-452
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• 2011

This paper predicted the dynamic behaviors of a cantilevered carbon nanotube(CNT) incorporating the electrostatic force, van der Waals interactions between the CNT and ground plane. The structural model of the CNT includes geometric and inertial nonlinearities for predicting various phenomena of nonlinear responses of the CNT due to the electrostatic force. In order to solve the problem, we used Galerkin's approximation and the numerical integration techniques and as a result, we predicted characteristics of nonlinear response of nano resonator. The cantilevered CNT shows complex dynamic responses and instabilities due to the applied ac and ac voltages, and driving frequencies. The results investigated in this paper are helpful to the modeling of nanotube based electromechanical devices such as nano-resonators and nano-sensors.

• 반도체디스플레이기술학회지
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• 제16권1호
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• pp.102-105
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• 2017

Currently, the size of the electronic device is in the nano area. In order to control the movements of these nanoscale devices, one should be able to understand the physical phenomena in the nano area. Recently, due to carbon nanotubes and mechanical outstanding electrical conductivity and mechanical characteristics of the carbon nanotubes and Graphene behaves to apply. Efforts have been active. There are various tubes with a radius of a in a compact mass in the form of a Multi walled carbon nanotubes in different between the radius. Van der Waals force can move smoothly without friction with each other by the nanoscale motor turning, using the properties, making. This is the lightest solids per unit area on the thickness is electrical atomic layer one of the substance and the electrical conductivity, the best material and mechanical characteristics are very much. Many studies because great is the ideal nanoelectromechanical device of material is being considered. In this study, electrical resonator for a new structure proposed and the nature and methodology would like to come up.

• Structural Engineering and Mechanics
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• 제73권3호
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• pp.287-302
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• 2020

This investigation deals with a size-dependent coupled thermoelasticity analysis based on Green-Naghdi (GN) theory in nano scale using a new modified nonlocal model of heat conduction, which is based on the GN theory and nonlocal Eringen theory of elasticity. In the analysis based on the proposed model, the nonlocality is taken into account in both heat conduction and elasticity. The governing equations including the equations of motion and the energy balance equation are derived using the proposed model in a nano beam resonator. An analytical solution is proposed for the problem using the Laplace transform technique and Talbot technique for inversion to time domain. It is assumed that the nano beam is subjected to sinusoidal thermal shock loading, which is applied on the one of beam ends. The transient behaviors of fields' quantities such as lateral deflection and temperature are studied in detail. Also, the effects of small scale parameter on the dynamic behaviors of lateral deflection and temperature are obtained and assessed for the problem. The proposed GN-based model, analytical solution and data are verified and also compared with reported data obtained from GN coupled thermoelasticity analysis without considering the nonlocality in heat conduction in a nano beam.

• 반도체디스플레이기술학회지
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• 제12권2호
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• pp.63-66
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• 2013

Carbon Nanotube have been proposed for use in various applications for electromechanical systems. Nano-electromechanical resonators which provide high frequency resolution and long energy storage time, play an important role in wide area fields of science and engineering. Using the control of tension in carbon nanotube, can be made the tunable resonator. In the study, we analysis the tunable frequency change of resonator by tension changes due to the rotation angles of the single-walled carbon nanotube resonator. The frequency characteristics of a resonator as a function of the rotation angle. The tension was found to decrease with increasing rotation angle, and therefore the resonance frequencies could be changed by controlling the single-walled carbon nanotube rotation angle. The resonance frequencies decreased with increasing angle, and when the rotation angle was greater than $60^{\circ}$, these changes were marked.

• Advances in nano research
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• 제14권3호
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• pp.285-294
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• 2023

The dynamic and sensing performances of nanomechanical resonators with their different boundary conditions are studied based on surface elasticity-based modeling and simulation. Specifically, the effect of surface stress is included in Euler-Bernoulli beam model for different boundary conditions. It is shown that the surface effect on the intrinsic elastic property of nanowire is independent of boundary conditions, while these boundary conditions affect the frequency behavior of nanowire resonator. The detection sensitivity of nanowire resonator is remarkably found to depend on the boundary conditions such that double-clamping boundary condition results in the higher mass sensitivity of the resonator in comparison with simple-support or cantilever boundary condition. Furthermore, we show that the frequency shift of nanowire resonator due to mass adsorption is determined by its length, whereas the frequency shift is almost independent of its thickness. This study enables a design principle providing an insight into how the dynamic and sensing performances of nanomechanical resonator is determined and tuned.

• 한국전자파학회논문지
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• 제28권1호
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• pp.69-75
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• 2017

본 논문에서는 자기공진형 무선전력전송의 실용화에 있어, 공진기 간 자기결합을 방해하는 그라운드 문제를 해결하기 위해 슬릿 구조를 설계하고, 커패시터를 연결하여 공진기로써의 성능을 기본적인 루프형의 수신 공진기와 비교하였다. 제안된 슬릿 그라운드 공진기(slit ground resonator)는 가로 31 cm, 세로 20.5 cm, 두께 $35{\mu}m$의 구리박판에 넓이 1 cm의 슬릿을 한 방향이 열린 십자 형태로 설계하였으며, 열린 방향 양단에 6.78 MHz에서 공진하도록 최적의 커패시터가 연결되어 공진기 역할이 가능하다. 수신 공진기는 스위치를 연결하여 열림형(open mode)과 닫힘형(short mode)일 때를 측정하고, 최고 전송효율을 표시하였다. 측정 결과, 수신 공진기가 루프 공진기일 때 가장 높은 전송효율을 보였다. 그러나 노트북 모델의 수신부에 그라운드를 삽입했을 때, 전송효율이 0 %에 가깝게 감소하였다. 반면, 슬릿 그라운드 공진기를 수신 공진기로 사용했을 때, 전송효율은 가장 높았던 루프 공진기의 67 % 회복하였다. 제안된 슬릿 그라운드 공진기는 슬릿을 통해 자기장을 통과시키며, 커패시터를 연결이 공진기로 동작하게 하여 주변 공진기 간 자기결합을 통해 전력을 전송해주는 역할을 수행한다.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2011년도 자성 및 자성재료 국제학술대회
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• pp.68-69
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• 2011