• Progress in Superconductivity and Cryogenics
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• v.17 no.3
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• pp.9-12
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• 2015

NbN thin films were deposited on thermally oxidized Si substrate at room temperature by using reactive magnetron sputtering in an $Ar-N_2$ gas mixture. Total sputtering gas pressure was fixed while varying $N_2$ flow rate from 1.4 sccm to 2.9 sccm. X-ray diffraction pattern analysis revealed dominant NbN(200) orientation in the low $N_2$ flow rate but emerging of (111) orientation with diminishing (200) orientation at higher flow rate. The dependences of the superconducting properties on the $N_2$ gas flow rate were investigated. All the NbN thin films showed a small negative temperature coefficient of resistance with resistivity ratio between 300 K and 20 K in the range from 0.98 to 0.89 as the $N_2$ flow rate is increased. Transition temperature showed non-monotonic dependence on $N_2$ flow rate reaching as high as 11.12 K determined by the mid-point temperature of the transition with transition width of 0.3 K. On the other hand, the upper critical field showed roughly linear increase with $N_2$ flow rate up to 2.7 sccm. The highest upper critical field extrapolated to 0 K was 17.4 T with corresponding coherence length of 4.3 nm. Our results are discussed with the granular nature of NbN thin films.

• Membrane Journal
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• v.23 no.6
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• pp.432-438
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• 2013

Mixed-matrix membranes (MMMs) containing MIL-100(Fe), a MOF type, were fabricated in this study. MMMs up to 30 wt% MOF loading were prepared, and their gas permeabilities were tested. $H_2$, $CO_2$, $O_2$, $N_2$, and $CH_4$ gas permeabilities increased with the MOF loading, while $SF_6$, the largest kinetic diameter in this study, exhibited reduction of gas permeability with the loading. Ideal gas selectivity of $N_2/SF_6$ improved by 40% as compared with pure polyimide membrane, suggesting the proposed MMMs were suitable for $N_2/SF_6$ separation.

• Journal of Korean Society for Atmospheric Environment
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• v.23 no.2
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• pp.225-241
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• 2007

A closed flux chamber system was used for measuring major greenhouse gas (GHG) emission from tideland and/or wetland soils in estuarine area at Saemankum, Kunsan in southwestern Korea during from months of February to June 2006. Hourly averaged GHG soil emissions were measured two to three times a day during the ebb tide hours only. Site soils were analyzed for soil parameters (temperature, pH, total organic contents, N and C contents in soil) in the laboratory. Soil GHG fluxes were calculated based on the GHG concentration rate of change measured inside a closed chamber The analysis of GHG was conducted by using a Gas Chromatography (equipped with ECD/FID) at laboratory. Changes of daily, monthly GHGs' fluxes were examined. The relationships between the GHG emissions and soil chemical contents were also scrutinized with respect to gas production and consumption mechanism in the soil. Soil pH was pH $7.47{\pm}0.49$ in average over the experimental period. Organic matter contents in sample soil was $6.64{\pm}4.98\;g/kg$, and it shows relatively lower contents than those in agricultural soils in Kunsan area. Resulting from the soil chemistry data, soil nitrogen contents seem to affect GHG emission from the tidal land surface. The tidal soil was found to be either source or sink for the major GHG during the experimental periods. The annual average of $CH_{4}\;and\;CO_{2}$ fluxes were $0.13{\pm}0.86\;mg\;m^{-2}h^{-1}\;and\;5.83{\pm}138.73\;mg\;m^{-2}h^{-1}$, respectively, which will be as a source of these gases. However, $N_{2}O$ emission showed in negative flux, and the value was $-0.02{\pm}0.66\;mg\;m^{-2}h^{-1}$, and it implies tidal land surface act as a sink of $N_{2}O$. Over the experimental period, the absolute values of gas fluxes increased with soil temperature in general. Averages of the ambient gas concentration were $86.8{\pm}6.\;ppm$ in $CO_{2},\;1.63{\pm}0.34\;ppm\;in\;CH_{4},\;and\;0.59{\pm}0.15\;ppm\;in\;N_{2}O$, respectively. Generally, under the presence of gas emission from agricultural soils, decrease of gas emission will be observed as increase in ambient gas concentration. We, however, could not found significant correlation between the ambient concentrations and their emissions over the experimental period. There was no GHG compensation points existed in tide flat soil.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.27 no.1
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• pp.85-91
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• 2013

This paper studied surface discharge characteristics by a dielectric constant and diameter of solid dielectrics in $N_2/O_2$ mixture gas. Applied electric field strength at $N_2/O_2$ mixture gas was changed from the dielectric constant and diameter of the solid dielectrics, and insulation performance of the $N_2/O_2$ mixture gas determined surface discharge voltage. In each of the diameter at the solid dielectrics, the surface discharge voltage was increased by lengthening surface distance, whereas increasing rate of the surface discharge voltage was different from gas pressure. Thus, In this paper, main factors of surface discharge are as follows. 1) Insulation performance of $N_2/O_2$ mixture gas, 2) Dielectric constant of solid dielectrics, 3) Surface discharge path. It was clear that the surface discharge voltage depend on the main factors. These results will be applied to useful data for an eco-friendly composite insulation design.

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.11a
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• pp.36-36
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• 1998

• Journal of the Korean Institute of Gas
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• v.4 no.2 s.10
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• pp.1-6
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• 2000

In this experiment, we made the plasma reactor which adhere needle electrode in order to treat safely an NOx which was included in the gas. Also we experimently investigated characteristics of equipment and inspected efficiency. As a reaction gas, by using mixture gas of $NO/N_2$ and $N_2/O_2$, we setted up initial NO concentration and gas flow rate was set at 2 ${\iota}$/min. As a reaction characteristics of NOx, when discharge input power was high, NO concentration decreased and when the oxygen concentration increased, the NO decomposition was easy and decomposition energy efficiency was high. Also in case that NO concentration increased, NO decomposition energy efficiency was high but decomposition rate was low. The characteristics of ozone, when discharge input power was high, ozone increased and when $NO/N_2$ concentration increased, the ozone decreased.

• Korean Journal of Materials Research
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• v.23 no.9
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• pp.477-482
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• 2013

We investigated the detection properties of nitrogen monoxide (NO) gas using transparent p-type $CuAlO_2$ thin film gas sensors. The $CuAlO_2$ film was fabricated on an indium tin oxide (ITO)/glass substrate by pulsed laser deposition (PLD), and then the transparent p-type $CuAlO_2$ active layer was formed by annealing. Structural and optical characterizations revealed that the transparent p-type $CuAlO_2$ layer with a thickness of around 200 nm had a non-crystalline structure, showing a quite flat surface and a high transparency above 65 % in the range of visible light. From the NO gas sensing measurements, it was found that the transparent p-type $CuAlO_2$ thin film gas sensors exhibited the maximum sensitivity to NO gas in dry air at an operating temperature of $180^{\circ}C$. We also found that these $CuAlO_2$ thin film gas sensors showed reversible and reliable electrical resistance-response to NO gas in the operating temperature range. These results indicate that the transparent p-type semiconductor $CuAlO_2$ thin films are very promising for application as sensing materials for gas sensors, in particular, various types of transparent p-n junction gas sensors. Also, these transparent p-type semiconductor $CuAlO_2$ thin films could be combined with an n-type oxide semiconductor to fabricate p-n heterojunction oxide semiconductor gas sensors.

• Journal of Korean Ophthalmic Optics Society
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• v.15 no.4
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• pp.361-366
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• 2010

Purpose: HCD ion plating apparatus by hollow cathod discharge method was fabricated and TiN films were deposited on stainless steel by this apparatus with increasing in $N_2$ gas flow and the fine color changes of TiN films were analyzed. Methods: The spectroradiometer and spectrophotometer were used to observe optically the fine color changes of TiN thin films, and XPS was used to analyze the compositions of TiN thin films with increasing in $N_2$ gas flow. Results: The color coordinate of TiN thin film with $N_2$ 120 sccm gas flow showed (0.382, 0.372) which had the mixed colors of gold and silver, and the color coordinate changed to the increasing value of (x,y) with increasing in $N_2$ gas flow which indicated the deep gold color. It was found that the slopes of the reflectances at 550nm were increased with increasing in $N_2$ gas flow. And from the Ti scans using XPS, it was found that the peak heights of 455 eV derived from TiN composition were increased with increasing in $N_2$ gas flow, while the peak heights of 459 eV from $TiO_2$ composition were decreased. Conclusions: The results obtained above were that the color of TiN film with 120 sccm $N_2$ gas flow had been observed from the mixed color of silver and gold due to TiC, $N_2$, TiN on the surface and TiN, $N_2$ inside film, and the color of TiN films changed a deep gold color with increasing in $N_2$ gas flow due to increasing TiN composition.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.14-14
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• 2014

STT-MRAM의 구성물질인 magnetic tunnel junction의 효과적인 식각을 위하여 다양한 가스 조합을 연구하였다. 그 결과 $CH_4/N_2O$ gas 조합보다는 $CH_3OH$ gas 가 보다 향상된 식각 특성을 나타내었고 pulse duty ratio 변화와 기판온도 변화가 식각특성 향상에 영향을 주었음을 알 수 있었다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.10
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• pp.812-816
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• 2000

It is very important to understand the correlation of between inter dielectric(ILD) CMP process and various facility factors supplied to equipment to equipment system. In this paper, the correlation between the various facility factors supplied to CMP equipment system and ILD-CMP process was studied. To prevent the partial over-polishing(edge hot-spot) generated in the wafer edge area during polishing, we analyze various facilities supplied at supply system. With facility shortage of D.I water(DIW) pressure, we introduced an adding purified $N_2$(P$N_2$)gas in polishing head cleaning station for increasing a cleaning effect. DIW pressure and P$N_2$gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. We estimated two factors (DIW pressure and P$N_2$gas) for the improvement of CMP process. Especially, we obtained a uniform planarity in patterned wafer and prohibited more than 90% wafer edge over-polishing. In this study, we acknowledged that facility factors supplied to equipment system played an important role in ILD-CMP process.