• Korean Journal of Materials Research
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• v.23 no.6
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• pp.299-303
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• 2013

In this study, a micro gas sensor for $NO_x$ was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about $2mm{\times}2mm$. Indium oxide as a sensing material for the $NO_x$ gas was synthesized by a sol-gel process. The particle size of synthesized $In_2O_3$ was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance ($R_s=R_{gas}/R_{air}$), occurred at $300^{\circ}C$ with a value of 8.0 at 1 ppm $NO_2$ gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the $NO_2$ gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1994.11a
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• pp.118-121
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• 1994

The NO$_2$ gas-detection characteristics were investigated using the functional organic Langmuir-Blodgett(LB) film of Copper-tetra-tert-butylphalocyanine(CUTBP). The optimum conditions for a film deposition were obtained through a study of $\pi$-A isotherm and the deposited film status was confirmed by ellipsometry measurements. In the NO$_2$ response experiments, first of all, the proper number of layer was obtained by a change of the electrical conductivities depending on the number of layer when the film is exposed to the gas. And response time, recovery time, and reproducibility were measured on it. On the other hand, how the NO$_2$ gas interacts to the LB film was studied by UV/visible absorption spectra.

• Proceedings of the Korea Concrete Institute Conference
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• 2003.05a
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• pp.261-266
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• 2003

This study is to investigate the heating value and noxious gases generation such as CO, NO and $SO_2$ known as dangerous gas for human from specimen made of cement and lightweight aggregate. The most quanity of CO gas is generated in EPS(Expanded Poly Styrene), core of commercial sandwich panel. Although specimens mainly composed of cement discharged the relatively less CO gas than organic core such as EPS, specimens which SBR was added discharged the very much amount of CO gas similar to EPS and especially, specimens including foaming agent, gas foaming agent or redipersible powder of VA/VeoVa showed the good properties in the generation of CO gas. From the standpoint of the generation of NO and $SO_2$ gas, both the core of commercial sandwich panel such as EPS, Glass wool and specimens made with polymer dispersion such as St/BA and SBR discharge the very much amount of NO and $SO_2$ gas in comparison of the other specimens. From this study, it was confirmed that organic materials such as core of commercial sandwich panel dischared much more noxious gas than specimens composed of cement and inorganic lightweight aggregate.

• Journal of the Semiconductor & Display Technology
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• v.11 no.1
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• pp.55-59
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• 2012

NOx is one of the toxin gases, which is mainly causing the optic-chemical smog phenomena, and decreasing in the function of nose and taste. Especially, NO is easily reacting with $O_3$, and then becoming the $NO_2$. $NO_2$ is mainly causing the acidulation rain. So, we should develop the NOx gas sensing system to detect NOx gas. In this paper, we present the microstructure and the NOx gas detecting properties of the nitrocellulose/MWCNT thin film coated by the air-spray on the glass substrate. The nitrocellulose/MWCNT-based gas sensors have been studied detecting NOx molecules of a ppm-level at the temperature range of $30{\sim}120^{\circ}C$. The resistance of the sensors decreases when the sensors are exposed to NOx gas. As a results, we obtained the nitrocellulose/MWCNT sensors with the sensitivity of 0.6%/sec under the 0.8 ppm of NOx gas concetration. Also, we get the activation energy of 0.202eV from the sensor for the 0.3 ppm of NOx gas concentration.

• Korean Journal of Materials Research
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• v.19 no.11
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• pp.631-636
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• 2009

We investigated the NO gas sensing characteristics of ZnO-carbon nanotube (ZnO-CNT) layered composites fabricated by coaxial coating of single-walled CNTs with a thin layer of 1 wt% Al-doped ZnO using rf magnetron sputtering deposition. Morphological studies clearly revealed that the ZnO appeared to form beadshaped crystalline nanoparticles with an average diameter as small as 30 nm, attaching to the surface of the nanotubes. It was found that the NO gas sensing properties of the ZnO-CNT layered composites were dramatically improved over Al-doped ZnO thin films. It is reasoned from these observations that an increase in the surface-to-volume ratio associated with the numerous ZnO “nanobeads” on the surface of the CNTs results in the enhancement of the NO gas sensing properties. The ZnO-CNT layered composite sensors exhibited a maximum sensitivity of 13.7 to 2 ppm NO gas at a temperature of 200${^{\circ}C}$ and a low NO gas detection limit of 0.2 ppm in dry air.

• Korean Journal of Materials Research
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• v.28 no.1
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• pp.32-37
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• 2018

We report on the efficient detection of NO gas by an all-oxide semiconductor p-n heterojunction diode structure comprised of n-type zinc oxide (ZnO) nanorods embedded in p-type copper oxide (CuO) thin film. The CuO thin film/ZnO nanorod heterostructure was fabricated by directly sputtering CuO thin film onto a vertically aligned ZnO nanorod array synthesized via a hydrothemal method. The transport behavior and NO gas sensing properties of the fabricated CuO thin film/ZnO nanorod heterostructure were charcterized and revealed that the oxide semiconductor heterojunction exhibited a definite rectifying diode-like behavior at various temperatures ranging from room temperature to $250^{\circ}C$. The NO gas sensing experiment indicated that the CuO thin film/ZnO nanorod heterostructure had a good sensing performance for the efficient detection of NO gas in the range of 2-14 ppm under the conditions of an applied bias of 2 V and a comparatively low operating temperature of $150^{\circ}C$. The NO gas sensing process in the CuO/ZnO p-n heterostructure is discussed in terms of the electronic band structure.

• Journal of Industrial Technology
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• v.18
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• pp.249-258
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• 1998

In this paper, we investigated the post-combustion removal of nitrogen oxide($NO_x$) and sulfur oxide($SO_x$) which is based on the gas to particle conversion process by the pulsed corona discharge. Under normal pressure, the pulsed corona discharge produces the energetic free electrons which dissociate gas molecules to form the active radicals. These radicals cause the chemical reactions that convert $SO_x$ and $NO_x$ into acid mists and these mists react with $NH_3$ to form solid particles. Those particles can be removed from the gas stream by conventional devices such as electrostatic precipitator or bag filter. The reactor geometry was coaxial with an inner wire discharge electrode and an outer ground electrode wrapped on a glass tube. The simulated flue gas with $SO_x$ and $NO_x$ was used in the experiment. The corona discharge reactor was more efficient in removing $SO_x$ and $NO_x$ by adding $NH_3$ and $H_2O$ in the gas stream. We also measured the removal efficiency of $SO_x$ and $NO_x$ in a cylinder type corona discharge reactor and obtained more than 90 % of removal efficiency in these experimental conditions. The effects of process variables such as the inlet concentrations of $SO_x$, $NH_3$ and $H_2O$, residence time, pulse frequencies and applied voltages were investigated.

• Korean Chemical Engineering Research
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• v.45 no.2
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• pp.143-148
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• 2007

In hydrogen production for fuel cell by reforming city-gas, sulfur compounds, odorant in city-gas, are detrimental to reforming catalyst and fuel cell electrodes. We prepared metal salt impregnated ${\beta}-zeolite(BEA)$ to remove sulfur compound in city-gas by adsorption. The sulfur breakthrough adsorption capacity was changed depending on the concentration and species of metal salt. $AgNO_3$ impregnated BEA showed the highest sulfur breakthrough capacity among adsorbents used in this experiment(41.1 mg/g). But metal salt impregnated BEA such as $Ni(NO_3)_2/BEA$, $Fe(NO_3_)_3/BEA$, $Co(NO_3)_2/BEA$ showed a certain amount of sulfur adsorption capacity comparable to $AgNO_3/BEA$. Adsorption temperature effect, desorption study, and x-ray photoelectron spectroscopy analysis revealed that the dominant interaction between metal impregnated adsorbent and sulfur compounds was not chemisorption but physisorption.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.11a
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• pp.105-108
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• 1998

Pt-WO$_3$-Si$_3$N$_4$-SiO$_2$-Si-Al 캐패시터를 이용한 NO$_2$ 가스 센서를 개발하였다. 표준 실리콘 MNOS구조에 촉매 게이트로 Pt와 가스 흡착층으로 WO$_3$를 이용함으로서 전통적인 세라믹 가스 센서보다 낮은 온도에서 NO$_2$ 가스를 감지할 수 있었다. 은도 변화와 NO$_2$ 가스 농도의 변화에 따라서 디바이스의 NO$_2$ 가스 감도를 조사하였다. Pt-WO$_3$ 계면에서 NO$_2$ 이온농도의 변화에 기초로 한 가스 감지 모델을 제시하였다. 제시된 가스 감지 모델을 계면에서의 가스 반응 속도론에 의하여 분석함으로서 확인하였다.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.2
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• pp.591-596
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• 1995

In order to investigate the reduction of NO emissions, natural gas was fueled for two-stage combustion apparatus. NO and CO emissions were described by five variables: total air ratio, primary air ratio, secondary air injection position, secondary air injection velocity, and swirl ratio. It was mainly observed that, as the primary air ratios of 0 and 0.4 NO emission decreased with increasing the secondary air injection position and secondary air injection velocity. The effect of weak swirl on NO emission was found to be insignificant.