• 제목/요약/키워드: NH3 Plasma

검색결과 234건 처리시간 0.035초

플라즈마를 이용한 FGR 기반 저 NOx 연소 타당성 연구 (Feasibility Study of Low NOx Combustion based on FGR using Plasma Reformer)

  • 김관태;이대훈;차민석;길상인;윤진한;김동현;송영훈
    • 한국연소학회지
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    • 제12권3호
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    • pp.1-7
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    • 2007
  • A combined hydrogen generator of plasma and catalytic reformer was developed, and was applied to stabilize unstable flame of 200,000 Kcal/hr LPG combustor. The role of the plasma reformer was to generate hydrogen in a short period and to heat-up the catalytic reformer during the start-up time. After the start-up period, the catalytic reformer generates hydrogen through steam reforming with oxygen (SRO) reactions. The maximum capacity of the hydrogen generator was enough 100 lpm to stabilize the flame of the present combustor. In order to reduce NOx and CO emissions simultaneously, 1) FGR (Flue Gas Recirculation) technique has been adopted and 2) the hydrogen was added into the fuel supplied to the combustor. Test results showed that the addition of 25% hydrogen and 30% FGR rate lead to simultaneous decrease of CO and NOx emissions. The technique developed in the present study showed good potential to replace $NH_3$ SCR technique, especially in the small-scale combustor applications.

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Nitrogen-Doping of Nano-Thin Exfoliated (NTE) Graphite by RF Thermal Plasma with NH3

  • 이규항;신명선;최선용;조광섭;김성인
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.233.1-233.1
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    • 2016
  • 화학적 방법에 의한 NTE graphite의 박리 또는 전도도 개선을 위한 도핑공정을 수행할 경우, 결함 및 불순물 생성에 의해 재결정화 공정 및 순도 개선을 위한 별도의 공정을 필요로한다. 본 연구에서는 건식 방법으로써 10,000K 이상의 초고온 RF 열플라즈마를 이용하여 in-situ 방법으로 흑연의 박리, 결함 제거, 결정성 향상 및 도핑 공정을 수행하고, 도핑특성을 평가하였다. 질소 도핑을 위하여 암모니아 가스를 첨가하여 NTE graphite를 도핑 처리하였으며, 시뮬레이션을 통하여 반응기 내부의 온도분포를 파악하고, 도핑을 위한 암모니아가스가 분해되어 도핑공정이 수행될 수 있는 투입위치를 결정하였다. 질소 도핑율은 암모니아 가스의 주입위치에서의 온도 및 가스 주입 유량 등의 공정조건에 따라 변화됨을 확인하였고, XPS 분석결과 최대 14.87 atomic%의 도핑율의 결과를 얻었다.

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Characterization of linear microwave plasma based on N2/SiH4/NH3 gases using fluid simulation

  • 서권상;한문기;김동현;이해준;이호준
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.131.2-131.2
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    • 2015
  • 마이크로웨이브를 이용한 플라즈마는 효율적인 전자가열이 가능하며, 낮은 이온에너지를 가지는 고밀도 플라즈마를 생성시킬 수 있다는 장점이 있다. 최근 산화물 반도체 및 대화면 디스플레이 장치내 소자의 보호막 증착용으로 저온 PECVD (Plasma Enhanced Chemical Vapor Deposition) 공정 및 장치의 필요성에 따라 마이크로웨이브를 이용한 PECVD 장치가 주목 받고 있다. 본 연구에서는 실리콘 나이트라이드 공정 장치 개발을 위한 2차원 시뮬레이션 모델을 완성하였다. Global modeling을 이용하여 확보한 Chemical reaction data에 대한 검증을 하였다. Maxwell's equation, continuity equation, electromagnetic wave equation 등을 이용하여 Microwave의 파워 및 압력에 따른 전자 밀도, 전자 온도등의 플라즈마 변수의 변화를 관찰하였다. 또한 Navier Stokes equation을 추가하여 챔버 내의 Gas flow의 흐름을 고려한 시뮬레이션을 진행하여 분석하였다.

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석탄연소 배가스 처리용 플라즈마 탈황탈질 시스템의 운전 특성 (Operational Characteristics of Pilot Scale Plasma DeSOx-DeNOx System for Treatment of Coal-Fired Flue Gas)

  • 장길홍;백민수;김태희;정종한
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 하계학술대회 논문집 E
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    • pp.1806-1808
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    • 1998
  • Tests of pilot-scale plasma DeSOx-DeNOx system using pulsed streamer corona were carried out. The system consists of the reactor with wire-plate electrodes the $30kW_{max}$. MPC type pulse generator, and $1MW_{th}$ pulverized coal combustor as a flue gas source. $NH_3$ and $C_2H_4$ were used to enhance the removal rate. The experimental result on the removal efficiency of SOx/NOx and on the effect of the additives was presented in this paper.

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패터닝된 Ni 촉매 금속 위에서의 탄소나노튜브 성장 (Selective growth of carbon notubes by patterning nickel catalyst metal)

  • 방윤영;장원석;한창수
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.473-474
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    • 2006
  • Aligned carbon nanotubes(CNTs) array were synthesized using direct current plasma-enhanced chemical vapor deposition. The nickel microgrids catalyzed the growth of carbon nanotubes which take on the area of the nickel microgrids. Selective growth of areas of nanotubes was achieved by patterning the nickel film. CNTs were grown on the pretreated substrates at 30% $C_2H_2:NH_3$ flow ratios for 10min. Carbon nanotubes with diameters about 20 nanometers and lengths approximately 720 nanometers were obtained. Morphologies of carbon nanotubes were observed by FE-SEM and TEM.

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Purification and Characterization of a 25 kDa Cathepsin L-like Protease from the Hemocyte of Coleopteran Insect, Tenebrio molitor Larvae

  • Jang, Kyung-Suk;Cho, Mi-Young;Choi, Hye-Won;Lee, Kang-Moon;Kim, Mi-Hee;Lee, Young-Un;Kurata, Shoichiro;Natori, Shunji;Lee, Bok-Luel
    • BMB Reports
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    • 제31권4호
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    • pp.364-369
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    • 1998
  • Insect plasma protein is abundant in the hemolymph of holometabolous insect larvae and is used as a source of amino acids and energy for construction of adult structures during metamorphosis. In order to understand the mechanism of decomposition of larval plasma proteins by hemocyte protease, we tried to purify a cysteine protease from the hemocyte lysate by using Carbobenzoxy-L-Phenylalanyl-L-Arginine-4-Methyl-Coumaryl-7-Amide (Z-Phe-Arg-MCA) as substrate and to identify plasma proteins that are selectively susceptible to the purified protease. Here, we describe the purification and characterization of a cysteine protease that specifically hydrolyzes the plasma protein of the coleopteran insect, Tenebrio molitor, larvae. The molecular mass of this enzyme was 25 kDa, as determined by SDS-PAGE under reducing conditions. The amino acids sequence of its $NH_{2}-terminus$ was determined to be Leu-Pro-Gly-Gln-Ile-Asp-Trp-Arg-Asp-Lys-Gly. This sequence contained Pro, Asp, and Arg residues, conserved in many papain superfamily enzymes. The specific cysteine protease inhibitors, such as E-64 and leupetin, inhibited its hydrolytic activity. One plasma protein with a molecular mass of 48 kDa was selectively hydrolyzed within 3 h when the purified enzyme and plasma proteins were incubated in vitro. However, the 48 kDa protein was not hydrolyzed by the purified 25 kDa protease in the presence of E-64. Western blotting analysis at various developmental stages showed that the purified enzyme was detected at larvae, pupae, and adult stages, but not the embryo stage.

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Growth Performance, Carcass Characteristics and Plasma Mineral Chemistry as Affected by Dietary Chloride and Chloride Salts Fed to Broiler Chickens Reared under Phase Feeding System

  • Mushtaq, M.M.H.;Pasha, T.N.;Akram, M.;Mushtaq, T.;Parvin, R.;Choi, H.C.;Hwangbo, J.;Kim, J.H.
    • Asian-Australasian Journal of Animal Sciences
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    • 제26권6호
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    • pp.845-855
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    • 2013
  • Requirements of dietary chloride (dCl) and chloride salts were determined by using $4{\times}2$ factorial arrangement under four phase feeding program. Four levels (0.31, 0.45, 0.59 and 0.73%) and two sources ($NH_4Cl$ and $CaCl_2$) of the dCl were allocated to 1,472 chicks in eight dietary treatments in which each treatment was replicated four times with 46 birds per replicate. The four phase feeding program was comprised of four dietary phases: Prestarter (d 1 to 10), Starter (d 11 to 20), Grower (d 21 to 33) and Finisher (d 34 to 42); and diets were separately prepared for each phase. The cations, anions, pH, dissolved oxygen (DO), temperature, electrical conductivity (EC), total dissolved solids (TDS) and salinity were analyzed in drinking water and were not affected by dietary treatments. BW gain (BWG; $p{\leq}0.009$) and feed:gain (FG; $p{\leq}0.03$) were improved in $CaCl_2$ supplemented diets during d 1 to 10. The maximum response of BWG and FG was observed at 0.38% and 0.42% dCl, respectively, for d 34 to 42. However, the level of dCl for BWG during d 21 to 33 ($p{\leq}0.04$) and d 34 to 42 ($p{\leq}0.009$) was optimized at 0.60% and 0.42%, respectively. The level of dCl for optimized feed intake (FI; $p{\leq}0.006$), FG ($p{\leq}0.007$) and litter moisture (LM; $p{\leq}0.001$) was observed at 0.60%, 0.38% and 0.73%, respectively, for d 1 to 42. Water intake (DWI) was not affected by increasing dCl supplementation (p>0.05); however, the ratio between DWI and FI (DWI:FI) was found highest at 0.73% dCl during d 1 to 10 ($p{\leq}0.05$) and d 21 to 33 ($p{\leq}0.009$). Except for d 34 to 42 ($p{\leq}0.006$), the increasing level of dCl did not result in a significant difference in mortality during any phase. Blood pH and glucose, and breast and thigh weights (percentage of dressed weight) were improved while dressing percentage (DP) and gastrointestinal health were exacerbated with $NH_4Cl$ as compared to $CaCl_2$ supplemented diets ($p{\leq}0.001$). Higher plasma $Na^+$ and $HCO_3{^-}$ and lower $Cl^-$ and $Ca^{{+}{+}}$ were observed in $NH_4Cl$ supplemented diets ($p{\leq}0.001$). Increasing supplementation of dCl increased plasma $Cl^-$ ($p{\leq}0.04$; quadratically) and linearly reduced plasma $K^+$ ($p{\leq}0.001$), $Ca^{{+}{+}}$ ($p{\leq}0.003$), $HCO_3{^-}$ ($p{\leq}0.001$), and $Na^+$ ($p{\leq}0.001$; quadratically). Consequently, higher requirements of dietary chloride are suggested for feed intake; nevertheless, lower levels of dietary chloride are sufficient to support optimal BWG and FG with increasing age. The $NH_4Cl$ supplemented diets ameliorate breast and thigh meat yield along with overall energy balance (glucose).

결정질 실리콘 태양전지를 위한 실리콘 질화막의 특성 (Properties of Silicon Nitride Deposited by RF-PECVD for C-Si solar cell)

  • 박제준;김진국;송희은;강민구;강기환;이희덕
    • 한국태양에너지학회 논문집
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    • 제33권2호
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    • pp.11-17
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    • 2013
  • Silicon nitride($SiN_x:H$) deposited by radio frequency plasma enhanced chemical vapor deposition(RF-PECVD) is commonly used for anti-reflection coating and passivation in crystalline silicon solar cell fabrication. In this paper, characteristics of the deposited silicon nitride was studied with change of working pressure, deposition temperature, gas ratio of $NH_3$ and $SiH_4$, and RF power during deposition. The deposition rate, refractive index and effective lifetime were analyzed. The (100) p-type silicon wafers with one-side polished, $660-690{\mu}m$, and resistivity $1-10{\Omega}{\cdot}cm$ were used. As a result, when the working pressure increased, the deposition rate of SiNx was increased while the effective life time for the $SiN_x$-deposited wafer was decreased. The result regarding deposition temperature, gas ratio and RF power changes would be explained in detail below. In this paper, the optimized condition in silicon nitride deposition for silicon solar cell was obtained as 1.0 Torr for the working pressure, $400^{\circ}C$ for deposition temperature, 500 W for RF power and 0.88 for $NH_3/SiH_4$ gas ratio. The silicon nitride layer deposited in this condition showed the effective life time of > $1400{\mu}s$ and the surface recombination rate of 25 cm/s. The crystalline silicon solar cell fabricated with this SiNx coating showed 18.1% conversion efficiency.

가스비와 두께 가변에 따른 실리콘질화막의 특성 (Properties of Silicon Nitride Deposited by LF-PECVD with Various Thicknesses and Gas Ratios)

  • 박제준;김진국;이희덕;강기환;유권종;송희은
    • 한국태양에너지학회:학술대회논문집
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    • 한국태양에너지학회 2011년도 추계학술발표대회 논문집
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    • pp.154-157
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    • 2011
  • Hydrogenated silicon nitride deposited by LF-PECVD is commonly used for anti-reflection coating and passivation in silicon solar cell fabrication. The deposition of the optimized silicon nitride on the surface is elemental in crystalline silicon solar cell. In this work, the carrier lifetimes were measured while the thicknesses of $SiN_x$ were changed from 700 ${\AA}$ to 1150 ${\AA}$ with the gas flow of $SiH_4$ as 40 sccm and $NH_3$ as 120 sccm,. The carrier lifetime enhanced as the thickness of $SiN_x$ increased due to improved passivation effect. To study the characteristics of $SiN_x$ with various gas ratios, the gas flow of $NH_3$ was changed from 40 sccm to 200 sccm with intervals of 40 sccm. The thickness of $SiN_x$ was fixed as 1000 ${\AA}$ and the gas flow of $SiH_4$ as 40 sccm. The refractive index of SiNx and the carrier lifetime were measured before and after heat treating at $650^{\circ}C$ to investigate their change by the firing process in solar cell fabrication. The index of refraction of SiNx decreased as the gas ratios increased and the longest carrier lifetime was measured with the gas ratio $NH_3/SiH_4$ of 3.

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저 NOx 연소를 위한 플라즈마 개질기 (Plasma Reformer for Low NOx Combustion)

  • 김관태;이대훈;차민석;길상인;윤진한;송영훈
    • 한국연소학회:학술대회논문집
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    • 한국연소학회 2007년도 제34회 KOSCO SYMPOSIUM 논문집
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    • pp.187-190
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    • 2007
  • A combined hydrogen generator of plasma and catalytic reformers has been developed, and has been applied to stabilize unstable flame of 200,000 Kcal/hr LPG combustor. The role of the plasma reformer is to generate hydrogen in a short period and to heat-up the catalytic reformer during the start-up time. After the start-up period, the catalytic reformer generates hydrogen through steam reforming with oxygen (SRO) reactions. The maximum capacity of the hydrogen generator is 100 lpm that is sufficient to be used to stabilize the flame of the present combustor. In order to reduce NOx and CO emissions simultaneously, 1) FGR (Flue Gas Recirculation) technique has been adopted and 2) the hydrogen has been added into the fuel supplied to the combustor. Test results shows that 25 % addition of hydrogen and 30 % FGR rate lead to simultaneous decrease of CO and NOx emissions. The technique proposed in the present study shows good potential to replace $NH_3$ SCR technique, especially in the case of small-scale combustor applications.

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