• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.5
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• pp.232-237
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• 2005

In this paper, we fabricated $CO_2$ gas sensor based on the MEMS infrared sensor and characterized its electrical and $CO_2$-sensing properties. The fabricated $CO_2$ gas sensor by MEMS technique has many advanges over NDIR(nondispersive) $CO_2$ sensor such as monolithic fabrication, very high selectivity on $CO_2$, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and $CO_2$ filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure $CO_2$ concentration more accurately with high reliability.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1641-1642
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• 2006

본 연구에서는 NDIR(non dispersive infrared absorption) 가스센서의 소형화와 저가화를 목표로 2개의 오목 거울을 이용한 새로운 광 공동(optical cavity) 구조를 제안하고, 구조에 따른 광 출력 특성을 시뮬레이션하였다. Optical cavity는 광 경로증가 및 광 집속 구조로 설계하고, 각각의 출력단에서 검출되는 광 출력을 시뮬레이션한 결과 광 집속 구조의 팡 출력이 더 효율적임을 확인하였다. 집광구조에서의 광 출력을 최대로 하기 위해 광의 초점을 찾아보았다. 집광 구조를 사용하지 않는 단순 평행 광이 조사되는 경우, 적외선 센서부에 입사되는 광 출력은 최대 0.024W이다. 그러나 집광구조에서는 optical cavity의 광축에서 센서의 위치를 $15\sim20mm$까지 변화시켜 시뮬레이션한 결과 거리 18.83mm 일 때 조사되는 광 출력이 약 0.153W로 약 7배 증가됨을 확인하였다.

• 전자공학회논문지 IE
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• v.45 no.3
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• pp.27-35
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• 2008

In this paper, we propose a minute signal detection algorithm for a development of optical analyzer, using the non-dispersive infrared method with multi gas filter correlation wheel, that can measure various environmental air-pollution materials (CO, SO2, NOx, etc.) in real-time. The MCT(mercury cadmium telluride) sensor can detect minute signals those show and absorption characteristic of each environmental pollution materials. In the proposed method, a corresponding data of each environmental pollution materials can be separated by an external trigger and threshold values in the measured continuous signals.

• Proceedings of the Materials Research Society of Korea Conference
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• 2005.05a
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• pp.125-125
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• 2005

• Journal of Sensor Science and Technology
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• v.30 no.4
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• pp.250-254
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• 2021

A highly sensitive and selective non-dispersive infrared (NDIR) carbon dioxide gas sensor requires achieving high transmittance and narrow full width at half maximum (FWHM), which depends on the interface of the optical filter for precise measurement of carbon dioxide concentration. This paper presents the design, simulation, and fabrication of a Fabry-Perot filter based on a distributed Bragg reflector (DBR) for a low-cost NDIR carbon dioxide sensor. The Fabry-Perot filter consists of upper and lower DBR pairs, which comprise multilayered stacks of alternating high- and low-index thin films, and a cavity layer for the resonance of incident light. As the number of DBR pairs inside the reflector increases, the FWHM of the transmitted light becomes narrower, but the transmittance of light decreases substantially. Therefore, it is essential to analyze the relationship between the FWHM and transmittance according to the number of DBR pairs. The DBR is made of silicon and silicon dioxide by RF magnetron sputtering on a glass wafer. After the optimal conditions based on simulation results were realized, the DBR exhibited a light transmittance of 38.5% at 4.26 ㎛ and an FWHM of 158 nm. The improved results substantiate the advantages of the low-cost and minimized process compared to expensive commercial filters.

• Journal of Sensor Science and Technology
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• v.27 no.5
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• pp.294-299
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• 2018

This article describes the output properties of non-dispersive infrared carbon dioxide($CO_2$) sensors resulting from the changes in ambient temperatures. After the developed sensor module was installed inside the gas chamber, the temperature was set to 267 K, 277 K, 300 K, and 314 K, and the concentrations of $CO_2$ gas were increased from 0 to 5,000 ppm. Then, the output voltage at each concentration was obtained. Through these experimental results, two observations were made. First, both the $CO_2$ sensor and the reference sensor showed an increase in the output voltages as the temperature rose from 0 ppm, Second, the full scale outputs of the $CO_2$ sensor grew as the temperature increased. The output characteristics were analyzed based on two factors: change in the radiant energy of the infrared light source and change in the absorptivity of $CO_2$ gas according to the ambient temperature. Additionally, temperature compensation methods were discussed.

• Journal of Sensor Science and Technology
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• v.30 no.6
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• pp.446-450
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• 2021

Non-dispersive infrared (NDIR) gas sensors typically use an optical filter that transmits a discriminating 4.26 ㎛ wavelength band to measure carbon dioxide (CO2), as CO2 absorbs 4.26 ㎛ infrared. The filter performance depends on the transmittance and full width at half maximum (FWHM). This paper presents the fabrication, sensitivity, and selectivity characteristics of a distributed Bragg reflector (DBR)-based Fabry-Perot filter with a simple structure for CO2 detection. Each Ge and SiO2 films were prepared using the RF magnetron sputtering technique. The transmittance characteristics were measured using Fourier-transform infrared spectroscopy (FT-IR). The fabricated filter had a peak transmittance of 59.1% at 4.26 ㎛ and a FWHM of 158 nm. In addition, sensitivity and selectivity experiments were conducted by mounting the sapphire substrate and the fabricated filter on an NDIR CO2 sensor measurement system. When measuring the sensitivity, the concentration of CO2 was observed in the range of 0-10000 ppm, and the selectivity was measured for environmental gases of 1000 ppm. The fabricated filter showed lower sensitivity to CO2 but showed higher selectivity with other gases.

• Journal of Sensor Science and Technology
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• v.27 no.1
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• pp.47-54
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• 2018

In this paper, we describe the thermal characteristics of the output voltages of ethanol gas sensor according to the amount of radiation incident on the infrared sensors located at each focal point of two elliptical waveguides. In order to verify the output characteristics of the gas sensor according to the amount of incident light on the infrared sensor, two combinations of sensor modules were fabricated. Hydrophobic thin film is deposited on one of the reflectors of sensor modules and one of the two infrared sensors was equipped with a hollow disk (10 Ø), and the temperature characteristics of the infrared sensor equipped with the hollow disk (10 Ø) and the infrared sensor without the disk were tested. The temperature was varied from 253 K to 333 K at 10 K intervals based on 298 K. The properties of ethanol gas sensor have been identified with respect to varying temperature for a range of ethanol concentration from 0 ppm to 500 ppm. In the case of an infrared sensor equipped with a hollow disk (10 Ø), the output voltage of the sensor decreased by 0.8 mV and 1 mV, respectively, as the temperature increased. Conversely, the output voltage of the diskless infrared sensor showed an average increase of 67 mV and 57 mV as the temperature increased. The ethanol concentrations estimated on the basis of results show an error of more than 10 % for less than 100 ppm concentration. However, if the ethanol concentration exceeds 100 ppm, the gas concentration can be estimated within the range of ${\pm}10%$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.11
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• pp.1005-1009
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• 2008

A noble infrared $\lambda/4$ absorbing structure using metal reflector was studied for uncooled infrared sensors. This paper described the design and the fabrication of IR uncooled detectors which were composed of 21 by 21 elements using the surface micromachining technology. The characteristics of the array were investigated in the spectral region of 4.26 ${\mu}m$. The fabricated detectors exhibited the thermal mass of $9.75\times10^{-9}$ J/K, the thermal conductance of $1.31\times10^{-6}$ W/K, the thermal time constant of 7.4 ms, the responsivity of $1.07\times10^5$ V/W and the detectivity of $1.04\times10^9$ $cmHz^{1/2}/W$, at the chopper frequency of 10 Hz and the bias current of 9.22${\mu}A$. Finally the absorptance efficiency of $\lambda/4$ absorbing structure was about 23.2 % higher than that of absence absorbing structure.

• Journal of the Korean Institute of Gas
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• v.12 no.4
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• pp.63-68
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• 2008

This paper describes about the simulation and the experimental results of optical cavity with curved mirror surface and vertical mirror surface to improve the light intensity and efficiency of the optical sensors. When we use the vertical mirror surface, the distribution of light reached to the filter surface of detector shows an elliptical shape. Whereas, the curved mirror surface focuses the light into circular shape. Therefore, due to focusing effects in case of using curved mirror surface, the light intensity per unit area has been improved. Consequently, the output voltage of gas sensor has been expected to increase. Based upon the simulation, the experiment of gas sensor has been conducted with $CO_2$ gas from 0ppm to 2,500 ppm at 250 ppm step and $25^{\circ}C$, 45%R.H. ambient. The output voltage of gas sensor that has a curved mirror surface increases approximately 200 mV than that of vertical mirror surface.