Characterization of Monocrystalline $\beta-SiC$ Thin Film Grown by Chemical Vapor Deposition
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- 한국세라믹학회:학술대회논문집
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- 한국세라믹학회 1986년도 Priceedings Of The Third Korea-Japan Seminar On New Ceramics
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- pp.287-304
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- 1986