• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.706-709
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• 2005

A hybrid focus method with multiple laser slits has been newly proposed and it is based on the integration of DFD and DFF Rough depth information is estimated using DFD equipped with multiple laser slits, and then DFF is applied to only each specific depth range using the depth information resulting from DFD. The proposed hybrid method gives more accurate results than DFD and DFF, and faster measurement than DFF. Its performance has been verified through experiments of calibration blocks with sharp depth discontinuity.

• 한국정밀공학회지
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• 제23권9호
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• pp.111-118
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• 2006

A hybrid focus method with multiple laser slits is newly proposed for the measurement of surface morphology with depth discontinuity, and it is based on the integration of DFB and DFF. Rough depth information is estimated through calibration tables which are constructed by DFD with multiple laser slits, and then DFF is applied to only each specific depth range using the rough depth information resulting from DFD. The proposed hybrid method gives more accurate results than DFD and DFF, and faster measurement than DFF in the vicinity of depth discontinuity Its performance is verified through experiments of calibration blocks with sharp depth discontinuity.