Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

A Laser-Applied Hybrid Focus Method for the Measurement of a Surface Morphology with Depth Discontinuity

깊이불연속 형상 측정을 위한 레이저 응용 하이브리드 초점법

  • 김경범 (충주대학교 항공.기계설계학과) ;
  • 신영수 ((주) 인텍플러스) ;
  • 문순환 (주성대학 테크노정보과)
  • Published : 2006.09.01
Download PDF
⟨ Previous Next ⟩

Abstract

A hybrid focus method with multiple laser slits is newly proposed for the measurement of surface morphology with depth discontinuity, and it is based on the integration of DFB and DFF. Rough depth information is estimated through calibration tables which are constructed by DFD with multiple laser slits, and then DFF is applied to only each specific depth range using the rough depth information resulting from DFD. The proposed hybrid method gives more accurate results than DFD and DFF, and faster measurement than DFF in the vicinity of depth discontinuity Its performance is verified through experiments of calibration blocks with sharp depth discontinuity.

Keywords

References

  1. Park, H. J. and Hwang, Y. M., 'Dimensional Measurement Using the Machine Vision,' J. of KSPE, Vol. 18, No.3, pp. 10-17, 2001
  2. Lee, S. Y. and Lim, S. G., 'Three Dimensional Measurements Using Machine Vision,' J. of KSPE, Vol. 18, No.3, pp. 18-22, 2001
  3. Park, H. J. and Ahn, W. J., 'A New Method of Noncontact Measurement for 3D Microtopography in Semiconductor Wafer Implementing a New Optical Probe based on the Precision Defocus Measurement,' J. of KSPE, Vol. 17, No.1, pp. 129-137, 2000
  4. Ghita, O. and Whelan, P. F., 'A Video-Rate Range Sensor Based on Depth from Defocus,' Optics and Laser Technology, Vol. 33, pp. 167-176, 2001 https://doi.org/10.1016/S0030-3992(01)00010-X
  5. Roh, K. W. and Kim, C. W., 'Three Dimensional Shape Recovery from Blurred Images,' Proc. of the lEEK Conf. pp. 799-802, 2000
  6. Subbarao, M. and Surya, G., 'Depth from Defocus: A Spatial Domain Approach,' Internat J Comput Vision, Vol. 13, No.3, pp. 271-294, 1994 https://doi.org/10.1007/BF02028349
  7. Subbarao, M., 'Determining Distance from Defocused Images of Simple Object,' Tech. Report No. 89.07.20, Computer Vision Laboratory, Dept. of electrical Engineering, State University of New York, Stony Brook, NY 11794-2350
  8. Lee, S., Ahn, S. C. and Meyyappan, A., 'Depth from Magnification and Blurring,' Proc. of Intl. Conf. on Robotics and Automation, 1997 https://doi.org/10.1109/ROBOT.1997.620028
  9. Grossman, P., 'Depth from Focus,' Pattern Recognition Letters, Vol. 5, pp. 63-69, 1987 https://doi.org/10.1016/0167-8655(87)90026-2
  10. Subbarao, M. and Tyan, J. K., 'Selecting Optimal Focus Measure for Autofocusing and Depth-From-Focus,' IEEE Transaction on Pattern Analysis and Machine Intelligence, Vol. 20, No.8, PP. 864-870, 1998 https://doi.org/10.1109/34.709612
  11. Nayar, S. K. and Nakagawa, Y., 'Shape from Focus,' IEEE Transaction on pattern analysis and machine intelligence, Vol. 16, No.8, 1994 https://doi.org/10.1109/34.308479
  12. Kim, G. B. and Shin, Y. S., 'A Measurement Method of Three-Dimensional Surface Morphology Based on Depth-from-Focus through Linear Magnification Calibration,' J. of KSPE, Vol. 22, No.9, pp, 115-122, 2005
  13. Kim, G. B. and Shin, Y. S., 'A Measurement Method of Surface Morphology Based on Depth-from-Focus with Magnification Variations of Optical System,' Proc. of KSPE Autumn Annual Meeting, Vol.21, No. 10, pp, 1500-1503, 2004
  14. Kim, G. B. and Shin, Y. S., 'A Hybrid Focus Method Using Multiple Laser Slits,' Proc. of KSPE Autumn Annual Meeting, Vol.22, No. 10, pp, 706-709, 2005