• Title/Summary/Keyword: Multilayered films

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Microstructural Characterization of TiCrAlSiN Thin Films Deposited with Various Bias Voltages (Bias voltgae에 따른 TiCrAlSiN 코팅막의 미세구조 분석)

  • Lee, Jae-Uk;Lee, Jeong-Yong;Vinh, P.V.;Kim, Seon-Gyu
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2007.04a
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    • pp.122-123
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    • 2007
  • Bias voltage를 달리하여 cathodic arc plasma 방법으로 Si 기판 위에 성장시킨 TiCrAlSiN 코팅막의 미세구조를 투과전자현미경으로 관찰하였다. -200 V에서 0 V로 bias voltage가 변화함에 따라 'nano-multilayered' 구조가 무너지면서 '주상형(columnar)'구조로 코팅막의 미세구조가 변함을 알 수 있었고, EDS line scan을 통해 multilayer의 화학적 조성 변화를 확인하였다.

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A Study of Magnetic Field Annealing on Microstructures and Magnetic Properties of Nanocomposite Sm-Co/Co Films

  • Yang, Choong-Jin;You, Cai-Yin;Zhang, Z.D.;Kim, Kyung-Soo;Han, Jong-Soo
    • Journal of Magnetics
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    • v.7 no.2
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    • pp.45-50
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    • 2002
  • A magnetic field annealing is firstly used for nanostructured Sm-Co/Co films, prepared by magnetron sputtering method. The effects of magnetic field annealing on single-layered Sm-Co films are different from those on multi-layered Sm-Co/Co films. A detailed analysis of microstructures and magnetic properties is made by means of HRTEM, Auger electron spectroscopy, XRD and Physical Property Measurement System (PPMS). From magnetic properties and microstructure analysis, it was confirmed that these differences originate from the effects of magnetic field annealing on crystallization behavior of the films. The relationship between magnetic properties and microstructures explains a different demagnetization process of single-layered and multilayered films. For the single-layered Sm-Co films, magnetic-field-annealing makes the main phases change from $CaCu_5/ to Zn_2Th_{17}$ structure, resulting in a decrease of coercivity. The results show that the magnetic-field-annealing is useful to improve the properties of nanostructured Sm-Co(30 nm)/Co(10 nm) films, which ascribe to improving the pinning effectiveness in coercivity mechanism and decreasing the magnetostatic interaction of films. A very high coercivity about 0.7 T was obtained from nanoscaled multi-layered Sm-Co(30 nm)-/Co(10 nm) films.

High-temperature Oxidation of Nano-multilayered TiAlSiN Filems (나노 다층 TiAlSiN 박막의 고온 산화)

  • Lee, Dong-Bok;Kim, Min-Jeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.189-189
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    • 2016
  • In this study, the Al-rich AlTiSiN thin films that consisted of TiN/AlSiN nano-multilayers were deposited on the steel substrate by magnetron sputtering, and their high-temperature oxidation behavior was investigated, which has not yet been adequately studied to date. Since the oxidation behavior of the films depends sensitively on the deposition method and deposition parameters which affect their crystallinity, composition, stoichiometry, thickness, surface roughness, grain size and orientation, the oxidation studies under various conditions are imperative. AlTiSiN nano-multilayer thin films were deposited on a tool steel substrate, and their oxidation behavior of was investigated between 600 and $1000^{\circ}C$ in air. Since the amount of Al which had a high affinity for oxygen was the largest in the film, an ${\alpha}-Al_2O_3-rich$ scale formed, which provided good oxidation resistance. The outer surface scale consisted of ${\alpha}-Al_2O_3$ incoporated with a small amount of Ti, Si, and Fe. Below this outer surface scale, a thin ($Al_2O_3$, $TiO_2$, $SiO_2$)-intermixed scale formed by the inwardly diffusing oxygen. The film oxidized slower than the $TiO_2-forming$ kinetics and TiN films, but faster than ${\alpha}-Al_2O_3-forming$ kinetics. During oxidation, oxygen from the atmosphere diffused inwardly toward the reaction front, whereas nitrogen and the substrate element of iron diffused outwardly to a certain extent.

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Effect of the processing variables on the formation of $Pb(Sc_{1/2}Nb_{1/2})O_3$ thin layers ($Pb(Sc_{1/2}Nb_{1/2})O_3$ 박막 형성에 미치는 공정변수의 영향)

  • Park, Kyung-Bong;Kwon, Seung-Hyeop;Kim, Tae-Huei
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.19 no.2
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    • pp.70-74
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    • 2009
  • Effect of the processing variables on the formation of $Pb(Sc_{1/2}Nb_{1/2})O_3$(hereafter PSN) thin layers prepared on Pt(111)/Ti/$SiO_2$/Si substrates using the sol-gel and the spin coating method has been studied. After each deposition, the coated films were heated at $370^{\circ}C$ for 5 min. Then they were finally sintered at temperature range of $600{\sim}700^{\circ}C$ by RTA(rapid thermal annealing). The final multilayered films showed a (111) preferred orientation. On a while, the layer-by-layer crystallization of multilayered amorphous thin films without the intermediate heating exhibited a (100) preferred orientation. In case of heat treatment in the tube furnace with the heating rate of $4^{\circ}C/min$, (100) and (111) oriented thin layers were formed simultaneously. The microstructure of the deposited films were dense and crack-free with thickness of 300nm, irrespective of the processing variables.

A Study of Thermal Properties of LDPE-Nanoclay Composite Films

  • Bumbudsanpharoke, Nattinee;Ko, Seonghyuk
    • KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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    • v.21 no.3
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    • pp.107-113
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    • 2015
  • This work focused on the study of thermal properties and kinetic behavior of LDPE-nanoclay composite films. The effect of nanoclay content (0.5, 1, 3, and 5 wt%) on thermal stability and crystallization characteristics of the nanocomposites were investigated by Thermogravimetric Analysis (TGA) and Differential Scanning Calorimetry (DSC). The results from endothermic curve showed that the nanoclay played an important role in the crystallization of nanocomposites by acting as nucleating agent. From exothermic curve, there was a crystallization temperature shift which was attributed to crystallization process induced by nanoclay. The TGA results showed that the addition of nanoclay significantly increased the thermal stability of LDPE matrix, which was likely due to the characteristic of layered silicates/clays dispersed in LDPE matrix as well as the formation of multilayered carbonaceous-silicate char. A well-known Coats-Redfern method was used to evaluate the decomposition activation energy of nanocomposite. It was demonstrated that introducing of nanoclay to LDPE matrix escalated the activation energy of nanocomposite decomposition resulting in thermal stability improvement.

A Study on XPS and XRR Characteristics of DLC films Deposited by FCVA Method (FCVA 방법으로 증착된 다이아몬드상 탄소 박막의 XPS 및 XRR 특성 연구)

  • 박창균;장석모;엄현석;서수형;박진석
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.52 no.3
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    • pp.109-115
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    • 2003
  • Diamond-like carbon (DLC) films are deposited at room temperature using a filtered cathodic vacuum arc (FCVA) technique. The influence of negative bias voltage (applied to the substrate from 0 to -250V) on the $sp^3$ hybridized carbon fraction is examined by Raman spectroscopy and x-ray photoelectron spectroscopy (XPS) for C 1s core peak. For the first time, depth profile of C 1s, Si 2p, and O 1s XPS peaks for the deposited DLC film are obtained. DLC film is modeled as a multilayered structure. composing of surface, bulk, and interface. In addition, the x-ray reflectivity (XRR) is proposed as a method for estimating the density, surface roughness, and thickness of each layer constituting the DLC film. The estimated thickness of DLC film is in good agreement with the result obtained from the transmission electron microscope (TEM) measurement.

Magneto-optical and optical properties of Fe-Au alloy films in a wide composition range

  • Hyun, Y.H.;Kim, C.O.;Lee, Y.P.;Kudryavtsev, Y.V.;Gontarz, R.;Kim, K.W.
    • Journal of Korean Vacuum Science & Technology
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    • v.5 no.2
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    • pp.43-46
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    • 2001
  • Fe-Au alloys are characterized by the complete solubility, and exhibit an fcc-bcc structural transformation at the Fe-rich side. The magneto-optical(equatorial Ken effect : EKE) and optical properties of Fe$\_$1-x/Aux (0 < x < 1) were investigated in the 0.5 - 5.0 eV energy range. The x-ray diffraction study shows the structural fcc-bcc transformation about 80 at. % of Fe. Noticeable changes in the optical properties caused by the fcc-bcc structural transformation was observed. The shape and intensity of the EKE spectra as well as the field dependence of the magneto-optical response were also significantly changed. It is thought that these changes are mainly comes from the induced magnetic moment in Au(and/or the emhanced magnetic moment of Fe). The nature of the prominent structure observed in the UV range of the magneto-optical Ken effect of Au/Fe multilayered films are disscussed in connection with the above results.

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Physical properties of ion-beam mixed Fe/Si multilayered films

  • Park, J.S.;Kim, C.O.;Lee, Y.P.;Kudryavtsev, Y.V.;Dubowik, J.;Szymanski, B.;Rhee, J.Y.
    • Journal of Korean Vacuum Science & Technology
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    • v.5 no.2
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    • pp.38-42
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    • 2001
  • We investigated physical properties of ion-beam mixed Fe/si multilayerd films(MLF) prepared by rf sputtering onto glass substrates at room temperature. Such an ion-beam treatment has led to noticeable changes in the structural and physical properties of the MLF: the formation of a new phase which is characterized by a crystalline silicide with a low coercivity and Tc = 550 K. In contrast to the as-prepared state, the ion-beam mixed MLF contains two magnetic phases. One of them is a very soft (Hc < 2 Oe), but microscopically homogeneous one with M$\sub$eff/=6.7 kG.

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High temperature air-oxidation of CrAlSiN thin films (CrAlSiN 박막의 대기중 고온산화)

  • Hwang, Yeon-Sang;Won, Seong-Bin;Chunyu, Xu;Kim, Seon-Gyu;Lee, Dong-Bok
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2013.05a
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    • pp.53-54
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    • 2013
  • Nano-multilayered CrAlSiN films consisting of crystalline CrN nanolayers and amorphous AlSiN nanolayers were deposited by cathodic arc plasma deposition. Their oxidation characteristics were studied between 600 and $1000^{\circ}C$ for up to 70 h in air. During their oxidation, the amorphous AlSiN nanolayers crystallized. The formed oxides consisted primarily of $Cr_2O_3$, ${\alpha}-Al_2O_3$, $SiO_2$. The outer $Al_2O_3$ layer formed by outward diffusion of Al ions. Simultaneously, an inner ($Al_2O_3$, $Cr_2O_3$)-mixed layer formed by the inward diffusion of oxygen ions. $SiO_2$ was present mainly in the lower part of the oxide layer due to its immobility. The CrAlSiN films displayed good oxidation resistance, owing to the formation of oxide crystallites of $Cr_2O_3$, ${\alpha}-Al_2O_3$, and amorphous $SiO_2$.

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