• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.11
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• pp.953-958
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• 2007

In this paper, multilayer actuator structured-ultrasonic nozzle and resonant inverter driving circuit were manufactured, respectively. Its electrical properties were investigated. Multilayer actuator structured ultrasonic nozzle was fabricated using PMN-PNN-PZT ceramics showing excellent piezoelectric characteristics. In order to drive ultrasonic nozzle, resonant PWM inverter was used. The purpose of this study is to find the optimal driving condition of ultrasonic nozzle. Accordingly, electrical and temperature characteristic of multilayer ultrasonic driving system were investigated by experiments as a function of the series resonance inductance. The driving current of ultrasonic nozzle showed the maximum current of 27 mA. Also, the surface temperature of ceramic vibrator showed $44^{\circ}C$ at driving time for 20 min. The ultrasonic nozzle was stably operated in the case of driving for more than 20 min.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.251-252
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• 2007

In this paper, in order to spray diesel fuel, multilayer actuator structured-ultrasonic nozzle and resonant inverter were manufactured. Multilayer actuator structured-ultrasonic nozzle as fabricated using PMN-PNN-PZT ceramics showing excellent piezoelectric characteristics. Its electrical and temperature properties were measured for investigating he applicability of stable ultrasonic nozle for spraying diesel fuel.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.219-220
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• 2006

In this study, m order to develop multilayer ceramics vibrator for ultrasonic nozzle, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3-Na_2CO_3$ as sintering aids and their piezoelectric and dielectric characteristics were investigated according to the aomunt of PbO. With increasing PbO contents. secondary phases were increased and phase structure were changed from tetragonal structure to rhombohedral structure and also electromechanical coupling factor were linearly decreased. At the composition ceramics with the sintering temperature of $870^{\circ}C$ and 1 mol% excess PbO, density, electromechanical coupling factor, dielectric constant, piezoelectric d constant and mechanical quality factor showed the optimum value of $7.879g/cm^2$, 0.55, 1149, 328pC/N, 1224, respectively for multilayer ceramics vibrator application for ultrasonic nozzle.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.1
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• pp.31-34
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• 2007

In this study, in order to develop multilayer ceramics vibrator for ultrasonic nozzle, PMN-PNN-PZT ceramics were fabricated using $Li_{2}CO_{3}-Na_{2}_CO_{3}$ as sintering aids and their piezoelectric and dielectric characteristics were investigated according to the amount of PbO. With increasing PbO contents, secondary phases were increased and phase structure was changed from tetragonal structure to rhombohedral structure and also electromechanical coupling factor was linearly decreased. At the composition ceramics with the sintering temperature of $870^{\circ}C$ and 1 mol% excess PbO, density, electromechanical coupling factor, dielectric constant, piezoelectric d constant and mechanical quality factor showed the optimum value of $7.879\;g/cm^{3}$, 0.55, 1149, 328 pC/N, 1224, respectively for multilayer ceramics vibrator application for ultrasonic nozzle.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.10
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• pp.869-872
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• 2007

In this study, in order to develop low temperature sintering ultrasonic nozzle, single-layer and multilayer ring-type piezoelectric actuators were manufactured using PMN-PNN-PZT ceramics, And then the electrical properties were investigated. A ring-type piezoelectric actuator was modeled by ATILA program using finite element method(FEM). The piezoelectric actuator dimension was $\Phi26.5$ (outer diameter), $\Phi12$ (inner diameter), 3.5 mm (thickness). By FEM analysis, resonant and anti-resonant frequencies were appeared as 56.7 kHz and 61.5 kHz. The displacement increased with the increases of the number of layer. Based on the result, ring-type multilayer piezoelectric actuators were manufactured at low co-firing temperature of $940^{\circ}C$. The resonant resistance decreased with the increases of the number of layer. And also, the capacitance increased with the increases of the number of layer. The mechanical quality factor (Qm) decreased with the increases of the number of layer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.32-33
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• 2006

In this study, in order to develop multilayer ceramic actuator for ultrasonic nozzle and ultrasonic vibrator, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3$. $Na_2CO_3$ and ZnO as sintering aids. And then, their piezoelectric and dielectric properties according to the amount of ZnO addition were investigated. The addition of ZnO improved density, dielectric constant, electromechanical coupling factor, mechanical quality factor and piezoelectric d constant of PMN-PNN-PZT ceramics due to the increase of sinterability and accepter doping effect. Electromechanical coupling factor and mechanical quality factor of PMN-PNN-PZT ceramics increased with ZnO amount up to 0.4wt% and then decreased. At the sintering temperature of $900^{\circ}C$ and 0.4wt% ZnO addition, density, dielectric constant, electromechanical coupling factor, mechanical quality factor and piezoelectric d constant showed the optimum value of 7.876g/$cm^2$, 1299, 0.612, 1151 and 369pC/N, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.254-256
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• 2007

In this study, in order to develop low temperature sintering ceramic ultrasonic nozzle, single-layer and multilayer ring-type piezoelectric vibrators were manufactured using PMN-PNN-PZT ceramics, And then the electrical properties were investigated. The piezoelectric vibrator were sintered at low temperature of $940^{\circ}C$. The resonant resistance decreased with the increases of the number of layer. And also, the capacitance increased with the increases of the number of layer. The mechanical quality factor (Qm) decreased with the increases of the number of layer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.174-174
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• 2008

초음파를 이용하여 액체 연료를 분사하면 균일한 입경과 미립화가 우수하며 에너지 절약과 공해방지등을 할 수 있다. 또한 유속과 유량에 관계없이 이용할 수 있어 반도체 분야의 웨이퍼와 평판 표시기상에 사진 석판용 화학물질의 균일도포 컴퓨터 하드 디스크의 광택제 도포등에 사용할 수 있다. 이처럼 초저의 유출 용량을 요구하는 모든 공정 및 액체연료의 분사가 요구되는 모든 산업에 적용할 수 있는 장점을 가지고 있다. 하지만 현제까지 주로 사용되고 있는 초음파노즐의 액츄에이터는 단판액츄에이터형로 높은 교류전압을 인가해주어야 하는 단점을 가지고 있다. 이 단점을 해결하기 위해 적층액츄에이터형을 사용하여 초음파 노즐 구동하면 낮은 교류 입력전압에서도 단판액츄에이터형 초음파 노즐과 같은 특성을 가질 수 있다. 또한 초음파 노즐의 구동시 기계적인 진동을 이용하므로 많은 열을 발생시켜 노즐의 온도가 상승하여 세라믹 액츄에이터에도 그 영향을 미치게 되어 열적 열화 현상이 일어날 수 있기에 높은 큐리온도를 가지는 액츄에이터가 필요하다. 본 실험에서는 $Pb(Mn_{1/3}Nb_{2/3})_{0.02}(Ni_{1/3}Nb_{2/3})_{0.12}(Zr_{0.50}Ti_{0.50})_{0.86}O_3$ 조성을 사용하여 $900^{\circ}C$의 저온에서 액상 소결하여 적층혈액츄에이터를 제작하였으며 압전 및 유전 특성을 조사하였다. 제작된 초음파노즐을 구동하기 위해서는 약 36kHz의 30V이상의 교류입력전압 할 수 있는 구동회로가 필요로 한다. 압전액츄에이터의 구동을 위해서는 정확한 정현파 입력이 필요 없다. 압전액츄에이터의 특성상 유사 정현파 입력 만으로도 임피던스 매칭이 이루어지기 때문에 설계가 쉽고 간편한 Push-Pull 방식을 이용한 PWM인버터를 사용하였고 인버터의 출력 주파수를 34~38kHz까지 가변 할 수 있게 설계하였다. 제작된 적층액츄에이터형 초음파 노즐을 PWM인버터로 실제 액체 연료인 경유를 분사하였을 때의 액츄에이터의 온도 변화에 따른 공진주파수와 온도 의존성, 전기적 특성을 조사하고 미립화 분사되는 경유의 미립자 크기 및 최대 분사량을 조사 하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.317-317
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• 2008

기존의 초음파 노즐은 단판액츄에이터형 초음파 노즐을 사용하여 연체 연료를 분사하였다. 하지만 단판액추에이터형 초음파 노즐은 300V이상의 고전압을 필요로 하여 소비전력이 높은 단점을 가지고 있다. 하지만 적층액츄에이터형 초음파 노즐은 저전압 구동이 가능하여 낮은 소비전력을 가지며, 단판액츄에이터헝 초음파 노즐보다 우수한 분사특성을 가지고 있는 장점이 있다. 또한 공진형 인버터를 사용하여 초음파 노즐을 구동하는 경우 노즐의 구동 전압을 공진에 의하여 쉽게 얻어질 수 있는 장점과 구동 스위치에 가해지는 전압의 크기가 상대적으로 작게되므로 인버터 구동에 저전압 MOSFET를 사용함으로써 도통손실의 저감 및 구성회로의 저압화 등에 유리한 이점이 있다. 본 연구에서는 적층액츄에이터형 초음파노즐을 개발하고 그에 따른 공진형 인버터를 설계하여 적층엑츄에이터형 초음파 노즐의 분사 시스템을 제안 한다. 또한 실제 액체연료인 경유를 분사하여 전기적특성과 분사특성을 조사한다.