• 한국재료학회지
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• 제28권7호
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• pp.405-410
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• 2018

TiN and CrN thin films are among the most used coatings in machine and tool steels. TiN and CrN are deposited by arc ion plating(AIP) method. The AIP method inhibits the reaction by depositing a hard, protective coating on the material surface. In this study, the characteristics of multi-layer(TiN/CrN/TiN(TCT), CrN/TiN/CrN(CTC)) are investigated. For comparison, TiN with the same thickness as the multilayer is formed as a single layer and analyzed. Thin films formed as multilayers are well stacked. The characteristics of micro hardness and corrosion resistance are better than those of single layer TiN. The TiN/CrN peak is confirmed because both TCT and CTC are formed of the same component(TiN, CrN), and the phase is first grown in the (111) direction, which is the growth direction. However, the adhesion and abrasion resistance of the multilayer films are somewhat lower.

• 한국기계가공학회지
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• 제13권2호
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• pp.8-14
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• 2014

Many kinds of robots and machines have been developed to replace human laborin industrial and medical fields, as well as domestic life. In these applications, the device sneed to obtain environmental data using diverse sensors. Among such sensors, the tactile sensor is important because of its ability to get information regarding surface texture and force through the use of mechanical contact. In this research, a simple tactile sensor was developed using the direct writing of pressure sensitive material and layered fabrication of photocurable material. The body of the sensor was fabricated using layered fabrication, and pressure sensitive materials were dispensed between the layers using direct writing. We examined the line fabrication characteristics of the pressure sensitive material according to nozzle dispensing conditions. A simple $4{\times}4$ array flexible tactile sensor was successfully fabricated using the proposed process.

• 대한기계학회논문집A
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• 제27권10호
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• pp.1793-1799
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• 2003

An optimal design of a multi-layered plate structure to endure high-velocity impact has been suggested by using size optimization after numerical simulations. The NET2D, a Lagrangian explicit time-integration finite element code for analyzing high-velocity impact, was used to find the parameters for the optimization. Three different materials such as mild steel, aluminum for a multi-layered plate structure and die steel for the pellet, were assumed. In order to consider the effects of strain rate hardening, strain hardening and thermal softening, Johnson-Cook model and Phenomenological Material Model were used as constitutive models for the simulation. It was carried out with several different gaps and thickness of layers to figure out the trend in terms of those parameters' changes under the constraint, which is against complete penetration. Also, the measuring domain has been shrunk with several elements to reduce the analyzing time. The response surface method based on the design of experiments was used as optimization algorithms. The optimized thickness of each layer in which perforation does not occur has been obtained at a constant velocity and a designated total thickness. The result is quite acceptable satisfying both the minimized deformation energy and the weight criteria. Furthermore, a conceptual idea for topology optimization was suggested for the future work.

• 한국재료학회지
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• 제32권3호
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• pp.161-167
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• 2022

A cold roll-bonding process is applied to fabricate an AA6061/AA5052/AA6061/AA5052 layered sheet. Two AA6061 and one AA5052 sheets of 2mm thickness, 40mm width and 300mm length are alternately stacked, then reduced to a thickness of 2.0 mm by multi-pass cold rolling after surface treatment such as degreasing and wire brushing. The rolling is performed at ambient temperature without lubricant using a 2-high mill with a roll diameter of 400 mm at a rolling speed of 6.0 m/sec. The roll-bonded AA6061/AA5052/AA6061/AA5052 layered sheet is then hardened by natural aging (T4) and artificial aging (T6) treatments. The microstructure of the as-roll bonded and the age-hardened Al sheets was revealed by SEM observation; the mechanical properties were investigated by tensile testing and hardness testing. After T4 and T6 aging treatment, the specimens had a recrystallization structure consisting of coarse equiaxed grains in both AA5052 and AA6061 regions. The as-roll-bonded specimen showed a clad structure in which the hardness of AA5052 regions was higher than that of AA6061 regions. However, after T4 and T6 aging treatment, specimens exhibited different structures, with hardness of AA6061 regions higher than that of AA5052 regions. Strengths of T6 and T4 age-treated specimens were found to increase by 1.55 and 1.36 times, respectively, compared to the value of the starting material.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.319-319
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• 2013

Even though the fabrication methods of metal oxide based thin film capacitor have been well established such as RF sputtering, Sol-gel, metal organic chemical vapor deposition (MOCVD), ion beam assisted deposition (IBAD) and pulsed laser deposition (PLD), an applicable capacitor of printed circuit board (PCB) has not realized yet by these methods. Barium Strontium Titanate (BST) and other high-k ceramic oxides are important materials used in integrated passive devices, multi-chip modules (MCM), high-density interconnect, and chip-scale packaging. Thin film multi-layer technology is strongly demanded for having high capacitance (120 nF/$mm^2$). In this study, we suggest novel multi-layer thin film capacitor design and fabrication technology utilized by plasma assisted deposition and photolithography processes. Ba0.6Sr0.4TiO3 (BST) was used for the dielectric material since it has high dielectric constant and low dielectric loss. 5-layered BST and Pt thin films with multi-layer sandwich structures were formed on Pt/Ti/$SiO_2$/Si substrate by RF-magnetron sputtering and DC-sputtering. Pt electrodes and BST layers were patterned to reveal internal electrodes by photolithography. SiO2 passivation layer was deposited by plasma-enhanced chemical vapor deposition (PE-CVD). The passivation layer plays an important role to prevent short connection between the electrodes. It was patterned to create holes for the connection between internal electrodes and external electrodes by reactive-ion etching (RIE). External contact pads were formed by Pt electrodes. The microstructure and dielectric characteristics of the capacitors were investigated by scanning electron microscopy (SEM) and impedance analyzer, respectively. In conclusion, the 0402 sized thin film multi-layer capacitors have been demonstrated, which have capacitance of 10 nF. They are expected to be used for decoupling purpose and have been fabricated with high yield.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.312-312
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• 2009

본 연구에서는 Thermal evaporator(저항 가열 식 진공 증착법) 장비를 활용하여 ZnS/$Na_3AlF_6$/ZnS/Cu-$0.25\lambda$, ZnS/$CaF_2$/ZnS/Cu-$0.25\lambda$의 다층 박막을 glass 기판위에 증착하였다. 증착 전에 EMP(Essential Macleod Program)을 활용하여 광학적 특성을 simulation하였으며 다층 박막 제작 후 Spectrophotometer를 사용하여 반사율 및 색상을 CIE $L^*a^*b^*$ 좌표에 표시하여 고 굴절 물질에 따른 광학적 특성을 EMP simulation과 비교하였다. AES depth profile을 분석하여 막의 두께 및 층간 확산여부에 관하여 관측 하였다. 저굴절 물질을 Na3AlF6로 사용하였을 경우 simulation과 결과 값 모en purple 계통의 색상을 나타냈으며 CaF2를 사용하였을 경우 simulation은 purple 계통의 색상, 결과값은 red-yellow 계통의 색상으로 나타났다.

• Journal of Korean Vacuum Science & Technology
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• 제2권2호
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• pp.92-96
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• 1998

Ferroelectric Bi-layered oxides SrBi2Ta2O9 (SBT) thin films have been deposited on Pt/Ti/SiO2/Si substrates using multi-target sputtering. Structure, composition, and electrical properties have been investigated on films. The SBT films were deposited with the various bismuth sputtering powers. The SBT films deposited with the bismuth sputtering power of 20 W have the most dense microstructure and the remanent polarization (Pr) of 9.2 ${\mu}$C/cm and the coercive field (Ec) of 43.8 kV/cm at an applied voltage of 5V. The SBT films deposited with the bismuth sputtering power of 20W showed a fatigue-free characteristics up to 1.0${\times}$1010 cycles under 5V bipolar pulse and a leakage current density of 2.0${\times}$10-8 A/$\textrm{cm}^2$ at 200 kV/cm.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.363-367
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• 2006

We synthesized new blue and bluish green emitting materials by using fully substituted ethylene moieties. Multi-layered EL devices were fabricated with synthesized materials and evaluated in terms of emission color and luminescence efficiency. BPBAPE[EML 4] having high $T_g$ of $155^{\circ}C$ showed luminance and power efficiency of 10.33cd/A and 4.0 lm/W without any doping agent. BTBPPA[EML 5] exhibited 5cd/A and 1.67lm/W efficiency with blue CIE value of (0.165, 0.195).

• Journal of Information Display
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• 제8권1호
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• pp.10-13
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• 2007

We synthesized new blue and bluish green emitting materials by using fully substituted ethylene moieties. Multi-layered EL devices were fabricated with synthesized materials and evaluated in terms of emission color and luminescence efficiency. TBBPE[EML 2] device showed bluish-green CIE value of (0.236, 0.412) and 5.02cd/A at $10mA/cm^2$. BPBBPE[EML 3] device also showed sky-blue CIE value of(0.218, 0.355) and 2.31cd/A at $l0mA/cm^2$.

• 전기전자학회논문지
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• 제23권4호
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• pp.1128-1133
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• 2019

이 논문에서는 전이 금속 산화물(TMO)층으로 구성된 다층 박막을 사용하는 BIPV(Building Integrated Photovoltaic) 시스템용 전면 컬러 유리를 제안하였다. 몰리브덴 산화물(MoO₃) 및 텅스텐 산화물(WO₃)은 굴절률 차이가 큰 계면을 형성하여 적절한 간섭효과를 얻을 수 있다. 단일 Thermal Evaporator 증착 방법을 통해 다층 박막을 제작함으로써 간단하고 빠르며 저렴한 제조 방법을 제안하였다. MoO₃(60nm)/WO₃(100nm) 다층 박막으로 90% 이상의 광 투과율을 갖는 자홍색 유리를 시연하였으며, 이 기술은 상용화된 BIPV 시스템에 유용할 것으로 기대된다.