• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.618-618
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• 2013

Graphene is only one atom thick planar sheet of sp2-bonded carbon atoms arranged in a honeycomb crystal lattice, which has flexible and transparent characteristics with extremely high mobility. These noteworthy properties of graphene have given various applicable opportunities as electrode and/or channel for various flexible devices via suitable physical and chemical modifications. In this work, for the development of all-graphene devices, we performed to synthesize alternately patterned structure of mono- and multi-layer graphene by using the patterned Ni film on Cu foil, having much different carbon solid solubilities. Depending on the process temperature, Ni film thickness, introducing occasion of methane and gas ratio of CH4/H2, the thickness and width of the multi-layer graphene were considerably changed, while the formation of monolayer graphene on just Cu foil was not seriously influenced. Based on the alternately patterned structure of mono- and multi-layer graphene as a channel and electrode, respectively, the flexible TFT (thin film transistor) on SiO2/Si substrate was fabricated by simple transfer and O2 plasma etching process, and the I-V characteristics were measured. As comparing the change of resistance for bending radius and the stability for a various number of repeated bending, we could confirm that multi-layer graphene electrode is better than Au/Ti electrode for flexible applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.481-484
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• 2004

다중 채널 전극 위에 세포를 성장시켜 전극면을 통해 검출되는 신경 신호의 손실을 줄이고 주파수의 변형을 줄이기 위해서 전극과 전해질의 사이의 impedance를 줄이는 것이 바람직하다. 전하 이동을 증대시키기 위해서는 낮은 impedance가 요구되며 이를 위한 전극의 개선 방안으로 전극면이 증착될 기판의 표면을 거칠게 하여 결과적으로 전극면의 표면적을 넓히는 방법을 모색하였다. 기판으로 사용되는 glass(Pyrex#7740)의 구성 물질 중에서 4%를 차지하는 $N^+$ 이온을 황산 용액으로 표면 처리하여 제거함으로써 매끈한 표면을 거칠게 하여 표면적을 넓힐 수 있다. 기판으로 사용되는 glass (pyrex#7740) $1cm{\times}1cm{\times}0.05cm$를 50%, 95% 농도의 황산 용액 내에서 각각 30분, 60분 동안 상온에서 표면처리를 진행하였다. AFM을 이용하여 표면을 관찰한 결과 황산 용액 95%에서 30분간 표면 처리를 진행한 시편에서 최대 $4000{\AA}$정도의 조도를 얻었다. 이후 동일 시편에 대해 전극으로 사용될 Ti/Au를 각각 $500{\AA}/2500{\AA}$ 증착 후 사진식각 공정으로 MEA(Multi-channel electrode array)를 제작하여 impedance를 측정한 결과, 표면 처리 후 impedance가 70% 개선되었음을 측정하였다.

• 전기전자학회논문지
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• 제22권1호
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• pp.149-155
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• 2018

본 논문에서는 전기영상법(ET)을 이용하여 수직 다층구조 대지저항률을 영상복원 하였다. 일반적으로 접지 시공을 위한 대지 분석은 수평 다층 구조라는 가정 하에 행해지지만, 현실적으로는 지하구조가 수직 구조일 경우도 발생하게 된다. 여기에서는 수직 다층구조의 대지분석에 유리한 전극배열법을 찾아내기 위하여 전기영상법에 가장 널리 사용되는 Wenner, Schlumberger 그리고 쌍극자배열을 테스트하였다. ET영상복원에는 Gauss-Newton 역산 알고리즘이 이용되었다. RMS 오차 분석결과를 보면 Wenner 배열의 경우가 RMS 오차가 가장 적게 나타나는 것을 확인할 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.508-508
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• 2012

CST microwave studio is used to simulate the plasma profile of the 450mm CCP source. Standing wave effect becomes important at the high frequency as the electrode radius increases. To solve plasma non-uniformity problem, we designed multi electrode chamber to decreasing standing wave effect. Simulation showed the ratio of input power of each electrode is related with electric field strength. The multi electrode was constructed and measured by 2D probe arrays using floating harmonic method. Uniformity of 450 mm CCP was changed by the ratio of input power of each electrode. We described this dependence with circuit model.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 E
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• pp.2411-2413
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• 1999

Regarding the application of diagnistic technology using PD signal to power apparatus, it is necessary to discriminate the type of defect as well as to determine whether the PD occurs or not. In this research, PD characteristics of multi-defects insulating system were presented, the PD signals were detected from three kinds of electrode systems, IEC(b), needle-plane and CIGRE method II. To make multi-defect systems artificially, we combined three electrode systems and applied same test voltage simultaneously.

• 대한기계학회논문집A
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• 제27권7호
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• pp.1071-1075
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• 2003

In this paper, we present a DNA manipulation device in the reaction chamber, which consists of a center electrode and circular outer electrodes of a reaction unit. The charged bio-molecules, DNA, are manipulated by the charge of the electrode in reaction unit. Controlling the induced dynamic electric field between the center electrode and the outer electrodes, concentration / repulsion / manipulation of bio-molecules are enabled at a periphery of electrode. Concentration of the fluorescent DNA at the center electrode is observed by applying ＋2V. Subsequently, applying －2V, the concentrated DNA is repelled rapidly from the center electrode, which makes dispersion completely in 0.5second. Furthermore, repeated applying ＋1V/－1V every 5 seconds at each outer electrode, we can circulate the DNA. We also investigate a micro-heater and sensor for DNA manipulation and reaction temperature. The coefficient of heat-resistance and heater temperature characteristic is 0.0043 and 100$^{\circ}C$/sec, respectively.

• 한국전기전자재료학회논문지
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• 제21권6호
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• pp.509-516
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• 2008

Multi-layer circuit card for semiconductor inspection was fabricated by LTCC technology. After a proper impedance design without electrical interference, ceramic tapes with the composition of $CaO-Al_2O_3-SiO_2-B_2O_3$ glass and $Al_2O_3$ were prepared. The electrode with silver paste printed on the tape. Printed ceramic sheets were then laminated and sintered. Densities and dielectric properties were measured. The microstructure, fracture surface of the region of via and matching state of substrate-electrode were observed. The durability of plated outside electrode were examined by hardness and scratch test.

• Journal of Semiconductor Engineering
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• 제1권3호
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• pp.88-98
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• 2020

As biosensors are widely used in the medical field, flexible devices compatible with live animals have aroused great interest. Especially, significant research has been carried out to develop implantable or skin-attachable devices for real-time bio-signal sensing. From the device point of view, various biosensor types such as field-effect transistors (FETs) and multi-electrode arrays (MEAs) have been reported as diverse sensing strategies. In particular, the flexible FETs and MEAs allow semiconductor engineering to expand its application, which had been impossible with stiff devices and materials. This review summarizes the state-of-the-art research on flexible FET and MEA biosensors focusing on their materials, structures, sensing targets, and methods.

• 산업기술연구
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• 제34권
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• pp.39-43
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• 2014

This paper represents a highly porous MWCNT film electrode with interconnected open pores and demonstrated the possibility of using an MWCNT network film as the top electrode for polyimide capacitive humidity sensors. Polyimide humidity sensors with MWCNT electrodes exhibited about 6 times faster response than equivalent Cr electrode sensors. This result may be due to their percolated pore structures, which make water molecules accessible to all polyimide surfaces. The much faster response times of MWCNT electrode sensors is attributed to the percolated pore network, which allows more water molecules to be accessible to polyimide surfaces.

• 한국기계가공학회지
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• 제9권1호
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• pp.1-7
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• 2010

A new flow mode of ER fluid available for controlling the damping force by using DME(Discrete Multi-Electrode) is presented in this study. Various characteristics about the flow of ER fluid through the experiment of ER cluster behavior visualization can be assumed. The pressure in electrode length and voltage division mode is measured. An actuator with a damping effect through DME ER damper will be developed. This damper controls the damping force by using the displacement and velocity of the plant which consists of the various electrode length and voltage modes without a controller in the real system.