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A Study on Surface Etching of Metallic Co and Mo in R.F. Plasma (RF 플라즈마를 이용한 금속 코발트와 몰리브데늄의 표면 식각 연구)

  • 서용대;김용수;정종헌;오원진
    • Journal of the Korean institute of surface engineering
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    • v.34 no.1
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    • pp.10-16
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    • 2001
  • Recently plasma etching research has been focused on the metal surfaces in the nuclear industry. In this study, surface etching reaction of metallic Co and Mo, principal contaminants in the spent nuclear components, in CF$_4$/O$_2$, gas plasma has been experimentally investigated to look into the applicability and the effectiveness of the technique for the surface decontamination. Experimental variables are $CF_4$/$O_2$ ratio and substrate temperature between 29$0^{\circ}C$ and 38$0^{\circ}C$. Experimental results Show that the optimum gas composition is 80%CF$_4$-20%$O_2$ and the metallic Co and Mo are etched out well enough in the temperatures range. Cobalt starts to be etched above $350^{\circ}C$ and the etching rate increases with increasing substrate temperature. Maximum rate achieved at 38$0^{\circ}C$ under 220 W r.f. plasma power is 0.06 $\mu\textrm{m}$/min. On the other hand, the metallic Mo is etched easily even at low temperature and the reaction rate drastically increases as the substrate temperature goes up. Highest rate obtained under the same conditions is $1.9\mu\textrm{m}$/min. OES (Optical Emission Spectroscopy) analysis reveals that the intensities of F atom and CO molecule reach maximum at the optimum gas composition, which demonstrates that the principal reaction mechanism is fluorination and/or carbonyl reaction. It is confirmed, therefore, that dry processing technique using reactive plasma is quite feasible and applicable for the decontamination of surface-contaminated parts or equipments.

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Similarities of Scaritoxin to Ciguatoxin on the Chromatographic Behaviours (Scaritoxin과 Ciguatoxin의 크로마토그라피상에서의 몇가지 유사성)

  • Joh, Yong-Goe;Scheuer, Paul J.
    • Korean Journal of Food Science and Technology
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    • v.17 no.2
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    • pp.121-127
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    • 1985
  • In studying the structural work on ciguatoxin, parrot fish collected were identified as Scarus sordidus, S. frenatus, S. scaber and S. pectarlis, in which only S. sordidus contained toxic materials. Crude toxins obtained by silicic acid column chromatography, could be separated on a DEAE-cellulose column into two fractions, ST-1(less polar) and ST-2(polar) eluted with chloroform and chloroform-methanol(1:1). Furthermore ST-1 could be changed into ST-2 by repeated chromatography on DEAE-cellulose. Rf values of ST-1 and ST-2 were 0.60-0.75 and 0.30-0.54 on TLC coated with silica gel 60F-254 developed by chloroform-methanol-water-acetic acid (90:9.5:0.2:0.3) mixture. The peaks of ST-1 and ST-2 were not observed on each HPLC chromatogram at low sensitivity(2X), but by bioassay they were detected in the fraction of 24-27ml(less polar toxin, 120ng) and 22-27 ml (polar toxin, 150 ng). Less polar ciguatoxin from morey eel viscera also showed its peak in the same elution volume(25ml). Being subjected to chromatography on basic aluminum oxide (activity grade I) or to alkaline treatment, followed by basic aluminum oxide (activity grade I) chromatography ST-1 toxin was remarkably converted into the polar toxic component supposed to be polar ciguatoxin in both cases. In the latter case, approximately 74% of the residual toxicity was changed into the polar component, accompanied by about 50% loss of the initial toxicity. More than 26% of ST-2 toxicity was transformed into the less polar toxic component supposed to be less polar ciguatoxin on a deactivated aluminum oxide (activity grade V) column.

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Antioxidant Activity and Inhibitory Effects on Oxidative DNA Damage of Callus from Abeliophyllum distichum Nakai

  • Jang, Tae Won;Park, Jae Ho
    • Korean Journal of Plant Resources
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    • v.31 no.3
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    • pp.228-236
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    • 2018
  • In this study, we evaluated the antioxidant activity and protective effects against oxidative DNA damage of the ethyl acetate fraction from the callus of Abeliophyllum distichum Nakai (ECA). Callus of A. distichum was induced on MS medium containing NAA (1 mg/L) and 2,4-D (1 mg/L), and a sufficient amount was obtained for the extraction by subculture. Acteoside was analyzed and quantified (0.39 mg/g callus) from ECA using the high-performance liquid chromatography-photodiode array detector method. ECA showed very high antioxidative activity as revealed by DPPH and ABTS scavenging assays. The $IC_{50}$ values were 12.4 and $6.8{\mu}g/ml$, respectively. ECA showed protective effects against oxidative DNA damage evaluated by using ${\Psi}X-174$ RF I plasmid DNA. It also inhibited DNA damage by suppressing the oxidative stress-induced protein and mRNA levels of ${\gamma}$-H2AX and p53 in NIH/3T3 cells. In conclusion, ECA protects against oxidative DNA damage through its powerful antioxidant activity.

Characteristics analysis of Piezoelectric Thin Film SAW filter using Mg-doped GaN/Sapphire Structure (Mg-Doped GaN/Sapphire 구조로 제작된 압전 박막 SAW 필터의 특성분석)

  • 장철영;정은자;정영철;최현철;이정희;이용현
    • Proceedings of the IEEK Conference
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    • 2003.07b
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    • pp.759-762
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    • 2003
  • The epitaxially grown Mg-doped GaN thin film was prepared by MOCVD (Metal Organic Chemical Vapor Deposition) for a SAW(Surface Acoustic Wave) filter. Mg-doped GaN thin film had enough properties for a SAW filter which include crystallinity and morphology. The surface morphology and crystalline of the Mg-doped GaN thin films were characterized using AFM and an X-ray rocking curve. The SAW filter, which was fabricated by lift-off process and frequency response, was measured by HP 8753C network analyzer. Center frequency was 96.687 MHz and SAW velocity was 5801 m/s when wavelength(λ) was 60${\mu}{\textrm}{m}$. Insertion loss was over -10 dB, Q was factor over 200, and side lobe attenuation was over 22 dB which was suitable for use as a SAW filter. Electro-mechanical coupling coefficient (k$^2$) was calculated from the measured data. k$^2$ was from 1 % to 1.44 %. The fabricated SAW filter using Mg-doped GaN/sapphire structure has good qualities as a filter and will be used as a SAW filter for operating RF frequency.

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A D-Band Integrated Signal Source Based on SiGe 0.18μm BiCMOS Technology

  • Jung, Seungyoon;Yun, Jongwon;Rieh, Jae-Sung
    • Journal of electromagnetic engineering and science
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    • v.15 no.4
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    • pp.232-238
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    • 2015
  • This work describes the development of a D-band (110-170 GHz) signal source based on a SiGe BiCMOS technology. This D-band signal source consists of a V-band (50-75 GHz) oscillator, a V-band amplifier, and a D-band frequency doubler. The V-band signal from the oscillator is amplified for power boost, and then the frequency is doubled for D-band signal generation. The V-band oscillator showed an output power of 2.7 dBm at 67.3 GHz. Including a buffer stage, it had a DC power consumption of 145 mW. The peak gain of the V-band amplifier was 10.9 dB, which was achieved at 64.0 GHz and consumed 110 mW of DC power. The active frequency doubler consumed 60 mW for D-band signal generation. The integrated D-band source exhibited a measured output oscillation frequency of 133.2 GHz with an output power of 3.1 dBm and a phase noise of -107.2 dBc/Hz at 10 MHz offset. The chip size is $900{\times}1,890{\mu}m^2$, including RF and DC pads.

The Electric and Ferroelectric of Pb(Zr0.52Ti0.48)O3 Thin Films Deposited on Ruthenium Electrodes (루테늄 전극위에 증착된 PZT 박막의 전기적 및 강유전 특성)

  • Hwang, Hyun Suk;Yu, Yougn Sik;Lim, Yun-Sik;Kang, Hyun-Il
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.63 no.1
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    • pp.46-49
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    • 2014
  • $Pb(Zr_{0.52}Ti_{0.48})O_3(PZT)$ thin films deposited on $Ru/RuO_2$ bottom electrode that grown for in-situ progress used rf magnetron sputtering method. We investigated the dependence of the crystalline and electrical properties in the way of capacitors PZT thin films. Our results show that all PZT films indicated polycrystalline perovskite structure with preferred orientation (110) and no pyrochlore phase is observed. The electric properties of the Ru improved with increasing Ru thin films thickness. A well-fabricated Ru/PZT/Ru (100 nm) /$RuO_2$ capacitor showed a leakage current density in the order of $2.03{\times}10^{-7}$ $A/cm^2$ as a 50 kV/cm, a remnant polarization (Pr) of 9.22 ${\mu}C/cm^2$, and a coercive field (-EC) of -32.22 kV/cm. The results show that $Ru/Ru/RuO_2$ bottom electrodes are expected to reduce the degradation ferroelectric fatigue and excellent ferroelectric properties.

The Effect of SiON Film on the Blistering Phenomenon of Al2O3 Rear Passivation Layer in PERC Solar Cell

  • Jo, Guk-Hyeon;Jang, Hyo-Sik
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.364.1-364.1
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    • 2014
  • 고효율 태양전지로 가기 위해서는 태양전지의 후면 패시베이션은 중요한 역할을 한다. 후면 패시베이션 막으로 사용되는 $Al_2O_3$ 막은 $Al_2O_3/Si$ 계면에서 높은 화학적 패시베이션과 Negative Fixed Charge를 가지고 있어 적합한 Barrier막으로 여겨진다. 하지만 이후에 전면 Metal paste의 소성 공정에 의해 $800^{\circ}C$이상 온도를 올려주게 됨에 따라 $Al_2O_3$ 막 내부에 결합되어 있던 수소들이 방출되어 blister가 생성되고 막 질은 떨어지게 된다. 우리는 blister가 생성되는 것을 방지하기 위한 방법으로 PECVD 장비로 SiNx를 증착하는 공정 중에 $N_2O$ 가스를 첨가하여 SiON 막을 증착하였다. SiON막은 $N_2O$가스량을 조절하여 막의 특성을 변화시키고 변화에 따라 소성시 막에 미치는 영향에 대하여 조사하였다. 공정을 위해 $156{\times}156mm2$, $200{\mu}m$, $0.5-3.0{\Omega}{\cdot}cm$ and p-type 단결정 실리콘 웨이퍼를 사용하였고, $Al_2O_3$ 막을 올리기 전에 RCA Cleaning 실행하였다. ALD 장비를 통해 $Al_2O_3$ 막을 10nm 증착하였고 RF-PECVD 장비로 SiNx막과 SiON막을 80nm 증착하였다. 소성로에서 $850^{\circ}C$ ($680^{\circ}C$) 5초동안 소성하고 QSSPC를 통해 유효 반송자 수명을 알아보았다.

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CVD에 의한 흑연페블의 SiC 코팅기술 개발

  • Yu, In-Geun;Park, Lee-Hyeon;An, Mu-Yeong;Gu, Deok-Yeong;Jo, Seung-Yeon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.231-231
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    • 2012
  • 7개 나라가 참여해서 공동으로 제작하고 있는 국제핵융합실험로(ITER)는 2020년경에 제작 설치가 완료될 예정이다. ITER 장치에는 6개의 시험 블랑켓 모듈(Test Blanket Module : TBM)이 장착될 예정이며, 그 중에서 한국도 1개를 독자적으로 제작해서 설치할 예정이다. 한국형 헬륨 냉각 고체형 증식(Helium Cooled Solid Breeder : HCSB) TBM이며, 한국은 ITER 참여국 중 유일하게 중성자 반사 재료를 채택한 것이 특징이다. 중성자 반사재료로는 지름 1 mm 내외의 흑연 페블에 SiC를 코팅해서 사용할 예정이다. SiC는 고온저방사화 물질로 차세대 핵융합로의 구조 재료로도 개발되고 있는 물질로, 이렇게 하면 흑연의 단점인 기계적 특성 향상뿐만 아니라, 산화나 화재 등에 대한 사고의 부담도 크게 줄일 수 있는 장점이 있다. 흑연위에 SiC를 코팅하는 방법은 여러 가지가 있으며, 그 중에서 비교적 간단한 건식 방법은 RF Sputtering, PECVD 등이 있다. 건식은 코팅방법이 간단하고 비교적 쉬운 편이지만 페블표면에 양질의 SiC 박막을 얻기가 쉽지 않은 단점이 있다. 이들 방법보다 습식법은 코팅이 까다롭지만 양질의 코팅막을 비교적 쉽게 얻을 수 있는 장점이 있다. CVD의 경우 전구체 물질로 여러 가지 물질이 사용될 수 있으며 대표적으로 $SiH_4$, $Si(CH_3)_4$, $CH_3SiCl_3$ 등이 있으며, 캐리어 가스로는 $H_2$가 사용된다. 이렇게 얻어진 SiC 코팅페블은 흑연에 비해 파괴강도도 향상되고 마모 등에 강한 것을 확인할 수 있었다.

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Improving the Linearity of CMOS LNA Using the Post IM3 Compensator

  • Kim, Jin-Gook;Park, Chang-Joon;Kim, Hui-Jung;Kim, Bum-Man;Kim, Young-Sik
    • Journal of electromagnetic engineering and science
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    • v.7 no.2
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    • pp.91-95
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    • 2007
  • In this paper, a new linearization method has been proposed for a CMOS low noise amplifier(LNA) using the Post IM3 Compensator. The fundamental operating theory of the proposed method is to cancel the IM3 components of the LNA output signal by generating another IM3 components, which are out-phase with respect to that of the LNA, from the Post IM3 Compensator. A single stage common-source LNA has been designed to verify the linearity improvement of the proposed method through $0.13{\mu}m$ RF CMOS process for WiBro system. The designed LNA achieves +7.8 dBm of input-referred 3^{rd}$-order intercept point (IIP3) with 13.2 dB of Power Gain, 1.3 dB of noise figure and 5.7mA @1.5V power consumption. IIP3 is compared with a conventional single stage common-source LNA, and it shows IIP3 is increased by +12.5 dB without degrading other features such as gain and noise figure.

Antioxidant Activities and Inhibitory Effect on Oxidative DNA Damage of extracts from Abeliophylli distichi Folium (미선나무 잎 추출물의 항산화 및 산화적 DNA 손상억제 활성)

  • Park, Jae-Ho
    • The Korea Journal of Herbology
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    • v.26 no.4
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    • pp.95-99
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    • 2011
  • Objective : In this study, we demonstrate the protective effect on oxidative DNA damage of leaf extracts from Abeliophylli distichi Folium via its antioxidant activity for the establishment of new value for the herbal medicine. Methods : Abeliophylli distichi Folium leaves were extracted with hot-water and ethylacetate (EtOAC). The 1,1-diphenyl-2- picrylhydrazyl (DPPH) radical and hydroxyl scavenging assay and $Fe^{2+}$ chelating assay were performed for antioxidative effect and ${\varphi}$X-174 RF I DNA cleavage assay and intracellular DNA damage assay were used for inhibitory effect of intracellular DNA damage. Results : In DPPH, Hydroxyl radical scavenging activity and $Fe^{2+}$ chelating activity of EtOAC extracts were 94.72%, 62.88%, 41.13%, and hot-water extracts were 88.86%, 56.7%, 37.4% at 200 ${\mu}g/m{\ell}$, respectively. Also, those extracts showed protective effect of DNA damage against the oxidative stress. Conclusion : These results indicated that the leaf extracts of Abeliophylli distichi Folium can be used as a natural antioxidants, which effectively inhibits the oxidative DNA damage.