• 한국정밀공학회지
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• 제20권10호
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• pp.112-119
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.64-69
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• 2007

Aerostatic planar XY stages are frequently used as the main frames of precision positioning systems. The machining and assembly process of the rails and bed of the stage is one of first processes performed when the system is built. When the system is complete, the 2D position, motion, and stage flatness errors are measured in tests. If the stage errors exceed the application requirements, the stage must be remachined and the assembly process must be repeated. This is difficult and time-consuming work. In this paper, a method for estimating the errors of a planar XY stage is proposed that can be applied when the rails and bed of the stage are evaluated. Profile measurements, estimates of the motion error, and 2D position estimation models were considered. A comparison of experimental results and our estimates indicated that the estimated errors were within $1{\mu}m$ of their true values. Thus, the proposed estimation method for 2D position and flatness errors of an aerostatic planar XY stage is expected to be a useful tool during the assembly process of guideways.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1993년도 추계학술대회 논문집
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• pp.305-311
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• 1993

In recent years, it has been variously developed for testing the accuracy of circular motion of NC machine tools, for example Telescoping Ball Bar Method by Bryan,Circular Test Method by Knapp and r $_{- \theta}$ Mathod by Tsutsumi etc., but it is not yet settled in the code of measuring methods of motion errors of NC machine tools, because of errors of measuring units and sensors, and also especially the difficulties of centering of measuring units. In this paper, in use of magnetic type linear scale with resolution of 0.5 .mu. m and tick pulses come out from computer, it has become possible for detecting of linear displacement of radial errors and measuring of revolution angle of circular motion of NC machine tools.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1243-1248
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• 2003

It is very important to measure linear motion accuracy of NC lathe as it affects all other parts of machines machined by them in industries. If the motion accuracy of NC lathe is bad, the dimension accuracy and the change-ability of works will be bad in the assembly of machine parts. In this paper, computer software systems are organized to measure linear motion of ATC(Automatic tool changer) on zx plane of NC lathe using two linear scales and the time pulses coming out from computer in order to get data at constant time intervals from the linear scales. And each sets of error data obtained from the test is discripted to plots and the results of linear motion errors are expressed as numerics by computer treatment.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.119-120
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• 2013

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.129-130
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• 2010

• 대한전기학회:학술대회논문집
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• 대한전기학회 1988년도 전기.전자공학 학술대회 논문집
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• pp.236-239
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• 1988

Prediction errors generated by motion compensated coding are coded with transform coding techniques as DCT. The performance of transform coding techniques are lowered mainly due to the source characteristics with a great deal of zero populations and plus-minus sign changes, i.e., low correlation. In this paper a transform coding scheme which adopts a decomposition of prediciton errors into two sources is proposed and compared its performance with conventional scheme.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.692-695
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• 2000

This paper is concerned with Accuracy Design of LM Guide System in Machine Tools. Elastic deformation of bearing is calculated by Hertz contact theory and motion error of LM block is analyzed. A new algorithm using block stiffness is proposed fur the analysis of motion accuracy of the table. The best advantage of this algorithm is fast analysis speed because it isn't necessary iteration processes for satisfying equilibrium equation of the table. Motion errors of the table analyzed under artificial form error of rail theoretically and experimentally. Only one of two rails is bent by putting a thickness gauge into horizontal direction. This form error of rail is measured by gap sensor against the other rail. Then, motion errors of the table are predicted by proposed new algorithm theoretically and measured by laser interferometer. Measurements are carried out by changing the preload and thickness. The results show that the table motion errors are reduced from 1/2 to 1/60 times than form error of rail according to its height and width. And the effect of preloading is almost negligible.

• 한국생산제조학회지
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• 제22권4호
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• pp.735-739
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• 2013

The error motion of a machine tool spindle directly affects the surface errors of machined parts. Spindle motion errors such as three translational motions and two rotational motions are undesirable. These are usually due to the imperfectness of bearings, stiffness of spindle, assembly errors, and external force or unbalance of rotors. The error motions of the spindle need to be reduced for achieving the desired performance. Therefore, the level of error motion needs to be estimated during the design and assembly process of the spindle. In this study, an estimation method for five degree-of-freedom (5 DOF) error motions for a spindle with an angular contact ball bearing is suggested. To estimate the error motions of the spindle, the waviness of the inner-race of bearings and an external force model were used as input data. The estimation model considers the geometric relationship and force equilibrium of the five DOFs. To calculate the error motions of the spindle, not only the imperfections of the shaft and bearings but also driving elements such as belt pulley and direct driving motor systems are considered.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.