• Transactions of the Korean Society of Mechanical Engineers A
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• v.40 no.11
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• pp.955-962
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• 2016

In recent years, there have been emerging needs for standardized software-based motion application development for better scalability and support for multiple operation modes for small quantity batch production. Although a software-based motion system provides a basis for constructing multiple operation modes on a machine, it is not easy to construct such systems without tools for defining multiple motion operation modes and standardized mode-change protocols. This paper proposes a motion recipe concept to overcome this problem; the concept includes the authoring of multiple motion operation modes using the PLCopen-compliant motion function blocks and communication protocols to trigger operation mode changes from an external interface. The motion recipe was implemented by extending an IEC 61131-3 compliant IDE called Beremiz, and the correctness of the motion recipe-based application behavior was verified on a real testbed.

• Journal of the Institute of Electronics Engineers of Korea CI
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• v.42 no.5
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• pp.31-40
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• 2005

In this study, we study measurement of wafer processing throughput and sequence simulation of single wafer type for wafer cleaning equipments that were used for etching, cleaning and polishing of wafer. Based on finite state machine, simulation model was built with identification of robot's status according to scheduling algorithm. Moreover, through performance of simulation as above, throughput per hour of cleaning equipment was measured. By the simulation method that are proposed in this paper, we could measure the wafer throughput per hour according to recipe and robot motion speed, and find optimal recipe and moving sequence of robot that maximize the throughput.