• Proceedings of the KSME Conference
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• 2000.04b
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• pp.555-560
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• 2000

An experimental study on pumping characteristics of various turbo-type drag pumps is purformed. The inlet pressures are measured for various outlet pressures of the test pump. The maximum compression ratios for nitrogen are 100,000(Disk-type drag pump+ turbo molecular pump), 10000(Helical-type drag pump+turbo molecular pump), 850 (Helical-type drag pump), 100(disk-type drag pump).

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.8 no.2
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• pp.219-229
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• 1996

In the free molecular flow range, the pumping performance of a turbomolecular pump has been predicted by calculation of the transmission probability employing the integral method and the test particle Monte-Carlo method. The velocities of molecules incident upon a moving blade are given by the random numbers, which are sampled from the Maxwell molecular velocity distribution function. The present results agree quantitatively with the previous known numerical results. For a multi-stage pump, the velocity profile of molecules between two blade rows is not Maxwell distribution. In this case, the Monte-Carlo method is employed to calculate the overall transmission probability for the entire set of blade rows. When the results of the approximate method combining the single stage solutions are compared with those of the Monte-Carlo method for the pump having six rows at C=0.6, the approximate method overestimates as much as 36% in the maximum compression ratio and 19% in the maximum pumping speed than does the Mote-Carlo method.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.102-102
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• 2011

인공위성이 임무를 수행하는 우주환경은 지상 환경과 달리 고진공 및 극저온의 극한환경으로 지상에서는 제대로 작동하는 것으로 관찰되더라도 우주환경에서는 예상하지 못한 기능장애를 일으켜 위성의 성능에 치명적인 영향을 미치기도 한다. 이에 10-5 torr 이하의 고진공과 -180$^{\circ}C$ 이하의 극저온 환경을지상에서 모사하여 위성체의 안정성 및 신뢰성을 시험한다. 시험에는 열진공챔버라고 불리는 우주환경모사기가 사용이 되며, 기본적으로 챔버 내부 진공형성이 중요하다. 우주환경의 모사를 위해 먼저 저진공펌프로 10-2 Torr 의 저진공을 형성한 후 Turbo-molecular pump 및 Cryopump를 이용하여 10-5 Torr 이하의 고진공을 형성하게 된다. 본 논문에서는 기존 우주환경모사기에 부착된 oil type rotary pump 및 구형 turbo-molecular pump의 교체 과정을 기술한다. 특히, 저진공펌프의 경우는 챔버 내부로의 oil 역류로 인한 오염 문제를 방지하기 위하여 dry type의 펌프가 설치되었다.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.05a
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• pp.202-205
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• 2006

Recently, high vacuum pumps are widely used in the semi-conduction and liquid-crystal display ( LCD ) process. The composite-type high vacuum pumps are widely used in the various processes. In this study, the pumping performance of composite-type molecular pumps has been investigated experimentally. The experimented pumps are a compound molecular pump ( CMP ) and hybrid molecular pump ( HMP ). The CMP consists with helical-type drag pump, at lower part, and with turbomolecular pump ( TMP ), at upper part. The HMP consists with disk-type drag pump, at lower part, and with TMP, at upper part. The experiments are performed in the outlet pressure of $0.2\;{\sim}\;533\;Pa$. We have measured the ultimate pressure, compression ratio, and pumping speed

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.77.2-77.2
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• 2005

• International Journal of Air-Conditioning and Refrigeration
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• v.9 no.2
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• pp.8-18
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• 2001

The direct simulation Monte Carlo Method is applied to investigate the two-dimensional flow fields of a turbomolecular pump(TMP) in both molecular and transition flow regions. The pumping characteristics of the TMP are investigated for a wide range of the Knudsen number. The maximum of compression ratio and of pumping speed strongly depend on the Knudsen number in transition region, while they weakly depend on the Knudsen number in free molecular flow region. The present numerical results show good agreement with the previously known experimental data. Finally. the results of the single blade row in both molecular and transition regions are used to predict the overall performance of a TMP, which has three kinds of blade with 24-rows.

• Journal of the Korean Vacuum Society
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• v.10 no.3
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• pp.303-311
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• 2001

The pumping speed and the maximum compression ratio as well as the critical backing pressure as main parameters representing normal and limiting performance of a turbomolecular pump and a compound molecular pump were measured basing on a draft KS of the acceptance test procedure. Characteristics of the molecular pumps of two different kinds were compared and some points for improving regulations of the test procedure were proposed.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2723-2728
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• 2008

The present study is numerically and experimentally performed to reveal the pumping characteristics of a helical-type molecular drag pump (HTDP) in the molecular transition flow region. In the experimental study, the pressures are measured simultaneously at the 5 positions along the helical channel of rotor under various conditions of outlet pressure and throughputs, and nitrogen is used as test gas. The outlet pressure is in the range of 26-533 Pa. As results, the local pressure changes are checked corresponding to the various outlet pressure and throughput of HTDP. In the numerical study, Navier-Stokes equations with slip boundary conditions are employed (Re< 1000, Kn< 0.1). The local pressure distribution and the pumping speed are calculated. The numerical results are compared with the experimental results. The numerically computed value agrees with the experimental data within an error of approximately 5%.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.12 no.1
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• pp.83-94
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• 2000

The performance of a turbomolecular pump(TMP) in both molecular and transition flow regions is predicted by the numerical solutions of the Boltzmann equation obtained by the direct simulation Monte Carlo method. The compression characteristics of the TMP are investigated for a wide range of the Knudsen number( Kn ). The maximum compression ratios strongly depend on Kn in transition region, while do they weakly on Kn in free molecular flow region. The present numerical results of the single blade row in both molecular and transition regions are used to predict the overall performance of a TMP, which has three kinds of blade with 24-rows.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2725-2730
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• 2007

Turbo-type molecular drag pumps ( MDPs ) are used in the liquid crystal display ( LCD ), semiconductor and other thin film industries. Siegbahn ( disk-type ) molecular drag pumps are used as high-pressure stages in the hybrid-type turbomolecular pumps, where they can operate in the viscous, the transition and the free molecular flow regime. In this study is performed to investigate the pumping characteristics of three-stage disk-type molecular drag pump ( DTDP ) in the molecular transition flow region. The experiments are measured using five vacuum pressure gauges in the positions for rotors of DTDP. The test is performed with nitrogen gas ( $N_2$ ).