An Expreimental Study on the Pumping Performance of Various Turbo-Type Drag Pumps

터보형 드래그펌프의 배기특성에 관한 실험적 연구

  • Published : 2000.04.20

Abstract

An experimental study on pumping characteristics of various turbo-type drag pumps is purformed. The inlet pressures are measured for various outlet pressures of the test pump. The maximum compression ratios for nitrogen are 100,000(Disk-type drag pump+ turbo molecular pump), 10000(Helical-type drag pump+turbo molecular pump), 850 (Helical-type drag pump), 100(disk-type drag pump).

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