• Journal of ILASS-Korea
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• v.2 no.4
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• pp.29-35
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• 1997

Liquid film thickness is measured by $moir\acute{e}$ topography which monitored liquid surface. $Moir\acute{e}$ fringe measurement techniques share the inherent simplicity found in optical interferometric techniques have the advantage of use over a greater range of displacement. $Moir\acute{e}$ fringe are the geometric interference patterns observed when two dense line grating are superposed. Light transmitted through a fixed line grating is deviated by the liquid film surface, producing a distored image of the grating. The $moir\acute{e}$ fringe produced by projection of this optically distored grating onto a second stationary grating permit visualization of the liquid surface and measurement of the liquid film thickness. This study measured the small amplitude of liquid film thickness to the $moir\acute{e}$ fringe pattern produced when spherical metal was dropped glycerin put)1 And the measurement of liquid film thickness flowing down an inclined plate are required to calculate the liquid slope in a position.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.4
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• pp.7-12
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• 2005

• Journal of the Optical Society of Korea
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• v.18 no.5
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• pp.500-506
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• 2014

A new 3-D reconstruction algorithm for the human face is proposed using the derivative Moir$\acute{e}$ topography which ensures fast and robust reconstruction even for rough surfaces. The Moir$\acute{e}$ interference fringe pattern is initially obtained through the projection Moir$\acute{e}$ topography based on phase shifting, and then differentiated to provide a full unwrapped phase map for a human face. $2{\pi}$ ambiguity, which has been a chronically unsolved problem with Moir$\acute{e}$ topography, is successfully surmounted by differentiating the Moir$\acute{e}$ fringe patterns both in x- and y-directions when the object is located in the x-y plane. A real human face is used for verifying the proposed derivative Moir$\acute{e}$ topography. A human face of 4 different phase-shifted images taken in the fixed plane is almost fully reconstructed in 3-D format in 0.1 mm lateral resolution.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.1
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• pp.57-65
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• 2017

The electronic components in mobile device are composed of electronic chips and various other materials. These components become extremely thin and the constituent materials have different coefficient of thermal expansion, so that considerable warpages occurs easily due to temperature change or external load. Shadow $moir{\acute{e}}$ is non-contact, whole field technique for measuring out-of-plane displacement, but the measurement sensitivity is not less than $50{\mu}m/fringe$, which is not suitable for measuring the warpage of the electronic components. In this paper, we implemented a measurement method with enhanced sensitivity of $25{\mu}m/fringe$ by investigating and optimizing various experimental conditions of the shadow $moir{\acute{e}}$. In addition, four $moir{\acute{e}}$ fringe patterns recorded by the phase shift are processes to obtain a $moir{\acute{e}}$ fringe patterns with a sensitivity four times higher. The measurement technique is applied to small electronic components of a smart phone for measuring warpage with a high sensitivity of $5{\mu}m/fringe$ at room temperature and at the temperature of $100^{\circ}C$.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.2
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• pp.186-193
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• 2008

[ $Moir{\acute{e}}$ ] interferometry is an optical method, providing whole field contour maps of in-plane displacements with high resolution. The demand for enhanced sensitivity in displacement measurements leads to the technique of microscopic $moir{\acute{e}}$ interferometry. The method is an extension of the $moir{\acute{e}}$ interferometry, and employs an optical microscope for the required spatial resolution. In this paper, the sensitivity of $moir{\acute{e}}$ interferometry is enhanced by an order of magnitude using an immersion interferometry and the optical/digital fringe multiplication(O/DFM) method. In fringe patterns, the contour interval represents the displacement of 52 nm per fringe order. In order to estimate the reliability and the applicability of the optical system implemented, the measurements of rigid body displacements of grating mold and the coefficient of thermal expansion(CTE) for an aluminium block are performed. The system developed is applied to the measurement of thermal deformation in a flip chip plastic ball grid array package.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.11 s.188
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• pp.34-41
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• 2006

Nanoimprint lithography is an emerging technology which has an ability to make patterns under 100nm width. Recently many researches have been focused to develop multilayer patterning function in nanoimprint lithography and aligning method is attracting attention as a key technology. $Moir\'{e}$ has been used widely to measure dislocation or deformation of objects and considered one of the best solutions to detect aligning error in nanoimprint lithography. Concentric circular patterns are used to generate a $moir\'{e}$ fringe in this paper and aligning offset and direction are extracted from it. Especially this paper shows the difference of fringe equation of $moir\'{e}$ which can be obtained in nanoimprint process atmosphere from normal one.

• Journal of the Microelectronics and Packaging Society
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• v.22 no.3
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• pp.57-65
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• 2015

Electronic packages consist of various materials, and as temperature changes, warpage occurs because of the difference in coefficient of thermal expansion. Shadow $moir{\acute{e}}$ is non-contact, whole field measurement technique for out-of-plane displacement. However, the technique has low sensitivity above $50{\mu}m/fringe$, it is not adequate for the warpage measurement in some circumstance. In this paper, by applying phase shifting process to the traditional shadow $moir{\acute{e}}$, measurement system having enhanced sensitivity of $12.5{\mu}m/fringe$ is constructed. Considering Talbot effect, the measurement is carried out in the half Talbot area. Shadow fringe pattern having four times enhanced sensitivity is obtained by the image process with four shadow fringes. The measurement technique is applied to the fibered package substrate and coreless package substrate for measuring warpages at room temperature and at about $100^{\circ}C$.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.7 s.172
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• pp.88-93
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• 2005

$Moir\acute{e}$ topography method is a well-known non-contacting 3-D measurement method. Recently, the automatic 3-D measurement by $Moir\acute{e}$ topography has been required, since the method was frequently applied to the engineering and medical fields. The 3-D measurement using projection $Moir\acute{e}$ topography is very attractive because of its high measuring speed and high sensitivity. In this paper, using two-wavelength method of projection $Moir\acute{e}$ topography was tested to measuring object with $2\pi-ambiguity$ problems. The experimental results prove that the proposed scheme is capable of finding absolute fringe orders, so that the $2\pi-ambiguity$ problems can be effectively overcome so as to treat large step discontinuities in measured objects.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1027-1032
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• 2003

Thermo-mechanical behavior of flip-chip plastic ball grid array (FC-PBGA) packages are characterized by high sensitive $Moir{\acute{e}}$ interferometry. $Moir{\acute{e}}$ fringe patterns are recorded and analyzed for several temperatures. Deformation analysis of bending displacements of the packages and average strains in the solder balls for a single-sided package assembly and a double-sided package assembly are presented. The bending displacement of the double-sided package assembly is smaller than that of the single-sided one. The largest of effective strain occurred in the solder ball located at the edge of the chip and its magnitude of the double-sided package assembly is greater than that of single-sided one.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.23 no.7 s.166
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• pp.1129-1138
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• 1999

[$Moir\acute{e}$] technique is now being extensively investigated as a fast non-contact means of three-dimensional profile measurement especially for reverse engineering. One problem with $moir\acute{e}$ technique is so called $2\pi$-ambiguity problem that limits the maximum step height difference between two neighboring sampling points to be less than half the equivalent wavelength of $moir\acute{e}$ fringes. In this investigation, a new two-wavelength scheme of projection $moir\acute{e}$ topography is proposed and tested to cope with the $2\pi$-ambiguity problem. Experimental results are discussed to assess the new method in measuring large objects with high step discontinuities.