• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.151-152
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• 2002

An oxidized surface layer was intentionally formed on a sputtered $MoS_2$ film by introducing oxygen gas in the final stage of sputtering process. The film showed longer life than the normal Ar-sputtered film when the surface layer was slightly oxidized. A XPS analysis revealed co-existence of $MoS_2$ and $MoO_3$ in the surface layer. suggesting that the existence of some amount of oxides in the surface layer had beneficial effect. A confusing result was obtained: the life was much shorter than normal Ar-sputtered film when the film was exposed to $O_2$ environment for 1 minute after normal Ar-sputtering, although almost no oxide was detected in XPS analysis.

• 한국표면공학회지
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• 제33권4호
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• pp.266-272
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• 2000

Sputtered $MoS_2$ thin films provide lubrication and wear improvements for vacuum and space applications. In this study, deposition of $MoS_2$ thin films by R.F. magnetron sputtering was studied with regard to the micro-structural change of $MoS_2$ film and mechanical properties. The coating parameters such as the working pressure, the RF power, the substrate temperature, the etching time were varied to determine how these parameters affected the film morphology and mechanical properties of deposited films. The best wear properties and critical load were observed with the film deposited at $70^{\circ}C$, 1.0$\times$$10^{ -3}$ Torr, 170W and 1 hour deposition time. The critical load increased with the increase of sputter etching time.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
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• pp.310-317
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• 2000

Tribological properties of friction materials containing different volume ratios of solid lubricants (graphite and MoS$_2$) were studied using a pad-on-disk type friction tester. Morphology and thickness of the friction film were carefully examined to correlate the friction performance with the property of the friction film. Results showed that the friction materials containing 16vo1. % of graphite and 5 vol. % of MoS$_2$exhibited best friction stability among others. In particular, the thickness of the friction film decreased as the amount of MoS$_2$increased and severe friction oscillation was observed when the friction material contained MoS$_2$only (21 vol. %). Microscopic observations and friction tests suggested that the coherent thick transfer film improved the friction stability.

• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.46-51
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• 2023

We investigated the MoS₂ thin film layer by thermolytic deposition and applied it to the silicon solar cells. MoS₂ thin films were made by two methods of dipping and spin coating of (NH₄)₂MoS₄ precursor solution. We implemented two types of substrates of microtextured and nano-microtextured 6-in. Si pn junction wafers. The fabricated MoS₂ thin film layer was analyzed, and solar cells were fabricated by applying the standard silicon solar cell process. The MoS₂ thin film layer of sulfur-deficient form was deposited on the n-type emitter layer, and electrons, which are minority carriers, were well transported at the interface and exhibited photovoltaic solar cell characteristics. The cell efficiencies were achieved at 5% for microtextured wafers and 2.56% for nano-microtextured wafers.

• Tribology and Lubricants
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• 제12권3호
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• pp.107-114
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• 1996

MoS$_{2}$ bonded film was applied to reduction gears, and its lubricating properties were experimentally evaluated in terms of the power transmission efficiency and the frictional noise with a dynamo-typed gear test rig. Tests were performed in both oil lubrication and dry condition where the rotating velocity and loading torque were varied. In dry condition, MoS$_{2}$ bonded films effected the power transmission efficiency to increase about 5%, and the frictional noise level to decrease about 6 dB under the test operating conditions. It well proved that MoS$_{2}$ bonded films were a very effective solid lubricant for reduction gears. In oil lubricating conditions, the frictional properties of the coated gears were mainly governed by the lubricating oil, and lubricating effects of MoS2 bonded films were not evident. The result suggested that lubricating effect of MoS$_{2}$ bonded films would be limited to prevent a damage of reduction gears in the initial run when they were used in oil lubrication conditions.

• Tribology and Lubricants
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• 제16권3호
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• pp.173-181
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• 2000

Friction, wear and corrosion characteristics of various MoS$_2$ bonded film lubricants were investigated to apply them to automotive wheel joints. MoS$_2$ bonded film lubricants were formulated by combinations of several additives and binders, and they were coated onto the pre-treated surfaces of specimens. Friction and wear characteristics were evaluated with Falex pin & vee-block test and LFW-1 block-on-ring test. For the corrosion resistant characteristics of the films, salt solution spray corrosion tests were performed. Results showed that MoS$_2$ bonded films containing both inorganic and organic corrosion-resistant additives yielded a synergy effect on anti-corrosion resistance. Also, binders having the better water-proof and thermal stability showed the lower friction and higher corrosion resistance.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.375-375
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• 2014

Layered semiconductor materials can be a promising candidate for large-area thin film transistors (TFTs) due to their relatively high mobility, low-power switching, mechanically flexibility, optically transparency, and amenability to a low-cost, large-area growth technique like thermal chemical vapor deposition (CVD). Unlike 2D graphene, series of transition metal dichalcogenides (TMDCs), $MX_2$ (M=Ta, Mo, W, X=S, Se, Te), have a finite bandgap (1~2 eV), which makes them highly attractive for electronics switching devices. Recently, 2D $MoS_2$ materials can be expected as next generation high-mobility thin-film transistors for OLED and LCD backplane. In this paper, we investigate in detail the electrical characteristics of 2D layered $MoS_2$ local bottom-gated transistor with the same device structure of the conventional thin film transistor, and expect the feasibility of display application.

• 한국진공학회지
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• 제21권3호
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• pp.142-150
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• 2012

CIGS 박막 태양전지 기판소재인 소다라임유리 표면에 플라즈마 전처리 후 DC 마그네트론 스퍼터링 방법으로 Mo 박막을 제조하였다. 증착압력과 증착시간 변화에 따른 Mo 박막의 물리적, 전기적 특성을 분석하였고, 셀렌화 처리 조건에 따른 $MoSe_2$ 생성 여부와 경향성을 연구하였으며, Mo 박막 두께에 따른 AZO/i-ZnO/CdS/CIGS/Mo/SLG 구조의 태양전지를 제조하여 그 특성을 분석 및 평가하였다. 증착압력이 4.9 mTorr에서 1.3 mTorr로 감소할수록 치밀하고 결정입자 사이의 공극이 적고, 증착속도가 감소하고 전기저항도가 낮은 Mo 박막이 증착되었다. 증착온도가 상온에서 $200^{\circ}C$로 증가할수록 Mo 박막은 치밀한 구조를 가지고 결정성은 향상되어 면저항이 낮게 나타났다. 셀렌화 시간이 길어질수록 Mo 박막 층은 줄어들고, $MoSe_2$ 층 생성두께가 커지는 것을 알 수 있었고, 열처리로 인해 결정화 되면서 전체 박막의 두께가 줄어들었으며, $MoSe_2$ 층의 배양성은 c축이 Mo 표면과 수직 방향으로 성장된 것을 알 수 있었다. Mo 박막의 두께가 1.2 ${\mu}m$와 0.6 ${\mu}m$인 AZO/i-ZnO/CdS/CIGS/Mo/SLG 구조로 이루어진 CIGS 박막 태양전지를 제조하였다. Mo 박막의 두께가 1.2 ${\mu}m$일 때 보다 0.6 ${\mu}m$일 때 CIGS 박막 태양전지의 변환 효율은 9.46%로 비교적 우수한 특성을 나타났다. CIGS 박막 태양전지에서 하부전극인 Mo 박막 특성은 유리기판 및 광흡수 층과의 계면 형성 따라 큰 영향을 미친다는 것을 알 수 있었고, 유리기판의 플라즈마 처리와 Mo 박막의 두께조절로 Na 효과 및 $MoSe_2$층 형성 제어함으로써 CIGS 박막 태양전지의 특성 개선에 효과를 가질 수 있었다.

• Tribology and Lubricants
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• 제16권3호
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• pp.223-230
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• 2000

Molybdenum dialkyl dithiophosphate(MoDTP) 마찰특성을 이원통 마찰시험기에 의한 마찰실험 및 X-선광전자분광분석기를 이용하여 마찰표면을 분석함으로써 MoDTP의 마찰감소 작용에 대해 고찰하였다 MoDTP의 마찰감소작용은 마찰표면에 생성하는 MoS$_2$에 의존하였다. 몰리브덴(Mo)이 용이하게 금속내부로 확산하는 질소분위기 중에서는 MoDTP의 마찰감소 특성은 나타나지 않았으며, 금속표면에 산화피막이 존재할 때 MoDTP의 마찰감소작용이 잘 나타남을 알 수 있었다

• 한국표면공학회지
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• 제37권1호
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• pp.1-4
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• 2004

MoS$_2$-Ti films were deposited on SKD-11 tool steel substrate by a D.C. magnetron sputtering system. The influence of deposition parameters on the adhesion of the films was investigated by the scratch test. Crosssection morphology was evaluated using FE-SEM. The plasma etching played an important role on the adhesion of the films. The appropriate etching conditions roughened the surface, resulting In the improved adhesion of the film. The adhesion of the film increased with the interlayer thickness up to 110 nm and then decreased slightly with further increasing of interlayer thickness. The adhesion was highest at a bias voltage of -50 V. Further increase of the bias voltage decreased the film adhesion.