• Journal of the Korean Society for Precision Engineering
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• v.15 no.12
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• pp.169-179
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• 1998

Plane mirror type laser interferometers are popularly being used in many modern ultraprecision machines, as they can perform simultaneous measurements of multiple axis positions with nanometer resolution capabilities. One important issue in this application of laser interferometers is to provide a good level of alignment between the reflecting mirrors and the laser beams so that measurement errors due to undesirable coupling effects can be avoided in multiple axis measurements In this investigation, a thorough metrological analysis is given to develop an suitable mathematical model for a precision x-y stage in which the orthogonality misalignment between the reflecting mirrors significantly affects overall x-y mea-surement results. Then a noble calibration method is suggested in which two-dimensional displacement sensors of moire gratings of concentric circles are used to realize the reversal principle of orthogonality evaluation in situ. Finally, actual experimental results are discussed to verify that the suggested method can effectively calibrate the orthogonality error with an uncertainty of 0.2667 arcsec.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.362-362
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• 2010

최근 반도체 산업은 지속적인 design rule 감소로 인해 미세 pattern 공정이 요구되고 있으며, 그 중 photo lithography 공정의 scanner overlay margin 확보가 시급하게 되었다. 본 연구는 scanner 장비의 overlay 능력 개선 item 발굴에 관한 연구로서 6개월간 해당 장비에 대해 overlay monitor를 평가하여 scanner의 기계적 요소가 주는 overlay 영향 기인성 최악의 다섯 가지 budget item을 도출하였다. 본 연구를 통해 도출 된 최악의 다섯 가지 budget item(chuck 간 생김 정도 오차, chuck 간편차, chuck 간 mirror 생길 정도 오차, stage 정확성, 마스크 정렬) 성분들을 monitoring 함으로써 overlay 향상에 크게 기여할 것으로 예상한다.

• Journal of Sasang Constitutional Medicine
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• v.33 no.1
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• pp.1-21
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• 2021

Objective The purpose of this study was to examine the correlation between the Cold-damage Six-meridian disease of Qibo (岐伯六經病證) and Sasang Constitutional Symptomatology (四象體質病證), presented in Discourse on the Origin of Eastern Medicine (醫源論) of Longevity and Life Preservation in Eastern Medicine (Donguisusebowon, 東醫壽世保元). Method The process of development from Cold-damage Six-meridian disease of Qibo (岐伯六經病證) to Six Meridians Physical Symptoms and Medicines (六經形證用藥) in the chapter Cold(寒門) of the Treasure Mirror of Eastern Medicine (Donguibogam, 東醫寶鑑) was investigated. And the correlation between Six Meridians Physical Symptoms and Medicines (六經形證用藥) and Sasang Constitutional Symptomatology (四象體質病證) was considered. Results and Conclusions 1. The Cold-damage Six-meridian disease of Qibo (岐伯六經病證) in the chapter Heat Treatise (熱論篇) of Basic Questions (素問) had evolved into Six Meridians Physical Symptoms and Medicines (六經形證用藥) in the chapter Cold(寒門) of the Treasure Mirror of Eastern Medicine (Donguibogam, 東醫寶鑑) through Book for Life Saving (Huorenshu, 活人書), a work of Zhu Gong (朱肱), Six Books on Cold Damage disease (Shanghanliushu, 傷寒六書), a work of Tao Hua (陶華) and Introduction to Medicine (YixueRumen, 醫學入門), a work of Li Chan (李梴). 2. The correlation between the Cold-damage Six-meridian disease of Qibo (岐伯六經病證) and Sasang Constitutional Symptomatology (四象體質病證) can be analyzed and understood through Six Meridians Physical Symptoms and Medicines (六經形證用藥) in the chapter Cold(寒門) of the Treasure Mirror of Eastern Medicine (Donguibogam, 東醫寶鑑). 3. Greater Yang meridian disease of Qibo (岐伯) is related to Soyangin early stage of Lesser-Yang Wind-Injury symptomatology and Soyangin early stage of Chest-Heat symptomatology, Yang Brightness meridian disease and Greater Yin meridian disease to Taeeumin Liver-Heat symptomatology, Lesser Yin meridian disease to Soyangin Chest-Heat symptomatology, Lesser Yang meridian disease to Soyangin early stage of Lesser-Yang Wind-Injury symptomatology and Reverting Yin meridian disease to Soeumin Reverting Yin symptomatology of Greater Yang disease.

• The Optical Journal
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• s.138
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• pp.26-28
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• 2012

(주)모노클(대표 이강수 www.monocle.co.kr)은 LCD, PDP, OLED 제조공정에서 필요로 하는 광학 Stage의 국산화와 가공기술개발에 앞장서 왔다. 현재 정밀 Quartz 및 Ceramic가공 기술을 바탕으로 Lens, Prism, Mirror & Filter Stage Glass, Micro & Macro Optical Parts, Optical Systems 등을 주력으로 생산해 오고 있다. 작은 중소기업이지만 (주)모노클이 세계시장에서 경쟁할 수 있는 제품을 생산하며 큰 역량을 발휘할 수 있었던 원동력은 꾸준히 연구개발에 투자하여 기술집약적 토대를 만들었기 때문이다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.573-576
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• 2005

A compact linear and angular displacement measurement device was developed by combining a Michelson interferometer and an autocollimator to characterize the movement of a precision stage. A Michelson interferometer and an autocollimator are typical devices for measuring linear and angular displacement, respectively. By controlling the polarization of reflected beam from the target mirror of the interferometer, some part of light was retro-reflected to the light source and the reflected beam was used for angle measurement. The interferometer and the autocollimator use the same optic axis and the target mirror can be easily and precisely aligned orthogonal to the optic axis by monitoring the autocollimator s signal. The autocollimator was designed for angular resolution of 0.1 arcsec and dynamic range of 60 arcsec. The nonlinearity error of interferometer was minimized by trimming the gain and offset of the photodiode signals. Through the experiments, we evaluate the performance of measurement device and discuss its applications.

• The Journal of Korean Medicine
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• v.43 no.4
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• pp.74-88
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• 2022

Objectives: The purpose of this study is to design Korean-themed online public education content in Korean medicine using rapid prototyping instructional systems design (RPISD). This study presents cases of developing and converting face-to-face general education programs designed to increase the interest in and understanding of Korean medicine for the public into online programs within a short timeframe. Methods: This qualitative study is design and development research, which used the RPISD model to analyze the available resources utilized in the rapid development of public educational content and propose systematization and optimization measures by analyzing the needs of clients, learners, and the environment. The <Treasured Mirror of Eastern Medicine(DUBG)Open Course> was developed according to the model procedure, which involved needs analysis, development of course materials and manuscript, and storyboard creation and its filming and editing. Usability tests were conducted at all stages, and the opinions of clients, instructors, experts, and instructional designers were accommodated and reflected at each stage. Results: Using the rapid prototyping model, <Treasured Mirror of Eastern Medicine(DUBG)Open Course> was organized into five classes of 20 minutes each. Each class was developed in Korean and included English, Chinese, and Japanese subtitles in addition to Korean under the cooperative instructional design among clients, subject-matter experts, instructional designer and learners. Conclusion: The cooperative instructional design of stakeholders is significant in developing Korean medicine public education content online through extensive interaction and feedback from stakeholders in the early stage of educational content development.

• Korean Journal of Optics and Photonics
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• v.14 no.2
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• pp.189-193
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• 2003

A two-stage erbium-doped fiber amplifier (EDFA) with a band pass filter is used to get optical pulses of high peak value. The pulse signal has a 32 ㏈ extinction ratio, 125 W peak power and 79 ㎽ pulse off power. A nonlinear optical loop mirror (NOLM) is used to lower the pulse off power so as to increase the extinction ratio. The pulse signal after the NOLM has a 50.4 ㏈ extinction ratio, 35 W peak power and 0.3 ㎽ pulse off power.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.24-28
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• 1996

Mirror-like polishing system of hemisphericall high-speed precision bearing for digital VTR drum was developed. Mechamism of the polishing process was analyzed in the view point of polishing contact range and contact length between the tool and the workpiece surface. It was suggested that the two stage polishing process adoptiong the diamond grinding wheel and polishing tool instead of multistage lapping processes, which enables the mass production of the bearing by reduction of polishing time.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.208.2-208.2
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• 2012

The Slewing Mirror Telescope (SMT) is a key telescope of Ultra-Fast Flash Observatory (UFFO) space project to explore the first sub-minute or sub-seconds early photons from the Gamma Ray Bursts (GRBs) afterglows. The first realization of UFFO is the 20kg UFFO-Pathfinder (UFFO-P) to be launched on board the Russian Lomonosov satellite in 2013 by the Soyuz-2 rocket. Once the UFFO Burst Alert & Trigger Telescope (UBAT) detects the GRBs, Slewing mirror (SM) will rotate to bring the GRB into the SMT's field of view instead of slewing the entire spacecraft. SMT can image the UV/Optical counterpart with about 4-arcsec accuracy. However it will provide a important understanding of the GRB mechanism by measuring the sub-minute optical photons from GRBs. SMT can respond to the trigger over $35^{\circ}{\times}35^{\circ}$ wide field of view within 1 sec by using Slewing Mirror Stage (SMS). SMT has 10-cm Ritchey-Chretien telescope and $256{\times}256$ pixilated Intensified Charge-Coupled Device (ICCD) on focal plane. In this paper, we discuss the overall design of UFFO-P SMT instrument and payloads development status.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.37 no.3
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• pp.44-54
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• 2000

In this paper, a design methodology for the frequency-adaptive negative-delay circuit which can be implemented in standard CMOS memory process is proposed. The proposed negative-delay circuit which is a basic type of the analog SMD (synchronous mirror delay) measures the time difference between the input clock period and the target negative delay by utilizing analog behavior and repeats it in the next coming cycle. A new technology that compensates the auxiliary delay related with the output clock in the measure stage differentiates the Proposed method from the conventional method that compensates it in the delay-model stage which comes before the measure stage. A wider negative-delay range especially prominent in the high frequency performance than that in the conventional method can be realized through the proposed technology. In order to implement the wide locking range, a new frequency detector and the method for optimizing the bias condition of the analog circuit are suggested. An application example to the clocking circuits of a DDR SDRAM is simulated and demonstrated in a 0.6 ${\mu}{\textrm}{m}$ n-well double-poly double-metal CMOS technology.