• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.221-222
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• 2007

• Proceedings of the Optical Society of Korea Conference
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• 2006.07a
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• pp.497-498
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• 2006

다양한 브래그 파장의 광섬유 격자 제작을 위해 위상마스크와 두 개의 반사경이 부착된 마름모형 반사각 조정장치를 사용하여 간섭계 광학장치를 구성하였다. $1572{\sim}1614$ nm의 파장영역에서, FWHM 폭은 0.4 nm, 30 dB이상의 최소 투과율을 갖는 브래그격자 제작결과를 보고한다.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1499_1500
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• 2009

In this paper, we present a simple fabrication process for sloped electrodes in 2-degree of fredom(DOF) scanning micromirror employing pholydimethylsiloxane(PDMS). Using this process, quasi-conic figure electrode is successfully fabricated on the substrate. Simulation results show sloped electrodes decrease actuation voltage down to 22% compared with parallel plate type of electrodes having the same electrode area.

• Journal of the Microelectronics and Packaging Society
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• v.22 no.1
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• pp.1-5
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• 2015

Recently, data throughput of smart electric devices increases dramatically. There is a great interest in a new technology which exceeds the limit of electrical transmission method. Optical PCB can supplement the weakness of electrical signal processing, the research for optical PCB is very active. In this paper, we propose the thermal imprint lithography process to fabrication optical layer of optical PCB and experiment to optimize the process conditions. We confirm process time, pressure, process temperature, demolding temperature and fabricate optical interconnection structure which has $45^{\circ}$ tilted mirror surface for confirm the interconnection efficiency.

• The Bulletin of The Korean Astronomical Society
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• v.42 no.1
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• pp.57.3-58
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• 2017

Single Point Diamond Turning (SPDT) is a cost-effective technique to fabricate metallic mirrors. In particular, the servo-assisted diamond turning option is highly useful for the fabrication of freeform surfaces. However, the SPDT process leaves periodic tool marks on machined mirror surfaces, leading to undesirable diffraction effect, as well as the deviation of input beam. In order to solve this problem, we propose new SPDT machining conditions to minimize tool marks. We will also show the results from optical measurement and Power Spectral Density (PSD) analysis to evaluate the expectable performance for applications in wide field infrared telescopes.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.10 no.1
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• pp.13-16
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• 2000

Progress in Si crystal and wafer technologies is discussed on single crystal growth, wafer fabrication, epitaxial growth, gettering, 300 mm and SOI. As for bulk crystal growth, the mechanism of grown-in defects (voids) formation, the succes of grown-in defect free crystal growth technology and nitrogen doped crystal are shown. New wafer fabrication technologies such as both-side mirror polishing and etchingless process have been developed. The epitaxial growth of SiGe/Si heterostructure for high speed bipolar device is treated. Gettering technology under low temperature process such as RTP is important, and also it is shown that IG effect for Ni could be predicted using computer simulation of precipitate density and size. The development of 300 mm wafer and SOI has made progress steadily.

• Korean Journal of Optics and Photonics
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• v.6 no.3
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• pp.188-200
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• 1995

A design of unit magnification 2-mirror system with high resolution is presented. It is for soft X-ray(wavelength of 13 nm) projection imaging and suitable for preparation of high density semiconductor chip. In general, a holosymmetric system with unit magnification has the advantage that both coma and distortion are completely eliminated. In our holosymmetric 2-mirror system, spherical aberration is addtionally removed by using two identical paraboloidal mirror surfaces and field curvature aberration is also corrected by balancing Petzval sum and astigmatism which depends on the distance between two mirrors, so that the system is a aplanatic flat-field paraboloidal 2-mirror holosymmetric system. This 2-mirror system is small in size, and has a simple configuration with rotational symmetry about optical axis, and has also small central obscuration. Residual finite aberrations, spot diagrams, and diffraction-based MTF's are analyzed for the check of performances as soft X-ray lithography projection system. As a result, the image sizes for the resolutions of$0.25\mum$and $0.18\mum$are 4.0 mm, 2.5 mm respectively, and depths of focus for those are $2.5\mum$, $2.4\mum$respectively. This system should be useful in the fabrication of 256 Mega DRAM or 1 Giga DRAM. DRAM.

• The Bulletin of The Korean Astronomical Society
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• v.46 no.2
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• pp.76.3-77
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• 2021

GMT secondary mirror system consists of 7 segmented adaptive mirrors. Each segment consists of a thin shell mirror, actuators and a reference body. The thin shell has a few millimeters of thickness so that it can be easily bent by push and pull force of actuators to compensate the wavefront disturbance of light due to air turbulence. The one end of actuator is supported by the reference body and the other end is adapted to this thin shell. One of critical role of the reference body is to provide the reference surface for the thin shell actuators. Therefore, the reference body is one of key components to succeed in development of GMT ASM. Recently, Korea Research Institute of Standards and Science (KRISS) and University of Arizona (UA) has signed a contract that they will cooperate to develop the first set of off-axis reference body for GMT ASM. This project started August 2021 and will be finished in Dec. 2022. The reference body has total 675 holes to accommodate actuators and 144 pockets for lightweighting. The rear surface has a curved rib shape with radius of curvature of 4387 mm with offset of 128.32mm. Since this reference body is placed just above the thin shell so that the front surface shape needs to be close to that of thin shell. The front surface has a concave off-axis asphere, of which radius of curvature is 4165.99 mm and off-axis distance is about 1088 mm. The material is Zerodur CTE class 1 (CTE=0.05 ppm/oC) from SCHOTT. All the actuator holes and pockets are machined normal to the front surface. It is a very complex challenging optical elements that involves sophisticated machining process as well as accurate metrology. After finishing the fabrication of reference body in KRISS, it will be shipped to UA for final touches and finally sent to Adoptica in Italy, in early 2023. This paper presets the development plan for the GMT ASM Reference Body and relevant fabrication and metrology plans.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1914-1917
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• 2001

3D Feed Horn Shape MEMS Antenna Array는 적외선 이미지 소자 또는 Tera hertz band 등에서 많은 응용을 할 수 있는 장점을 가진 MEMS 구조체 이다. 하지만 일반적인 MEMS 공정을 이용해서 3D Feed Horn Shape MEMS antenna array를 구현하기는 적합하지 않았다. 본 논문에서는 마스크와 웨이퍼가 일체 된 형태의 경사된 척이 초 저속으로 회전하면서 노광을 할 수 있는 새로운 방식과 미러 반사구조를 이용해서 평행광을 얻을수 있는 노광장치 (MRPBI : Mirror Reflected Parallel Beam Illuminator) System제작방법을 제안하였다. 3D Feed Horn Shape MEMS Antenna의 구조적인 high apect ratio의 특성에 의해서 SU-8과 PMER Negative Photo resist를 이용한 기본적인 실험을 통해 3D 구조체의 구현 가능성을 증명하였다. 또한 Microbolometer의 성능향상을 위한 이론적인 3D MEMS Antenna Model들을 HFSS(High Frequency Structure Simulator)을 이용해서 그 최적구조를 제안하고 3D MEMS Antenna Gain 값을 비교 분석하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.94-97
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• 2003

A precise fabrication technology of glass is increasingly demanded fer the latest Industrial applications of spherical lenses. micro-optical components, laser applications and so on. Most of cases, the surface roughness of glass is required to be minute for improving the optical characteristics. Then. the machining characteristics of SF-5 glass and quarts glass were studied by using the ELID grinding process to get mirror surface and productivity compared with a general lapping process. A rotary type grinder with ELID generator was used to make the mirror surface of glass and a Mitutoyo surface tester and a nano-hardness tester were also used to measure the grinded surface or glass. As the results of experiments. they showed that the surface roughness(Ra) of SF-5 glass was under 7.8 nm and that of quartz glass was under 3.0 nm using the # 8000 grinder. So, the possibility of highly efficient and accurate surface for optical components can be achieved by the ELID grinding process.