• 천문학회보
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• 제39권2호
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• pp.103-103
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• 2014

Manufacturing of lens and mirror using Diamond Turning Machine (DTM) offers distinct advantages including short fabrication time and low cost as compared to grinding or polishing process. However, the DTM process can leave mid-frequency error in the optical surface which generates an undesirable diffraction effect and stray light. The mid-frequency error is expected to be eliminated by mechanical polishing after the DTM process, but polishing of soft surface of ductile aluminum is extremely difficult because the polishing process inevitably degrades the surface form accuracy. In order to increase its surface hardness, we performed electroless nickel plating on the surface of diamond-turned aluminum (Al-6061T6) off-axis mirrors, which was followed by the 6-hour-long baking process at $200^{\circ}C$ for improving its hardness. Then we polished the nickel plated off-axis mirrors to remove the mid-frequency error and measured polished mirror surfaces using the optical surface profilometer (NT 2000, Wyko Inc.). Finally, we ascertained that the mid-frequency error on the mirror surface was successfully removed. During the whole processes of nickel plating and polishing, we monitored the form accuracy using the ultra-high accurate 3-D profilometer (UA3P, Panasonic Corp.) to maintain it within the allowable tolerance range (< tens of nm). The polished off-axis mirror was optically tested using a visible laser source and a pinhole, and the airy pattern obtained from the polished mirror was compared with the unpolished case to check the influence of mid-frequency error on optical images.

• 한국광학회지
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• 제28권6호
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• pp.290-294
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• 2017

카세그레인 망원경은 오목한 주경과 볼록한 부경으로 이루어져있다. 특히 부경의 경우 크기는 작지만 볼록한 형태로 빛을 모두 퍼트려 파면오차 측정이 어렵다. 본 논문에서는 비구면 계수가 여러 개인 볼록비구면 반사경의 파면오차를 Simpson-Oland-Meckel (SOM) 힌들 테스트를 적용하여 측정하였다. 그리고 실험 구성에서 발생하는 계통오차를 분리해내기 위해 QN 절대측정법을 추가로 적용함으로써 힌들 렌즈 제작 및 정렬 오차를 포함한 계통오차를 보정하고 볼록비구면 반사경만의 파면오차를 구하였다. 이렇게 구한 볼록비구면 반사경의 파면오차와 QED사의 ASI (Aspheric Stitching Interferometer)로 측정한 파면오차와 비교한 결과, 모두 $45^{\circ}$ 방향의 비점수차 형태를 가지며 rms 값의 차이가 약 2.5 nm rms 이내로 매우 작음을 확인하였다.

• 한국정밀공학회지
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• 제27권2호
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• pp.25-28
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• 2010

The micro fabrication on the mold material using picosecond laser ablation processing has been studied. We used the two kind of system with picosecond laser. First one is two mirror type scanner and telecentric f-theta lens. Second one is X-Y stage and objective lens. By using these system, the $100{\mu}m$ size chess patterning and $2{\mu}m$ size patterning was fabricated. Especially $2{\mu}m$ size patterning on the mold material can be used as the decorative rainbow color logo for industrial field. In this paper, it is proved the picosecond laser is effective tool for the laser ablation processing.

• Journal of the Optical Society of Korea
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• 제7권4호
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• pp.230-233
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• 2003

This study describes the conceptual design of a soft x-ray microscope system based on a laserbased source for biomedical application with high resolution (${\leq}$50nm). The laboratory scale soft x-ray microscope consists of high power laser plasma x-ray source and grazing incidence mirrors with high reflectivity. The laser plasma source used for developing this system employs Q-switched Nd-YAG pulsed laser. The laser beam is focused on a tantalum (Ta) target. The Wolter type I mirror was used as condenser optics for sample illumination and as objective mirror for focusing on a detector. The fabrication of the Wolter type I mirror was direct internal cutting using ultraprecision DTM. A hydrated biological specimen was put between the two silicon wafers, the center of which was $Si_3N_4$ windows of 100㎚ thickness. The main issues in the future development work are to make a stable, reliable and reproducible x-ray microscope system.

• 한국정밀공학회지
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• 제13권6호
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• pp.45-51
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• 1996

Silicon wafers are required to be finished under the roughness of nanometer order for the subsequent chip fabrication processes. Recently, the finish grinding techniques have been researched for the improvement of accuracy and surface roughness simultaneously. Among them, the grinding technique using fine abrasive has been known as an easily accessible method. However, the manufacture of the fine grit grinding wheel has been very difficult because of the coherence of the grits. In this paper, the development of the ultrafine grit silica($SiO_2$) grinding wheel by the combination of the binder coating and the vacuum forming techniques is reported. And, the mechanochemical removal effects of the grinding conditions are discussed. Finally, a successful result of Ra O.4nm. Rmax 4nm in the ground surface roughness of a 6 inch silicon wafer was achieved.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1912-1913
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• 2003

This paper presents a variable optical attenuator (VOA) that is fabricated using bosch deep silicon etching process [1] with silicon-on- insulator (SOI) wafer. The VOA consists of driving electrode, ground electrode, actuating mirror, and mechanical slower. In this VOA, actuating mirror is driven by electrostatic force [2] and the pull-in voltage is close to 13V, 28 V, 46V come along with the spring width of $3{\mu}m,\;5{\mu}m,\;7{\mu}m$ respectively.

• Journal of Astronomy and Space Sciences
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• 제27권2호
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• pp.153-160
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• 2010

We modified the optical system of 500 mm wide-field telescope of which point spread function showed an irregularity. The telescope has been operated for Near Earth Space Survey (NESS) located at Siding Spring Observatory (SSO) in Australia, and the optical system was brought back to Korea in January 2008. After performing a numerical simulation with the tested value of surface figure error of the primary mirror using optical design program, we found that the surface figure error of the mirror should be fabricated less than root mean square (RMS) $\lambda$/10 in order to obtain a stellar full width at half maximum (FWHM) below $28\;{\mu}m$. However, we started to figure the mirror for the target value of RMS $\lambda$/20, because system surface figure error would be increased by the error induced by the optical axis adjustment, mirror cell installation, and others. The radius of curvature of the primary mirror was 1,946 mm after the correction. Its measured surface figure error was less than RMS $\lambda$/20 on the table of polishing machine, and RMS $\lambda$/15 after installation in the primary mirror cell. A test observation performed at Daeduk Observatory at Korea Astronomy and Space Science Institute by utilizing the exiting mount, and resulted in $39.8\;{\mu}m$ of stellar FWHM. It was larger than the value from numerical simulation, and showed wing-shaped stellar image. It turned out that the measured-curvature of the secondary mirror, 1,820 mm, was not the same as the designed one, 1,795.977 mm. We fabricated the secondary mirror to the designed value, and finally obtained a stellar FWHM of $27\;{\mu}m$ after re-installation of the optical system into SSO NESS Observatory in Australia.

• Journal of the Optical Society of Korea
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• 제20권1호
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• pp.94-100
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• 2016

A novel optical design for high resolution, large field of view (FOV) and multispectral remote sensing is presented. An f/7.3 Korsch and two f/17.9 Cook three-mirror optical systems are integrated by sharing the primary and secondary mirrors, bias of the FOV, decentering of the apertures and reasonable structure arrangement. The aperture stop of the Korsch system is located on the primary mirror, while those of the Cook systems are on the exit pupils. High resolution image with spectral coverage from visible to near-infrared (NIR) can be acquired through the Korsch system with a focal length of 14 m, while wide-field imaging is accomplished by the two Cook systems whose focal lengths are both 13.24 m. The full FOV is 4°×0.13°, a coverage width of 34.9 km at the altitude of 500 km can then be acquired by push-broom imaging. To facilitate controlling the stray light, the intermediate images and the real exit pupils are spatially available. After optimization, a near diffraction-limited performance and a compact optical package are achieved. The sharing of the on-axis primary and secondary mirrors reduces the cost of fabrication, test, and manufacture effectively. Besides, the two tertiary mirrors of the Cook systems possess the same parameters, further cutting down the cost.

• 한국광학회지
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• 제8권3호
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• pp.183-188
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• 1997

색분리 필터는 하나의 파장영역에서는 고반사, 다른 파장영역에서는 고투과를 제공하는 광학소자이다. 레이저를 이용한 디스플레이장치의 광학계를 구성하기 위해서는 정확한 색상의 분리가 요구되며, 광학계 효율 측면에서 매우 중요하다. 본 연구에서는 Kr-Ar laser(혼합 gas)빔을 R.G.B 삼색으로 분리하여 화상을 구현하기 위한 미러와 필터를 아래와 같은 특성을 만족하도록 설계 및 제작하였고, 그 특성은 45.deg./S-편광된 빔을 입사시켜서 1) R(반사율)>99% 450~493 nm, T(투과율)>90% 509~685 nm 2) R(반사율)>99% 509~685 nm, T(투과율)>90% 450~493 nm 3) R(반사율)>99% 509-585 nm, T(투과율)>90% 600~683 nm를 각각 만족하는 소자로 색분리를 실현하여 레이저 프로젝션 시스템을 구성하는데 사용하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권11호
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• pp.748-754
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• 1999

Micromirrors supported by S-shape girders were fabricated and their angular deflections were measured using a laser-based system. A micromirror consists of a $50\mum\times50\mum$ aluminum plate, posts and an S-shape girder. Two electrodes were deposited on two corners of the substrate beneath the mirror plate. $50\times50$micromirror array were fabricated using the Al-MEMS process. The electrostatic force caused by the voltage difference between the mirror plate and one of the electrodes causes the mirror plate to tilt until the girder touches the substrate. Bial voltage of the mirror plate is between 25~35V and signal pulse voltage on both electrodes is $\pm5V$. A laser-based system capable of real-time two-dimensional angular deflection measurement of the micromirror was developed. The operation of the system is based on measuring the displacement of a HeNe laser beam reflecting off the micromirror. The resonant frequency of the micromirror is 50kHz when the girder touches the substrate and it is 25 when the micromirror goes back to flat position, since the moving mass is about twice of the former case. The measurement results also revealed that the micromirror slants to the other direction even after the girder touches the substrate.