• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1907-1910
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• 2003

Miniaturized machine tool can be used to produce 3D features based on CNC and PC-NC technology in the micro/meso scale. Wide applications of CNC technology are developed and there are lots of know-hows in the cutting process and their CNC application. It helps micro/meso scale structure to machine components, which can be used directly for practical applications. In the present research, as the machine tool is miniaturized, the manufacturing machine tools costs less when compared to the equipment used in other micromachining technologies. Moreover, with advancement of micro tool technology, the cutting process can be used to produce micro/meso scale parts. In conclusion, the proposed system can reduce the cost by utilizing the current machining technology, and as a result, complex micro/meso parts can be produced efficiently with high productivity.

• 한국생물공학회:학술대회논문집
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• 2000.11a
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• pp.147-150
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• 2000

Bioprocess chromatography is probably the most widely used unit operation in biopharmaceutics manufacturing. To obtain a good quality product reproducibly, the chromatography process validation should be performed carefully. We developed a miniaturized automatic chromatography system, MiniValChrom, for column performance validation.

• Proceedings of the Korea Electromagnetic Engineering Society Conference
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• 2003.11a
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• pp.251-255
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• 2003

In this paper, a miniaturized directional coupler utilizing lumped element is proposed as a interdigital capacitor. The traditional miniaturization technique of transmission line realized a utilizing MIM(Metal-Insulator-Metal) capacitor on CPW(Coplanar Waveguide). However, we present a simplified design procedure without additional manufacturing process utilizing interdigital capacitor on microstrip with ease of design. The similar characteristics between the conventional directional coupler with ${\lambda}/4$ transmission line and the miniaturized directional coupler with ${\lambda}/8$ transmission line are validated through simulation and measurement results. Miniaturization rate of total size is about 25% while coupled line is about 60%. As a result, this proposed directional coupler can reduce the size of mobile communication system at 2 GHz.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.203-204
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• 2011

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.29-37
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• 2021

A 7 nm technology node using extreme ultraviolet lithography with a wavelength of 13.5 nm has been recently developed and applied to the semiconductor manufacturing process. Furthermore, the development of sub-3 nm technology nodes continues to be required. In this study, design factors of an electrostatic deflector for an ultra-miniaturized microcolumn system that can realize an electron wavelength of below 1.23 nm with an acceleration voltage of above 1 eV were investigated using a three-dimensional simulator. Particularly, the optimal design of the electrostatic octupole floating deflector was derived by optimizing the design elements and improving the driving method of the 1 keV low energy ultra-miniaturized microcolumn deflector. As a result, the entire wide field of view greater than 330 ㎛ at a working distance of 4 mm was realized with an ultra-high-resolution electron beam spot smaller than 10 nm. The results of this study are expected to be a basis technology for realizing a wafer-scale multi-array microcolumn system, which is expected to innovatively improve the throughput per unit time, which is the biggest drawback of electron beam lithography.

• KSBB Journal
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• v.17 no.4
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• pp.326-332
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• 2002

The quality of biopharmaceutical proteins is strongly affected by a manufacturing process employed to produce Et, and thus validation of the manufacturing bioprocess is a very important issue. Chromatography is probably the most widely used bioprocess unit operation for protein purification. In this study, a miniaturized automatic chromatography system was designed and constructed for scale-down studies for process chromatography validation. This system, named MiniValChrom, has the following features: automatic and repeated operation, flexible sequences and intervals among the steps, on-line and real-time monitoring and control, method files savings, etc. Using the MiniValChrom, we peformed a case study of an abbreviated experiment to estimate chromatographic resin lifetime. BSA (bovine serum albumin) and Cibacron Blue 3G-A were used as the model protein and the resin, respectively. The resin deterioration was evaluated by determining and monitoring the HETP and NTP values from the chromatograms every 5 cycles. It was observed that the HETP and the NTP values were changed by 9% after 15 cycles. The resin lifetime validation could be completed by repeating this experiment until the HETP value reached a predetermined value. The MiniValChrom's concept and the protocol suggested in this study can serve as a rapid and economical tool for the validation studies of bioprocess chromatography system.

• Proceedings of the KAIS Fall Conference
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• 2009.12a
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• pp.190-193
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• 2009

The most essential element in wireless sensor network is wireless sensor node which collects environmental information and transmits it to the user application systems. Recently, due to the technological advancement, wireless sensor nodes are become smaller, more intelligent and less power consuming. Especially, SoC(System-on-Chip) technology, which unifies the MCU, RF module, memory and other element inside one chip, plays an important part for miniaturization of sensor node, hence reduces the manufacturing expenses. In this paper, we have designed a miniaturized wireless sensor node for wireless sensor network using commercial SoC technology and discussed about some application scenario and additional considerations.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.377-382
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• 2005

This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as $\mu-Late$, $\mu-milling/drilling$ machine and $\mu-grinding$ machine are the basic elements constructing $\mu-factory$ which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with VCM stage and air spindle and palm-top size micro-late are designed, and air bearing stage and stepwise linear motion system with PZT are studied for motion system. The micro cutting characteristics are investigated experimentally, and reconfigurable machine structures are also considered.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.4
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• pp.446-451
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• 2011

Recent trends for the miniaturization and weight reduction of portable electronic parts have driven uses of subminiature components. Assembly of the miniaturized components requires subminiature screws of which pitch sizes are micrometer scale. To produce such subminiature screws with high precision threads, not only a precision forming technology but also a high-precision measurement technology is required. The present study covers the development of a vision inspection system for precision screws for the automatic measurement of subminiature screws with high speed and reliability. In this study, the feeding unit that transfers the subminiature screws to the inspection unit is investigated through finite element(FE) analysis. The vibration characteristics of the feeding unit are predicted through FE analyses, from which we can determine whether the subminiature screw can be stably fed into the inspection unit or not. The effects of several design parameters on the vibration characteristics are also discussed.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.3
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• pp.362-367
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• 2012

Though a micro pump is a crucial element in miniaturized bio-fluidic systems or drug delivery systems, most of the conventional micro pumps still have some limitations to miniaturize their controller system and to obtain the sufficient back pressure which can rise over the inner pressure of human body or experimental animals. In this paper, to overcome these limitation, a new PZT disc and its controller were designed and fabricated to get the sufficient flowrate and the back pressure with guaranteeing embeddability of the controller into pumping body. The amplitudes of the disc deflections were as large as 40 ${\mu}m$ at 200 V - 100 Hz condition. As results of experiments, the flow rate and the back pressure increase when the frequency increases. The obtainable maximum flow rate and back pressure are 5.2 ml/min at 95 Hz and 13.14 kPa at 90 Hz respectively.