• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.206.1-206.1
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• 2015

최근에 금속산화물을 증착하는 방법으로 용액공정이 주목 받고 있다. 용액 공정은 대기압에서 매우 간단한 방법으로 복잡한 공정과정을 요구하지 않기 때문에 박막을 경제적으로 간단하게 형성할 수 있다. 하지만 용액공정을 통해 형성한 박막에는 소자의 특성을 열화 시키는 solvent와 탄소계열의 불순물을 많이 포함하고 있어 고온의 열처리가 필수적이다. 박막의 품질을 향상시키기 위해서 다양한 열처리 방법들이 이용되고 있으며, 일반적인 열처리 방법으로는 furnace를 이용한 conventional thermal annealing (CTA)이 많이 이용되고 있다. 하지만, 최근에는 microwave를 이용한 공정이 주목 받고 있다. Microwave energy는 CTA보다 효과적으로 비교적 낮은 온도에서 높은 열처리 효과를 나타낸다. 본 실험은 n-type Silicon 기판에 solution-ZrO2 산화막을 형성 후, oven baking을 한 뒤, CTA와 microwave를 이용하여 solvent와 불순물을 제거 하였다. 전기적 특성을 확인하기 위해 solution ZrO2 산화막 위에 E-beam evaporator를 이용해 Ti 금속 전극을 증착하여 Metal-Oxide-Semiconductor (MOS) capacitor를 제작하였다. 다음으로, PRECISION SEMICONDUCTOR PARAMETER ANALYZER (4156B)를 이용하여, capacitance-voltage (C-V) 특성 및 current-voltage (I-V) 특성을 비교하였다. 다음으로, CTA를 통하여 제작한 소자와 전기적 특성을 비교하였다. 그 결과, Microwave irradiation으로 열처리한 MOS capacitor 소자에서 capacitance 값과 flat band voltage, hysteresis 등이 개선되는 효과를 확인하였다. Microwave irradiation 열처리는 100oC 미만의 온도에서 공정이 이루어짐에도 불구하고 시료 내에서의 microwave 에너지의 흡수가 CTA 공정에서의 열에너지 흡수보다 훨씬 효율적으로 이루어지며, 결과적으로 ZrO2 용액의 불순물과 solvent를 낮은 온도에서 제거하여 고품질 박막 형성에 매우 효과적이라는 것을 나타낸다. 따라서, microwave irradiation 열처리 방법은 비정질 산화막이 포함되는 박막 transistor 소자 제작에 대하여 결정적인 열처리 방법이 될 것으로 기대한다.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.26 no.12
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• pp.1058-1063
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• 2015

In this article, we propose a near field microwave scanning probe structure in which two short conducting rods are attached to the center of the ridged(H-type) aperture, thereby reducing significantly the beam spot area while maintaining the high transmission efficiency through the output coupling H-type(ridged) aperture. Here the two short parallel conducting rods seem to play an important role of concentrating the transmitted electromagnetic energy through the H-type aperture and so reducing the beam area for high resolution. For validation of the proposed theory, the near field waveguide probe is fabricated according to the simulated results and its return loss characteristics versus frequencies are measured. The comparison between theory and experiment is seen to be in good agreements.

• Proceedings of the IEEK Conference
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• 2003.07a
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• pp.274-277
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• 2003

Millimeter-wave networking is composed of narrow beam link. High directivity of the beam provides either advantage or disadvantage in comparison with conventional wide-lobe microwave communications. In such networks, it is very substantial that beam connecting point to point is fixed in right direction. It is major requirement in the beam network to keep the beam in best direction. In this paper, We propose the method to find a best suited direction of the antenna's beam using the Genetic Algorithm in point-to-point link. Proposed method presume that each station knows his direction $\theta$$_1$,$\theta$$_2$ at every step of Genetic Algorithm, then it can be expected that GA is possible to search the ideal solution. Intensity of the received signal is evaluated by the multiplication of lengths to the point which the lobe meets with the horizontal line.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.23 no.9
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• pp.1107-1115
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• 2012

This paper presents the development processes of a microwave radiometer for remote sensing of water surface temperature. Achieving the measurement accuracy within $2^{\circ}C$ for water surface temperature of $5{\sim}30^{\circ}C$, the requirements and specifications of the microwave radiometer and its receiver are drawn. The receiver with high gain, high sensitivity is designed and implemented. The receiver has the bandwidth of 50 MHz, the system gain of 45.2 dB and the sensitivity of 0.56K at 5.02 GHz. The effectiveness of the developed microwave radiometer in the measurement of water surface temperature is demonstrated experimentally. The results show the microwave radiometer can detect water surface temperature for $7.5{\sim}18^{\circ}C$ within the accuracy of $0.45^{\circ}C$.

• Nuclear Engineering and Technology
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• v.48 no.1
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• pp.189-199
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• 2016

Fast neutrons with a broad energy spectrum, with which it is possible to evaluate nuclear data for various research fields such as medical applications and the development of fusion reactors, can be generated by irradiating proton beams on target materials such as beryllium. To generate short-pulse proton beam, we adopted a deflector and slit system. In a simple deflector with slit system, most of the proton beam is blocked by the slit, especially when the beam pulse width is short. Therefore, the available beam current is very low, which results in low neutron flux. In this study, we proposed beam modulation using a buncher cavity to increase the available beam current. The ideal field pattern for the buncher cavity is sawtooth. To make the field pattern similar to a sawtooth waveform, a multiharmonic buncher was adopted. The design process for the multiharmonic buncher includes a beam dynamics calculation and three-dimensional electromagnetic simulation. In addition to the system design for pulsed proton generation, a test bench with a microwave ion source is under preparation to test the performance of the system. The design study results concerning the pulsed proton beam generation and the test bench preparation with some preliminary test results are presented in this paper.

• 전기의세계
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• v.19 no.6
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• pp.8-12
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• 1970

A Device is described which intensity modulates a light beam at modulating frequency in the M/W region. A Method of designing a practical crystalline microwave-Freg. light modulator has been described. In addition, Electrooptic properties and operation as light modulator of NH$_{4}$H$_{2}$po$_{4}$ is described. A light path is provided through the crystal into a suitably oriented analyzer. The intensity of the light beam emerging from the latter varies at the same rate as the cavity frequency.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.9
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• pp.900-907
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• 2013

The development processes of a L-band microwave radiometer for remote sensing of water surface salinity are described in this paper. Achieving the development aim of the measurement accuracy within 2 psu for water surface salinity of 0~40 psu, the requirements and specifications of the microwave radiometer and its receiver are drawn. The receiver with high gain, high sensitivity is designed and implemented to satisfy these requirements and specifications. The receiver has the bandwidth of 45 MHz, the system gain of 47 dB and the sensitivity of 0.41 K at 1,390 MHz. The effectiveness of the developed L-band microwave radiometer for remote sensing of water surface salinity is demonstrated experimentally. The results show the microwave radiometer can detect water surface salinity for 10~28 psu within the accuracy of 1.4 psu.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.546-549
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• 2008

Institute of Space and Astronautical Science of Japan Aerospace Exploration Agency(ISAS/JAXA) successfully developed and operated the microwave discharge ion engines onboard Hayabusa asteroid explorer. The ${\mu}10$ ion engines feature the cathode-less plasma generation in both the ion generators and neutralizers with the results of long life and high reliability in space. Based on the space achievements of ${\mu}10$ ion engines with 8mN thrust, 3,000sec Isp and 350W consumption power, several programs are currently under developments: ${\mu}20$, ${\mu}10$HIsp and ${\mu}1$. The first is a 20-cm diameter microwave discharge ion engine, aiming to achieve 30mN/kW in the thrustto-power ratio for the asteroid sample return mission larger than Hayabusa. The second is a high Isp version of ${\mu}10$, and exhausts the plasma beam over 10,000sec Isp using 15kV acceleration voltage for deep space missions to such as Jupiter and Mercury. The third is ${\mu}1$ to be adapted to small satellites for drag-free.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.22 no.8
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• pp.1622-1631
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• 1997

A 3-stages Active Microstrip Phased Array Antenn(AMPAA) is implemented using Injection-Locking Coupled Oscillators(ILCO). The AMPAA is a beam scanning active antenna with capability of electrical scanning by frequency varation of ILCO. The synchronization of resonance frequencies in array elements is occured by ILCO, and the ILCO amplifies the injection signal and functions as a phase shifter. The microstrip ptch is operated as a radiation element. The unilateral amplifier is a mutual coupling element of AMPAA, eliminates the reverse locking signal and controls the locking bandwidth of ILCO. The possibility of Monolithic Microwave Integrated Circuits(MMIC) of T/R module is proposed by simplified and integrated fabrication process of AMPAA. The 0.75.$lambda_{0}$ is fixed for a mutual coupling space to wide the scanning angle and minimize the multi-mode. The AMPAA has beam scanning angle of 31.4.deg., HPBW(Half Power Beam Widths) of 26.deg., directive gain of 13.64dB and side lobe of -16.5dB were measured, respectively.

• 한국초전도학회:학술대회논문집
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• 2009.07a
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• pp.56-56
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• 2009