• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.179-179
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• 1998

실리콘 집적회로 제조시 sub-micron 의 contact 형성 공정은 질연막 형성 후 이의 식각 및 세정, c contact 실리사이드, 획산방지막, 배선 금속층의 형성 과정올 거치게 된다. 본 연구팀에서는 C.F야f2 헬리 콘 플라즈마훌 이용한 고선택비 contact 산화막 식각공정시 형성된 잔류막충과 오염 손상올 관찰하고 산소 플라즈마 처리와 후속 열처리에 따른 이들의 제거 정도를 관찰하여 이에 대한 결과를 발표하였다. 본 연구메서는 식각 및 후처리에 따라 잔류하는 잔류막과 손상층이 후속 공정인 contact 실리사이드 형 섬에 미치는 영향올 관찰하였다. C C.F바f2 웰리콘 풀라즈마률 이용한 식각시 공정 변수로는 수소가스 첨가, bias voltage 와 과식각 시간 의 효과를 관찰하였으며 다른 조건은 일정하게 하였다 .. Contact 실리사이드로는 Ti, Co-싫리사이드를 선 택하였으며 Piranha cleaning, 산소 플라즈마 처리, 산소 풀라즈마+600 'C annealing으로 각각 후처리된 시 편을 후처리하지 않은 시펀돌과 함께 실리사이드 형성용‘시펀으로 이용하였다 각각 일정 조건에서 동 일 두께의 실리사이드훌 형성시킨 후 4-point probe룰 이용하여 면저황올 측정하였다 후처리하지 않은 시편의 경무 실리사이드 형성은 아주 시펀의 일부분에서만 형성되었으며 후속 세정 및 얼처리훌 황에 따라 실리사이드의 면저항은 감소하여 식각 과정을 거치지 않은 깨끗한 실리콘 웨이퍼위에 실리사이드 를 형성시킨 값(control 값)에 접근하였다. 실리사이드의 면저항값은 식각시 노훌된 실리콘 표면 위에 형 성된 손상충보다는 잔류막에 큰 영향을 받았으며 수소 가스가 첨가된 식각 가스로 식각한 시편으로 형 성한 실리사이드의 면저항값이 손상이 상대적으로 적은 것으로 관찰된 수소훌 첨가하지 않은 식각 가 스로 식각한 시펀 위에 형성된 실리사이드의 면저황에 비해 낮은 값을 나타내었다. 실리사이드의 전기적 륙성에 미치는 손상층의 영향올 좀더 면밀히 관찰하고자 bare 실리콘 wafer 에 잔류막이 거의 없이 손상층을 유발시키는 식각 조건들 (100% HBr, 100%H2, 100%Ar, Cl싸fz)에 대하여 실 리콘 식각을 수행한 후 Co-실리사이드률 형성하여 이의 면저황을 측정한 걸과 100% Ar 가스로 식각된 시편을 이용하여 형성한 실리사이드의 면저항은 control 에 기까운 면저항값올 지니고 따라서 손상층이 실리사이드 형섬메 미치는 영향은 크지 않음을 알 수 있었다. 이상의 연구 결과훌 통해 손상층이 실리사이드의 형성이나 전기적 톡섬에 미치는 영황은 잔류막층 에 의한 영향보다 적다는 것을 알 수 았으며 잔류막층의 두께보다는 성분이나 걸합상태, 특히 식각 및 후처리 후 잔류하는 탄소 싱분과 C-Si 결함에 큰 영향올 받는 것올 알 수 있었다.

• Korean Journal of Materials Research
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• v.2 no.2
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• pp.126-132
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• 1992

Experiment has been performed to investigate the thermal and magnetic properties of Mn-ferrite by electrolysis. Using the 0.2%C mild steel as soluble anode and SUS 304 stainless steel as cathode, Mn-ferrite could be made from the sulfuric acid leaching of the wasted manganese dry cell and $MnSO_4$reagent by electrolysis. As the result of X-ray diffraction, thermal analysis and magnetic measurement, Mn-ferrite was the spinel type in $Mn_{x}Fe_{3-x}O_4$ (X=1), the weight loss rate of $Mn_{x}Fe_{3-x}O_4$ were linearly increased up to the $200^{\circ}C$. Ms, Mr and Hc values were decreased with increasing Mn content and heating temperature. When Mn-ferrite was formed by $MnCl_2$reagent electrolysis, Ms values were higher than those formed from the sulfuric acid leaching of the wasted manganese dry cell and $MnSO_4$reagent by electrolysis. In Mn-ferrite, which was formed from the sulfuric acid leaching of the wasted manganese dry cell by electrolysis, Ms and Mr values were higher, Hc values were lower than which was formed by $MnSO_4$ reagent electrolysis at $200^{\circ}C\;and\;300^{\circ}C, while the same values at $100^{\circ}C$. The shape of particles was spherical type, the sizes of them were about $0.1{\mu}m$ sub-micron in $MnSO_4$reagent electrolysis, $0.5{\mu}m$ in the sulfuric acid leaching of the wasted manganese dry cell by electrolysis.

• Science of Emotion and Sensibility
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• v.14 no.1
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• pp.157-164
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• 2011

Emotion science is one of the rapidly expanding engineering/scientific disciplines which has a major impact on human society. Such growing interests in emotion science and engineering owe the recent trend that various academic fields are being merged. In this paper we propose the potential importance of the biochip technology in which the human emotion can be precisely measured in real time using body fluids such as blood, saliva and sweat. We firstly and newly name such a biochip an Emotion-On-a-Chip (EOC). EOC consists of biological markers to measure the emotion, electrode to acquire the signal, transducer to transfer the signal and display to show the result. In particular, microfabrication techniques made it possible to construct nano/micron scale sensing parts/chips to accommodate the biological molecules to capture the emotional bio-markers and gave us a new opportunities to investigate the emotion precisely. Future developments in the EOC techniques will be able to help combine the social sciences and natural sciences, and consequently expand the scope of studies.

• Korean Journal of Food Science and Technology
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• v.12 no.4
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• pp.229-234
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• 1980

Deep-fried instant noodle was prepared on a laboratory scale (150 units). A part of the noodle was packed in gas-proof laminated film bags with a small package of an oxygen scavenger made from Fe-powder and a 150 ml of air in each bag(Sample 1). Another part was packed in ordinary laminated film bags (Control), and the rest was vacuum-packed (74 mmHg) in the gas-proof film bags (Sample 2). All samples were placed in an incubator kept at $45.0{\pm}0.5^{\circ}C$ for 45 days. Oxygen-removing power of the scavenger, and peroxide and thiobarbituric acid values of the samples were determined regulary. The results of the study are as follows: 1. The residual oxygen concentration of the bags in Sample 1 decreased from the original 21% to less than 0. 5% after 48 hr. 2. POVs of Control, Samples 1 and 2 after 45 days were $12.4{\pm}0.4$, $5.7{\pm}0.2$ and $6.8{\pm}0.1\;meq/㎏$ fat respectively. It was noteworthy that the POV of Sample 1 did not change significantly during the storage period. The scavenger seemed very effective in retarding the POV development of Sample 1. 3. TBA values of Control, Sample 1 and 2 after 45 days were $1.31{\pm}0.04$, $0.60{\pm}0.04$, and $0.72{\pm}0.07$. As in the case of POVs, the samples packed with the scavengers exhibited consistently smaller TBA values than the vacuum-packed samples in later stages of the storage period.

• Journal of the Korean Ceramic Society
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• v.39 no.7
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• pp.704-709
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• 2002

To improve the mechanical properties of $Al_2$O$_3$/ZrO$_2$composites, the homogeneous dispersion of ultra low size ZrO$_2$ particles in $Al_2$O$_3$ceramics have been controlled by coprecipitation method. In case of mechanical mixing of ZrO$_2$ powders with $Al_2$O$_3$, homogeneous dispersion and controlling the ZrO$_2$ size were relatively difficult due to high sintering temperature. So nanosized Zr hydroxide was coprecipitated from ZrOCl$_2$/Y(NO$_3$)$_3$ solution with commercial sub-micron sized $\alpha$-alumina (Sumitomo : AES-11(0.4 ${\mu}{\textrm}{m}$)) and high purity ultra low sized $\alpha$-alumina (Taimei Chemical (0.22 ${\mu}{\textrm}{m}$)) for low temperature sintering. By this partial coprecipitation method, relatively low sized ZrO$_2$ dispersion in $Al_2$O$_3$/ZrO$_2$ composites was achieved at 150$0^{\circ}C$-1$600^{\circ}C$ of sintering temperature range and their mechanical properties were measured.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.14 no.4
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• pp.369-376
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• 2003

In this paper, Ka-Band NRD guide band pass filter with newly designed inductive post structure is proposed and analyzed with its test results. Generally, millimeter-wave filters are very sensitive in their physical dimensions, hence, it is requires extreme precisions of several micron so as to get the designed performance. In case of common NRD Guide filter with air gap coupled structure, it is fabricated with dielectric blocks coupled via air gap. In these structures, however, it was not easy to fabricate and to process of each NRD guide dielectric resonator blocks using PTFE, so it was almost impossible to assemble with several microns in precision. In this our research, however, each dielectric resonators are coupled with a pair of inductive metal post, so all resonators are located in a single NRD Guide. The dielectric parts between two pairs of posts are operated as resonators of each stage, and the positions of the post decide the couplings between resonators. The structure we suggested is suitable fur mass production, because it is very simple and easy to process. As a result of measurements, designed NRD guide inductive post filter has a superior performance. The center frequency is 39.475 GHz with 350 MHz bandwidth, insertion loss is less than 1.8 dB, and the return loss is below than -18 dB.

• Carbon letters
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• v.11 no.4
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• pp.279-284
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• 2010

Graphene is one of the most promising materials for many applications. It can be used in a variety of applications not only as a reinforcement material for polymer to obtain a combination of desirable mechanical, electrical, thermal, and barrier properties in the resulting nanocomposite but also as a component in energy storage, fuel cells, solar cells, sensors, and batteries. Recent research at Michigan State University has shown that it is possible to exfoliate natural graphite into graphite nanoplatelets composed entirely of stacks of graphene. The size of the platelets can be controlled from less than 10 nm in thickness and diameters of any size from sub-micron to 15 microns or greater. In this study we have investigated the influence of melt compounding processing on the physical properties of a polyamide 6 (PA6) nanocomposite reinforced with exfoliated graphite nanoplatelets (xGnP). The morphology, electrical conductivity, and mechanical properties of xGnP-PA6 nanocomposite were characterized with electrical microscopy, X-ray diffraction, AC impedance, and mechanical properties. It was found that counter rotation (CNR) twins crew processed xGnP/PA6 nanocomposite had similar mechanical properties with co-rotation (CoR) twin screw processed or with CoR conducted with a screw design modified for nanoparticles (MCoR). Microscopy showed that the CNR processed nanocomposite had better xGnP dispersion than the (CoR) twin screw processed and modified screw (MCoR) processed ones. It was also found that the CNR processed nanocomposite at a given xGnP content showed the lowest graphite X-ray diffraction peak at $26.5^{\circ}$ indicating better xGnP dispersion in the nanocomposite. In addition, it was also found that the electrical conductivity of the CNR processed 12 wt.% xGnP-PA6 nanocomposite is more than ten times higher than the CoR and MCoR processed ones. These results indicate that better dispersion of an xGnP-PA6 nanocomposite is attainable in CNR twins crew processing than conventional CoR processing.

• Journal of the Korean Magnetics Society
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• v.25 no.4
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• pp.117-122
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• 2015

The holes with a diameter of $35{\mu}m$ inside the GMR-SV (giant magnetoresistance-spin valve) film were patterned by using the photolithography process and ECR (electron cyclotron resonance) Ar-ion milling. From the magnetoresistance curves of the GMR-SV film with holes measuring by 4-electrode method, the MR (magnetoresistance ratio) and MS (magnetic sensitivity) are almost same as the values of initial states. On other side hand, the $H_{ex}$ (exchange bias coupling field) and $H_c$ (coercivity) dominantly increased from 120 Oe and 10 Oe to 190 Oe and 41 Oe as increment of the number of holes inside GMR-SV film respectively. These results were shown to be attributed to major effect of EMD (easy magnetic domian) having a region positioned between two holes perpendicular to the sensing current. On the basis of this study, the fabrication of GMR-SV applying to the hole formation improved the magnetoresistance properties having the thermal stability and durability of bio-device.

• Clean Technology
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• v.17 no.3
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• pp.259-265
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• 2011

The textile industry is suffered from air pollution problems which must be resolved. In particular, white smoke and odor after the tenter process require abatement. The major air pollution problem in the textile industry occurs during the finishing stages, where various chemicals are used for coating the fabrics. Lubricating oils, plasticizers, and water repellent chemicals are the fabric treatment chemicals. The coated fabrics are cured by heating in tenter facility. In this process, most of air pollutants emitted into the air. White smoke is basically made up of tiny solid or liquid particles of VOCs less than one micron in size. The oil mist can be carried over long distance from their point of origin. The most effective method of removing odor from tenter process is to get rid of tiny oil mist at the emitted gas. For this reason, the full-scale EFC (Electric Fume Collector) of 700 CMM was tested for removing odorous substances emitted from tenter facility. As a result of this study, odor and white smoke can be eliminated effectively and quite large amounts of oil can be recovered.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.196-196
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• 2016

치과나 기공소로부터 높은 원가로 인한 재료선택에 어려움을 겪고 있어 귀금속 금합금의 물성을 가질 수 있도록 하면서 가격급등으로 인한 문제 해결하기 위한 비귀금속 합금으로 대체가 필요하기에 이에 따른 연구가 이루어져 국산 제품의 상품화를 위해 파라듐을 이용하여 적합한 새로운 합금을 개발하는 것이 필요하다. 치과용 골드합금은 미국치과의사 협회의 구정에 의하면 1형부터 4형까지 분류하고 있으며 3형에 해당하는 강도와 기계적인 특성을 갖도록 파라듐으로 대체하는 연구가 진행중이거나 시판되고 있다. 따라서 본 연구에서는 2형, 3형 및 4형을 대체가능하도록 팔라듐을 기반으로 한 새로운 합금을 설계하고 합금의 성분원 소인 Au(1~5), Pd(20~25), Ag(70~75), In(1.5) 및 Zn(2)등으로 조성을 변화시켜 측량 후 합금을 제조하기 위하여 아르곤 분위기하의 진공아크용해로를 이용하여 용해하였다. 정량된 금속을 진공아크 용해로에 장입하고 용해는 균질한 합금이 되도록 최소한 6회 이상 용융을 실시하며 합금성분의 손실이 발행하지 않도록 보정을 하였다. 합금의 미세조직 관찰을 위하여 샘플을 고속 다이아몬드 정밀 절단기(Acculom-5, STRUERS, Denmark)를 이용하여 절단한 후 2000 grit의 Sic 연마지에서 단계적으로 $0.3{\mu}m$ 알루미나 분말까지 연마한 후 초음파 세척을 하였다. 준비한 시편은 KCN과 $(NH_4)_2S_2O_8$을 1:1로 혼합한 부식액으로 에칭한 후 OM과 SEM을 이용하여 조직을 관찰하였으며 각 샘플의 성분변화는 EDS 분석을 통해 확인하고 결정구조는 XRD를 사용하여 분석하였다. 경도시험은 비커스경도시험기를 이용하여 5kg의 하중을 30초간 작동시켜 압흔을 연결된 micron으로 평균값을 측정하였다. 각 시편의 부식거동은 POTENTIOSTAT(Model PARSTAT 2273, EG&G, USA)을 이용하여 구강 내환경화 유사한 $36.5{\pm}1^{\circ}C$의 0.9% NaCl에서 실시하였다. 인가전위는 -1500mV에서 1000mV까지 1.67 mV/min의 주사속도로 인가하여 시험을 수행하였으며 분극곡선으로부터 부식전위와 부식전류밀도 및 부동태영역의 전류밀도로 금속의 용출거동을 조사하였으며 부식이 끝난 시편은 FE-SEM과 EDS를 사용하여 조사하였다. 기계적인 특성은 Pd-Ag에 3wt%의 Au를 첨가한 합금이 Pd-Ag에 1.5wt%합금을 첨가한 경우에 비하여 기계적인 특성이 증가하고 내식성이 크게 증가하였다. 이들 합금에 Cu를 11wt%를 첨가한 경우는 비커스경도가 200이상으로 높게 나타났지만 내식성이 크게 감소하였다.