• 한국전기전자재료학회논문지
• /
• 제18권5호
• /
• pp.389-395
• /
• 2005

The etching technology of the high aspect ratio contact(HARC) is necessary at the critical contact processes of semiconductor devices. Etching the $SiO_{2}$ contact hole with the sub-micron design rule in manufacturing VLSI devices, the unexpected phenomenon of 'profile tilting' or 'bottom distortion' is often observed. This makes a short circuit between neighboring contact holes, which causes to drop seriously the device yield. As the aspect ratio of contact holes increases, the high C/F ratio gases, $C_{4}F_{6}$, $C_{4}F_{8}$ and $C_{5}F_{8}$, become widely used in order to minimize the mask layer loss during the etching process. These gases provide abundant fluorocarbon polymer as well as high selectivity to the mask layer, and the polymer with high sticking yield accumulates at the top-wall of the contact hole. During the etch process, many electrons are accumulated around the asymmetric hole mouth to distort the electric field, and this distorts the ion trajectory arriving at the hole bottom. These ions with the distorted trajectory induce the deformation of the hole bottom, which is called 'profile tilting' or 'bottom distortion'. To prevent this phenomenon, three methods are suggested here. 1) Using lower C/F ratio gases, $CF_{4}$ or $C_{3}F_{8}$, the amount of the Polymer at the hole mouth is reduced to minimize the asymmetry of the hole top. 2) The number of the neighboring holes with equal distance is maximized to get the more symmetry of the oxygen distribution around the hole. 3) The dual frequency plasma source is used to release the excessive charge build-up at the hole mouth. From the suggested methods, we have obtained the nearly circular hole bottom, which Implies that the ion trajectory Incident on the hole bottom is symmetry.

• 한국통신학회논문지
• /
• 제15권1호
• /
• pp.58-70
• /
• 1990

본 논문에서는 저 전송률 비디오 코덱의 영상 데이터 압축을 위한 실시간 이차원 이상여현변환기 구현에 대해 기술한다. 제안된 구조는 벡터 내적 연산의 병렬 처리에 효율적인 분산연산을 이용하였으며 동시성을 최대로 활용하고 있어 CCITT에서 제안하는 완전 CSIF 30 프레임/초의 처리성능을 만족한다. 또한 제안된 구조를 비트 수준으로 모의시험을 수행하여 CCITT에서 제안하는 IDCT 정확도 사양을 만족함을 보였다. 실제로 효율적인 VLSI 실현을 위해 설계방법론을 연구하고 SUN3/150C를 중심으로 모듈발생기 지향적 설계환경을 구축하였다. 구축된 설계환경을 이용하여 제안된 구조의 핵심모듈을 이중 금속선 2m CMOS 기술로써 구현하였으며 설계된 이차원 DCT 칩의 크기는 약 3.9mmx4.8mm이다.

• Advances in materials Research
• /
• 제1권1호
• /
• pp.51-74
• /
• 2012

A powder metallurgy-based rapid consolidation technique, Plasma Pressure Compaction ($P^2C^{(R)}$), was utilized to produce near-net shape parts of gamma titanium aluminides (${\gamma}$-TiAl). Micron-sized ${\gamma}$-TiAl powders, composed of Ti-50%Al and Ti-48%Al-2%Cr-2%Nb (at%), were rapidly consolidated to form near-net shape ${\gamma}$-TiAl parts in the form of 1.0" (25.4 mm) diameter discs, as well as $3"{\times}2.25"$ ($76.2mm{\times}57.2mm$) tiles, having a thickness of 0.25" (6.35 mm). The ${\gamma}$-TiAl parts were consolidated to near theoretical density. The microstructural morphology of the consolidated parts was found to vary with consolidation conditions. Mechanical properties exhibited a strong dependence on microstructural morphology and grain size. Because of the rapid consolidation process used here, grain growth during consolidation was minimal, which in turn led to enhanced mechanical properties. Consolidated ${\gamma}$-TiAl samples corresponding to Ti-48%Al-2%Cr-2%Nb composition with a duplex microstructure (with an average grain size of $5{\mu}m$) exhibited superior mechanical properties. Flexural strength, ductility, elastic modulus and fracture toughness for these samples were as high as 1238 MPa, 2.3%, 154.58 GPa and 17.95 MPa $m^{1/2}$, respectively. The high temperature mechanical properties of the consolidated ${\gamma}$-TiAl samples were characterized in air and vacuum and were found to retain flexural strength and elastic modulus for temperatures up to $700^{\circ}C$. At high temperatures, the flexural strength of ${\gamma}$-TiAl samples with Ti-50%Al composition deteriorated in air by 10% as compared to that in vacuum. ${\gamma}$-TiAl samples with Ti-48%Al-2%Nb-2%Cr composition exhibited better if not equal flexural strength in air than in vacuum at high temperatures.

• 한국기계가공학회지
• /
• 제12권6호
• /
• pp.132-141
• /
• 2013

Robotic Drilling Systems(RDSs) set the standard for the factory automation systems in aerospace manufacturing. With the benefits of cost effective drilling and predictive maintenance, RDSs can provide greater flexibility in the manufacturing process. The system can be easily adopted to manage very complex and time-consuming processes, such as automated fastening hole drilling processes of large aircraft sections, where it would be difficult accomplished by workers following teaching or conventional guided methods. However, in order to build an RDS based on a CAD model, the precise calibration of the Tool Center Point(TCP) must be performed in order to define the relationships between the fastening-hole target and the End Effector(EEF). Based on the kinematics principle, the robot manipulator requires a new method to correct the 3D errors between the CAD model of the reference coordinate system and the actual measurements. The system can be called as a successful system if following conditions can be met; a. seamless integration of the industrial robot controller and the IO Level communication, b. performing pre-defined drilling procedures automatically. This study focuses on implementing a new technology called iGPS into the fastening-hole-drilling process, which is a critical process in aircraft manufacturing. The proposed system exhibits better than 100-micron 3D accuracy under the predefined working space. Based on the proposed EEF fastening-hole machining process, the corresponding processes and programs are developed, and its feasibility is studied.

• 대한기계학회논문집B
• /
• 제35권11호
• /
• pp.1133-1137
• /
• 2011

마이크로 수준에서의 온도측정을 위하여 유리 피펫 기반의 프로브형 온도센서를 제작하였다. 이를 이용하여 정밀도 ${\pm}$ 0.1 K 를 가지는 온도측정 보정 실험을 수행하였다. 본 연구에서 제작한 방식은 저온의 용융점을 갖는 솔더합금(Sn)을 피펫에 내부에 주입하고 외부에 니켈(Ni) 코팅을 하여 열전대를제작함으로써 저비용의 프로브형 온도센서를 구현하였다. 제작된 센서 팁 끝단의 지름은 5 Am 에서 30 Am 로 피펫을 가열하여 당기는 방식으로 프로브 끝단의 크기를 조절하였다. 제작된 온도센서는 챔버내에서 정밀하게 제어된 온도 조절기를 사용하여 보정하였으며, 이를 통하여 얻어진 열전계수의 범위는 8.46 에서 $8.86{\mu}V$/K 의 값을 얻었다. 이를 이용하면 MEMS 소자, 세포, 티슈 등의 바이오 소재의 온도 및 열특성 측정용 프로브로 활용할 수 있을 것으로 생각된다.

• JSTS:Journal of Semiconductor Technology and Science
• /
• 제11권2호
• /
• pp.121-129
• /
• 2011

It is progressing as new advents and remarkable developments of mobile device every year. On the upper line reason, NAND FLASH large density memory demands which can be stored into portable devices have been dramatically increasing. Therefore, the cell size of the NAND Flash memory has been scaled down by merely 50% and has been doubling density each per year. [1] However, side effects have arisen the cell distribution and reliability characteristics related to coupling interference, channel disturbance, floating gate electron retention, write-erase cycling owing to shrinking around 20nm technology. Also, FLASH controller to manage shrink effect leads to speed and current issues. In this paper, It will be introduced to solve cycling, retention and fail bit problems of sub-deep micron shrink such as Virtual negative read used in moving read, randomization. The characteristics of retention, cycling and program performance have 3 K per 1 year and 12.7 MB/s respectively. And device size is 179.32 $mm^2$ (16.79 mm ${\times}$ 10.68 mm) in 3 metal 26 nm CMOS.

• Bulletin of the Korean Chemical Society
• /
• 제30권1호
• /
• pp.219-223
• /
• 2009

$TiO_2$ doped with $Er^{3+\;and\;Yb^{3+}$ was used for fabricating a scattering layer and a nano-crystalline $TiO_2$ electrode layer to be used in dye-sensitized solar cells. The material was prepared using a new sol-gel combustion hybrid method with acetylene black as fuel. The $Er^{3+}$-$Yb^{3+}$ co-doped titanium oxide powder synthesized at 700oC had embossed structure morphology with a size between 27 to 54 nm that agglomerated to produce micron size particles, as observed by the scanning electron micrographs. The XRD patterns showed that the $Er^{3+}$-$Yb^{3+}$ co-doped titanium oxide had an amorphous structure, while using the same method without doping $Er^{3+}\;or\;Yb^{3+},\;TiO_2$ was obtained in the crystallite form with thea dominance of rutile phase. Fabricating a bilayer structure consisting of nano-crystalline $TiO_2$ and the synthesized $Er^{3+}$-$Yb^{3+}$ co-doped titanium oxide showed better scattering property, with an overall increase of 15.6% in efficiency of the solar cell with respect to a single nano-crystalline $TiO_2$ layer.

• 한국수소및신에너지학회논문집
• /
• 제23권5호
• /
• pp.455-460
• /
• 2012

This work describes the hydriding chemical vapor synthesis (HCVS) of the $MgH_2$ in a hydrogen atmosphere and the product's hydriding-dehydridng properties. Mg powder was used as a starting material to synthesize $MgH_2$ and uniformly heated to a temperature of $600^{\circ}C$ for Mg vaporization. The effects of hydrogen pressure on the morphology and the composition of HCVS-$MgH_2$ were examined by using X-ray diffraction (XRD) and scanning electron microscopy (SEM). It is clearly seen that after the HCVS process, the particle size of synthesized $MgH_2$ was drastically reduced to the submicron or micrometer-scale and these showed different shapes (needle-like nanofibers and angulated plate) depending on the hydrogen pressure. It was found that after the HCVS process, the $H_2$ desorption temperature of HCVS-$MgH_2$ decreased from 380 to $410^{\circ}C$, and the minimum hydrogen desorption tempreature of HCVS-$MgH_2$ powder with needle-like shape can be obtained. In addition, the enhanced hydrogen storage performance for needle-like $MgH_2$ was achieved during subsequent hydriding-dehydriding cycles.

• 한국수소및신에너지학회논문집
• /
• 제21권5호
• /
• pp.375-382
• /
• 2010

A layered perovskite photocatalysts, $SrBi_2Nb_2O_9$ (SBN), was synthesized by the conventional solid-state reaction method and characterized by X-ray diffraction (XRD) and UV-visble spectrophotometry. The results showed that the structure of $SrBi_2Nb_2O_9$ is orthorhombic. Diffuse reflectance spectra for calcined and attrition-milled SBN showed the main absorption edges were less 400 nm, that is ultraviolet region. SBN under micron-sized powder was deposited on the $Al_2O_3$ by room temperature powder spray in vacuum process, so called aerosol deposition (AD), and nano-grained $SrBi_2Nb_2O_9$ photocatalytic thick film was fabricated. AD-deposited SBN thick films were characterized by XRD, scanning electron microscopy (SEM) and UV-visable spectrophotometry, Moreover, it was found that several nano-sized SBN film by AD process can improve the photocatalytic activity under visable reflectance.

• 한국세라믹학회지
• /
• 제52권5호
• /
• pp.320-324
• /
• 2015

Optimization of the fabrication process of NiO-yttrium doped barium zirconate (BZY) composite anode substrates using tape-casting for high performance thin-film protonic ceramic fuel cells (PCFCs) is investigated. The anode substrate is composed of a tens of microns-thick anode functional layer laminated over a porous anode substrate. The macro-pore structure of the anode support is induced by micron-scale polymethyl methacrylate (PMMA) pore formers. Thermal gravity analysis (TGA) and a dilatometer are used to determine the polymeric additive burn-out and sintering temperatures. Crystallinity and microstructure of the tape-cast NiO-BZY anode are analyzed after the sintering.