• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.79-79
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• 1999

The varous techniques for fabrication of si or metal tip as a field emission electron source have been reported due to great potential capabilities of flat panel display application. In this report, 240nm thermal oxide was initially grown at the p-type (100) (5-25 ohm-cm) 4 inch Si wafer and 310nm Si3N4 thin layer was deposited using low pressure chemical vapor deposition technique(LPCVD). The 2 micron size dot array was photolithographically patterned. The KOH anisotropic etching of the silicon substrate was utilized to provide V-groove formation. After formation of the V-groove shape, dry oxidation at 100$0^{\circ}C$ for 600 minutes was followed. In this procedure, the orientation dependent oxide growth was performed to have a etch-mask for dry etching. The thicknesses of the grown oxides on the (111) surface and on the (100) etch stop surface were found to be ~330nm and ~90nm, respectively. The reactive ion etching by 100 watt, 9 mtorr, 40 sccm Cl2 feed gas using inductively coupled plasma (ICP) system was performed in order to etch ~90nm SiO layer on the bottom of the etch stop and to etch the Si layer on the bottom. The 300 watt RF power was connected to the substrate in order to supply ~(-500)eV. The negative ion energy would enhance the directional anisotropic etching of the Cl2 RIE. After etching, remaining thickness of the oxide on the (111) was measured to be ~130nm by scanning electron microscopy.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.248-248
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• 1999

현재 반도체 공정에서 사용하는 건식식각 공정은 고밀도 프라즈마를 사용한 플라즈마 장비를 사용하는 경향이 증대되고 있으며 이와 같은 고밀도 플라즈마 장비의 사용은 반도체 소자의 최소 선폭(CD)이 deep sub-micron으로 감소하고 반면 실리콘 웨이퍼의 크기는 8인치 직경이상으로 증가하여 가고 있어서 그 필요성이 더욱 더 증가되고 있다. 특히 TFT-LCD를 비롯한 PDP, 그리고 FED 등과 같은 여러 가지 형태의 평판 디스플레이의 제조공정에 있어서도 실리콘 기판에 비하여 대면적의 기판을 이용하고 또한 사각형 형태의 시편공정이 요구되므로 평판 디스플레이에서도 고밀도의 균일한 플라즈마 유지가 중요하다. 따라서, 본 실험에서는 여러 가지 형태의 영구자석 및 전자석의 세기 및 배열이 유도결합형 플라즈마에 미치는 효과(plasma&etch uniformity, etch rate, etc.)를 살펴보기 위해서, 유도결합형 플라즈마 chamber(210mm$\times$210mm) 내부에 magnetic cusping을 위한 영구자석용 하우스를 제작하여 표면에서 3000Gauss의 자장세기를 갖는 소형영구자석을 부착하였으며,외벽에는 chamber와 같이 사각형태로 40회 감겨진 50cm$\times$50cm 의 크기로 chamber 상하에 1개씩 Helmholtz 코일 형태로 설치하였다. 식각가스로는 Cl2, HBr, 그리고 BCl3 gas를 이용하여 axial magnet과 multidipole magnet 유무에 따른 반응성 gas의 polysilicon 식각특성을 살펴보았으며, 또한 electrostatic probe(ESP, Hiden Analytic미)를 이용하여 이들 반응성 gas에 대한 magnetically enhanced inductively coupled plasma의 특성분석을 수행하였따. Cl2, HBr, BCl3의 반응성 식각가스 조합을 이용하여 polysilicon의 식각속도 및 식각선택도를 관찰한 결과, 어떠한 자장도 가하지 않은 경우에 비해 gas의 분해율이 가장 높은 영구자석과 전자석의 조합에서 가장 높은 식각도가 관찰되었다. 특히 pure Cl2 플라즈마의 경우, Axial 방향의 전자석만을 가한 경우 식각속도에 있어서는 큰 증가를 보였으나, 식각균일도(식각균일도:8.8%)는 다소 감소하였으며, Axial 방향의 전자석과 영구자석을 조합한 경우 가장 높은 식각속도를 얻었으며, 식각균일도는 Axial 방향의 전자석만을 사용하였을 경우와 비교하여 향상되었다.

• 천문학회보
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• 제42권1호
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• pp.50.1-50.1
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• 2017

We present our study of the correlation between star formation rate(SFR) and merging activities of nearby galaxies(d<150Mpc). Our study uses 265 UV-selected galaxies which are not classified as AGN. The UV selection is made using the GALEX Atlas of Galaxies (Gil de Paz+07) and the updated UV catalog of nearby galaxies (Bai+15). We use deep R band optical images reaching to $1{\sigma}$ surface brightness detection limit ${\sim}27mag/arcsec^2$ to classify merger features by visual inspection. We also estimated unobscured SFR($SFR_{NUV}$) and obscured SFR($SFR_{W4}$) using Near-UV continuum and 22 micron Mid-IR luminosity respectively as a indicator of star forming activity. The fraction of galaxies with merger features in each SFR bin is obtained to see if how the fraction of galaxies with merging features($F_m$) changes as a function of SFR. As a result, for 203 late type galaxies(LTGs), we found that merger fraction increases from ~8% up to 50% with $SFR_{W4}$, while for 229 LTGs $SFR_{NUV}$ shows relatively consistent fraction(~18%) of merger fraction. For early type galaxies(ETGs), we could also find no significant correlation between $F_m$ and SFR(both $SFR_{NUV}$ and $SFR_{W4}$). This result suggests that a main driver of star forming activity of UV bright galaxies, especially for obscured late types, is mergers.

• 한국세라믹학회지
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• 제42권2호
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• pp.110-116
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• 2005

본 연구는 $BaO-B_{2}O_3-ZnO$계에서 저온소성이 가능한 조성을 탐색하고, 여기에 $Al_{2}O_3$를 filler로 첨가하여 복합체를 제조할 경우의 소결거동과 물성에 미치는 영향을 조사하였다. 이때 첨가하는 알루미나 분체는 입자크기가 서로 다른 두 종류를 이용함으로서 알루미나 입자 크기의 효과도 동시에 조사하였다. 알루미나 첨가량이 증가하는 경우 복합체의 치밀화정도, 유전상수, 열팽창계수, 그리고 경도 값이 감소하였다. 또한 첨가되는 알루미나 입자의 크기가 미세할 경우 그 감소율은 증가되었다. 한편 파괴인성값은 알루비나 첨가량이 많을수록, 알루미나 입자 크기가 작을수록 오히려 증가하였는데 이는 기공과 filler의 crack전파 억제 효과에 의한 것으로 해석하였다.

• Carbon letters
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• 제8권4호
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• pp.326-334
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• 2007

In this study, graphite composites were fabricated by warm press molding method to realize commercialization of PEM fuel cells. Graphite composites have been considered as alternative economic materials for bipolar plate of PEM fuel cells. Graphite powder that enables to provide electrical conductivity was selected as the main substance. The graphite powder was mixed with phenolic resin and the mixture was pressed using a warm press method. First of all, the graphite powder was pulverized with a ball mill for the dense packing of composite. As the ball milling time increases, the average size of particles decreases and the size distribution becomes narrow. This allows for improvement of the uniformity of graphite composite. However, the surface electrical resistivity of graphite composite increases as the ball milling time increases. It is due to that graphite particles with amorphous phase are generated on the surface due to the friction and collision of particles during pulverizing. We found that the contact electrical resistivity of graphite particles increases as the particle size decreases. The contact electrical resistivity of graphite powders was reduced due to high molding pressure by warm press molding. This leads to improvement of the mechanical properties of graphite composite. Hydrogen gas impermeability was measured with the graphite composite, showing a possibility of the application for bipolar plate in fuel cell. And, I-V curves of the graphite composite bipolar plate exhibit a similar performance to the graphite bipolar plate.

• 대한전자공학회논문지TC
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• 제46권12호
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• pp.37-43
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• 2009

본 논문에서는 증폭특성이 우수한 달링톤-캐스코드(Darlington-Cascode) 증폭기 구조를 제안하였다. 전통적으로 고주파 증폭 특성이 우수하다고 알려진 기존의 캐스코드 증폭기 회로와의 비교를 위해 본 논문에서는 제안된 달링톤-캐스코드 구조와 기존의 캐스코드 구조의 증폭기를 동일 칩 상에 인접하도록 설계하였다. 이 회로들은 45 GHz의 $f_T$를 가진 $0.35-{\mu}m$ SiGe 기반의 초고주파 단일 칩(MMIC; Monolithic Microwave Integrated Circuit)으로 제작되어 동일 조건 하에서 X-band 대역의 고주파 증폭특성들이 측정, 비교 및 분석되었다. 성능 측정결과 제안된 달링톤-캐스코드 증폭기는 11.5 dBm의 P1dB와 19.5 dB의 선형 증폭도를 보여주었으며, 기존 캐스코드 증폭기와 비교시 PldB는 5.2 dB, 이득면에서는 2.5 dB의 향상된 결과를 나타내었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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• pp.7-7
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• 2009

Lead telluride (PbTe) is a very promising thermoelectric material due to its narrow band gap (0.31 eV at 300 K), face-centered cubic structure and large average excitonic Bohr radius (46 nm) allowing for strong quantum confinement within a large range of size. In this work, we present the thermoelectric properties of individual single-crystalline PbTe nanowires grown by a vapor transport method. A combination of electron beam lithography and a lift-off process was utilized to fabricate inner micron-scaled Cr (5 nm)/Au (130 nm) electrodes of Rn (resistance of a near electrode), Rf (resistance of a far electrode) and a microheater connecting a PbTe nanowire on the grid of points. A plasma etching system was used to remove an oxide layer from the outer surface of the nanowires before the deposition of inner electrodes. The carrier concentration of the nanowire was estimated to be as high as $3.5{\times}10^{19}\;cm^{-3}$. The Seebeck coefficient of an individual PbTe nanowire with a radius of 68 nm was measured to be $S=-72{\mu}V/K$ at room temperature, which is about three times that of bulk PbTe at the same carrier concentration. Our results suggest that PbTe nanowires can be used for high-efficiency thermoelectric devices.

• Membrane and Water Treatment
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• 제11권1호
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• pp.69-77
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• 2020

Former studies revealed that sepiolite thermally treated at high temperature have high adsorption capacity for phosphate. However, its micron size (75 ㎛) limits its application to water treatment. In this study, we synthesized sepiolite impregnated polysulfone (PSf) beads to separate it easily from an aqueous solution. PSf beads with different sepiolite ratios were synthesized and their efficiencies were compared. The PSf beads with 30% impregnated sepiolite (30SPL-PSf bead) possessed the optimum sepiolite ratio for phosphate removal. Kinetic, equilibrium, and thermodynamic adsorption experiments were performed using the 30SPL-PSf bead. Equilibrium adsorption was achieved in 24 h, and the pseudo-first-order model was suitable for describing the phosphate adsorption at different reaction times. The Langmuir model was appropriate for describing the phosphate adsorption onto the 30SPL-PSf bead, and the maximum adsorption capacity of the 30SPL-PSf bead obtained from the model was 24.48 mg-PO₄/g. Enthalpy and entropy increased during the phosphate adsorption onto the 30SPL-PSf bead, and Gibb's free energy at 35 ℃ was negative. An increase in the solution pH from 3 to 11 induced a decrease in the phosphate adsorption amount from 27.30 mg-PO₄/g to 21.54 mg-PO₄/g. The competitive anion influenced the phosphate adsorption onto the 30SPL-PSf bead was in the order of NO₃^- > SO₄^2- > HCO_3^-. The phosphate breakthrough from the column packed with the 30SPL-PSf bead began after ~2000 min, reaching the influent concentration after ~8000 min. The adsorption amounts per unit mass of 30SPL-PSf and removal efficiency were 0.775 mg-PO₄/g and 61.6%, respectively. This study demonstrates the adequate performance of 30SPL-PSf beads as a filter for phosphate removal from aqueous solutions.

• Composites Research
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• 제23권3호
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• pp.7-12
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• 2010

탄소섬유 복합재료의 전기전도도와 기계적 강도를 높이기 위하여 음극 및 양극 전기영동법을 이용하여 탄소나노튜브(MWCNT)와 탄소나노섬유(CNF)를 탄소섬유직물에 부착하였다. 양극 전기영동에서는 MWCNT와 CNF의 탄소나노 입자들만이 탄소 섬유에 부착되었으나, 음극 전기영동에서는 MWCNT와 CNF 및 나노 크기의 구리 입자가 동시에 탄소섬유직물에 부착되었고 이에 따라 부착 밀도 및 복합재료 물성의 증대라는 시너지 효과를 거둘 수 있었다. 특히 나노 크기의 탄소나노입자 및 마이크로 크기의 탄소 섬유가 혼합된 멀티스케일 복합재료의 제조를 통해 두께 방향 전기전도도의 높은 향상을 얻었다. 또한 MWCNT와 CNF를 동시에 멀티스케일 복합재료에 적용하였을 경우, 각각을 적용한 경우보다 두께 방향 전기전도도가 높게 나타났다.

• 한국공작기계학회논문집
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• 제15권6호
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• pp.32-37
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• 2006

Micron size Co-alloy(T800) powder was coated on Inconel 718 by HVOF thermal spraying for the studies of the improvement of durability of high speed spindle by using Taguchi program for the parameters of spray distance, flow rates of hydrogen and oxygen and powder feed rate. The optimal coating process was determined by the studies of coating properties such as micro-structure, porosity, surface roughness and micro hardness. Friction and wear behaviors of coatings were investigated by sliding wear test at room temperature and $1000^{\circ}F(538^{\circ}C)$. At both room temperature and $538^{\circ}C$ the sliding wear debris and friction coefficients of the coating were drastically reduced compared with the surface of non-coated parent material. This shows that Co-alloy powder coating is highly recommendable for the durability improvement surface coating of high speed air-bearing spindle. At high temperature wear traces and friction coefficients of both coating and non-coating were drastically reduced compared with those of room temperature since the brittle oxides were formed easily on the surface, and the brittle oxide phases were attrited by the reciprocating sliding wear according to the complicated mixed wear mechanisms These oxide particles, partially melts and the melts play role as lubricant and reduce the wear and friction coefficient. This also shows that Co-alloy powder coating is highly recommendable far the durability improvement surface coating on the surface vulnerable to frictional heat such as high speed spindles.