• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3286-3288
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• 1999

The electrostatically actuated test structure was presented to measure the micro mechanical characteristics of micromaterials as thin films forming the microactuators. The test structure was fabricated by the surface micromachining processes and driven by the electrostatic force, In order to measure the fracture toughness, the sharp notch in the test structure was introduced by the etching process. On the basis of the beam bending theory, the elastic modulus was measured by using the microcantilevr beam and the mechanical displacement, curvature and deflection curve under the electrostatic force was evaluated by using the electrostatic structure.

• 비파괴검사학회지
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• 제32권2호
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• pp.122-130
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• 2012

Adhesive bend and shear tests of micro-sized bonded component have been performed to clarify the relationship between effects of heat-treatment on the adhesive strength and the bonded specimen shape using Weibull analysis. Multiple micro-sized SU-8 columns with four different diameters were fabricated on a Si substrate under the same fabrication condition. Heat-treatment can improve both of the adhesive bend and shear strength. The improvement rate of the adhesive shear strength is much larger than that of the adhesive bend strength, because the residual stress, which must change by heat-treatment, should effect more strongly on the shear loading. In case of bend type test, the adhesive bend strength in the smaller diameters (50 and $75\;{\mu}m$) widely vary, because the critical size of the natural defect (micro-crack) should vary more widely in the smaller diameters. In contrast, in case of shear type test, the adhesive shear strengths in each diameter of the columns little vary. This suggests that the size of the natural defects may not strongly influence on the adhesive shear strength. All the result suggests that both of the adhesive bend and shear strengths should be complicatedly affected by heat-treatment and the bonded columnar diameter.

• 대한기계학회논문집A
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• 제20권2호
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• pp.481-487
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• 1996

A snapping-beam microswitch has been designed, fabricated and tested. From a design analysis, necessary and sufficient conditions for a snap-through switching fouction have been derived for a clamped shallow beam. The necessary condition has resulted in a geometric relation, in which the ratio of beam thickness to initial beam deflection plays a key role in the snapping ability. The sufficient condition for the snapping action has been obtained as a function of the inertia force due to applied acceleration, and the electrostatic force, adjustable by an inter-electrode voltage. For experimental investigations, a set of microbeams of silicon dioxide/$P^+$silicon bimorphs have been fabricated. Geometric size and mechanical behavior of each material film have been measured from on-chip test structures. Estimated and measured characteristics of the fabricated devices are compared.

• Toxicological Research
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• 제26권4호
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• pp.253-259
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• 2010

We are consistently being exposed to nanomaterials in direct and/or indirect route as they are used in almost all the sectors in our life. Nations across the worlds are now trying to put global regulation policy on nanomaterials. Sometimes, they are reported to be more toxic than the corresponding ion and micromaterials. Therefore, safety research of nanoparticles has huge implications on a national economics. In this study, we evaluated and analyzed the research trend of ecotoxicity of nanoparticles in soil environment. Test species include terrestrial plants, earthworms, and soil nematode. Soil enzyme activities were also discussed. We found that the results of nanotoxicity studies were affected by many factors such as physicochemical properties, size, dispersion method and test medium of nanoparticle, which should be considered when conducting toxicity researches. In particular, more researches on the effect of physicochemical properties and fate of nanoparticles on toxicity effect should be conducted consistently.