• Title/Summary/Keyword: Micro-sensor

Search Result 990, Processing Time 0.025 seconds

Application of selective Epitaxial Growth of Silicon on MEMS Structure (실리콘 선택적 기상 성장을 이용한 마이크로 센서에 응용되는 구조물 제조법)

  • Pak, J.Jung-Ho;Kim, Jong-Kwan;Kim, Sang-Young;Sung, Yung-Kwon
    • Proceedings of the KIEE Conference
    • /
    • 1995.07c
    • /
    • pp.1025-1027
    • /
    • 1995
  • SEG(Selective Epitaxial Growth) and ELO(Epitaxial Lateral Growth) of Silicon offer new opportunities in the fabrication of MEMS(Micro Electro-Mechanical Systems) structures. SEG of silicon enables the stacking of junctions in addition to those resulting from the standard bipolar process and this properly was utilized for the fabrication of an improved-performance color sensor. When the crystalline growth takes place through the seed windows and proceeds over the dielectric, after reaching the surface, it form an ELO silicon layer and this ELO-Si can be modified into various structures for MEMS application such as cantilevers, beams, diaphragms.

  • PDF

USN Environmental Gas Sensing System using Quad Rotor (초소형 비행체 Quad Rotor를 이용한 USN 환경 가스 센싱 시스템)

  • Lee, Byung-Seok;Lee, Joon-Hwa;Kim, Gyu-Sik;Kim, Jo-Chun
    • Proceedings of the KIEE Conference
    • /
    • 2008.04a
    • /
    • pp.45-46
    • /
    • 2008
  • There are various polluting emissions related to the air quality such as $NO_x$, $CO_2$, CO, VOCs, $O_3$, $SO_2$, $CH_4$, $H_2S$, $NH_3$, etc. We need the system that reduces emission of these environment gases and detects risk factors in modern society. Therefore, if we use the USN(Ubiquitous Sensor Network) technology and a MAV(Micro Air Vehicle) Quad Rotor which can be hovering and moving free for setting up the environment gas sensing system, the realtime measurement on environment gases is facilitated and by extension, in application of traffic watchdog, forest fire surveillance and counter-terrorism efforts, we anticipate making better use of a Quad Rotor.

  • PDF

Development of a New Precision Actuator by Bi-morph Type PZT to Realize Nano/Micro Mechanical Testing in MUTM (바이몰프형 PZT를 이용한 소형만능재료시험기용 정밀 구동 액추에이터의 개발)

  • Kweon, Hyun-Kyu;Choi, Seong-Dae;Cheong, Seon-Hwan
    • Journal of the Korean Society of Manufacturing Process Engineers
    • /
    • v.5 no.1
    • /
    • pp.45-50
    • /
    • 2006
  • This paper shows a new precision actuator of MUTM(miniature universal testing machine) for the testing of compression and tensile load on the MEMS materials and structures. The MUTM consists of a sample holder, an ultraprecision precision actuator(tranlation stage) and load sensor. The precision actuator has been developed for generating displacements with nanometer accuracy and a dynamic range of 1mm simultaneously. In this paper, it can be made by using the displacement property of bi-morph type PZT, which is able to extend the long range(stroke) according to cantilever size. However, it is not enough to be generated for compression and tensile load in miniature universal testing machine. Therefore, three dozen bi-morph type PZTs are used for generating the load. The load and displacement of the precision actuator are 35g and 0.4mm respectively.

  • PDF

Development of Meander-shaped Metallic Magnetic Calorimeters

  • Yoon, W.S.;Jang, Y.S.;Kim, G.B.;Lee, H.J.;Lee, J.Y.;Lee, M.K.;Kim, Y.H.
    • Progress in Superconductivity
    • /
    • v.14 no.2
    • /
    • pp.102-105
    • /
    • 2012
  • We are developing meander-shaped metallic magnetic calorimeters using micro-fabrication methods. A planar Nb coil in a meander shape was fabricated on a Si substrate. The coil was designed to have a persistent current using a metal heater evaporated on a part of the coil. A paramagnetic sensor, $5{\mu}m$ thick Au:Er foil, was glued on top of the meander structure with epoxy. The magnetization and heat capacity were measured at different temperatures, and applied field currents matched well with expected values. The detector showed an energy resolution of 4 keV FWHM for the 5.5 MeV alpha particles.

MEMS Pressure Sensor Technology and Industry Trends (MEMS 압력센서의 기술 및 산업동향)

  • Je, C.H.;Choi, C.A.;Lee, S.Q.;Yang, W.S.
    • Electronics and Telecommunications Trends
    • /
    • v.30 no.6
    • /
    • pp.21-30
    • /
    • 2015
  • 압력센서란 두 물체 간의 상호 작용하는 힘의 크기를 나타내는 물리적 양을 측정하는 디바이스로서 힘의 전달 크기, 힘의 방향 등을 측정하는 데 매우 광범위하게 사용되고 있는 센서이다. 사용하는 분야는 의료, 자동차, 항공, 공업계측, 가전, 환경제어분야 등의 전반적 산업제품과 산업시설에 응용되고 있으며, 측정원리는 힘의 변화에 따른 재료의 변위, 변형, 진동수, 변화, 열전도율 변화 등을 이용하는 것으로 종전의 기계식 감지방법에서 현재는 센서장치의 소형화를 위하여 반도체소자 제작기술과 Micro Electro Mechanical System(MEMS)기술을 이용하는 초소형, 저전력형 센서개발로 계속 발전하고 있다. 본고에서 멤스(MEMS) 압력센서의 최근 제품 기술 개발과 시장 및 산업동향을 알아보고 향후 더욱더 확장될 압력센서제품 기술의 기초 정보를 제공하고자 한다.

  • PDF

Practical Study about Obstacle Detecting and Collision Avoidance Algorithm for Unmanned Vehicle

  • Park, Eun-Young;Lee, Woon-Sung;Kim, Jung-Ha
    • 제어로봇시스템학회:학술대회논문집
    • /
    • 2003.10a
    • /
    • pp.487-490
    • /
    • 2003
  • In this research, we will devise an obstacle avoidance algorithm for a previously unmanned vehicle. Whole systems consist mainly of the vehicle system and the control system. The two systems are separated; this system can communicate with the vehicle system and the control system through wireless RF (Radio Frequency) modules. These modules use wireless communication. And the vehicle system is operated on PIC Micro Controller. Obstacle avoidance method for unmanned vehicle is based on the Virtual Force Field (VFF) method. An obstacle exerts repulsive forces and the lane center point applies an attractive force to the unmanned vehicle. A resultant force vector, comprising of the sum of a target directed attractive force and repulsive forces from an obstacle, is calculated for a given unmanned vehicle position. With resultant force acting on the unmanned vehicle, the vehicle's new driving direction is calculated, the vehicle makes steering adjustments, and this algorithm is repeated.

  • PDF

Improvement of gas sensing properties of carbon nanofibers based on polyacrylonitrile and pitch by steam activation

  • Kim, Jeongsik;Kim, Hyung-Il;Yun, Jumi
    • Carbon letters
    • /
    • v.24
    • /
    • pp.36-40
    • /
    • 2017
  • Polyacrylonitrile/pitch nanofibers were prepared by electrospinning as a precursor for a gas sensor material. Pitch nanofibers were properly fabricated by incorporating polyacrylonitrile as an electrospinning supplement component. Polyacrylonitrile/pitch nanofibers were activated with steam at various temperatures followed by subsequent carbonization to make carbon nanofibers with a highly conductive graphitic structure. Steam activation was effective in facilitating gas adsorption onto the carbon nanofibers due to the increased surface area. The carbon nanofibers activated at $800^{\circ}C$ had a larger surface area and a lower micro pore fraction resulting in a higher variation in electrical resistance for improved CO gas sensing properties.

System Analysis and Design for Vibration-Based Power Generation using Piezoelectric Materials (압전 재료를 이용한 진동에너지 변환 전력발생 시스템 해석 및 설계)

  • Keum, Myoung-Hun;Kim, Kyung-Ho;Lee, Seung-Yep;Ko, Byoung-Sik
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.28 no.6
    • /
    • pp.717-725
    • /
    • 2004
  • A power generation systems are proposed to convert ambient mechanical vibration into electrical energy using cantilever-type piezoelectric materials. The vibration-based power device can be used for self-powered systems without batteries. This paper presents the theoretical analysis for the coupled equations of piezoelectric and structural motions and investigates the dynamic characteristics of the self-power system using transfer function method. The theoretical model is verified by the finite element analysis of the resonance frequency, the dynamic response of the structure and the sensor sensibility. Experimental results measured using a prototype system agree with the theoretical predictions. The system is shown to produce 34.5 ㎼ in average. Finally, we perform the optimal design for system variables to maximize output power.

Development of drive and control circuit for direct LED BLU (직하형 LED BLU의 구동 및 제어회로에 관한 연구)

  • Cheon, Woo-Young;Song, Sang-Bin;Kim, Jin-Hong;Kim, Ji-Hoon
    • Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
    • /
    • 2007.11a
    • /
    • pp.119-124
    • /
    • 2007
  • 24" LCD Monitor용 LED BLU를 개발하기 위하여 1.5W R,G,G,B가 하나의 PKG에 들어있는 LED를 이용하여 Direct type의 Back Light Unit을 개발하였다. 방열 및 휘도 균일도를 고려하여 LED part를 설계, 개발 하였고 LED를 pulse로 구동하기 위하여 Switching circuit이 포함되는 구동회로 부분을 설계, 개발하였다. 또한 Color Sensor와 ICM (Integrated Color Management) IC를 사용하여 Color를 Control하는 제어회로 부분도 개발을 하였다. 제어회로 부분을 개발하기 위하여 MicroController를 사용하였으며 ICM IC와의 통신을 위한 부분도 개발하였다. 이러한 구성을 개발하여 시제품을 직접 제작하였다. 평가를 위하여 성능시험을 실시하였고 광학적인 평가도 시행하였다. 제작된 시제품은 $L558{\times}W359{\times}H30$으로 하였다. 휘도는 목표휘도를 이루었으며 균일도는 85% 이상이 되었다.

  • PDF

A Study on the Counter Program of the Radiation Detector Using 8051 Micro-controller (8051 마이크로 콘트롤러를 이용한 휴대용 방사능 측정기의 카운터 프로그램 연구)

  • Kim, Yong-Duk;Park, Se-Kwang
    • Journal of Sensor Science and Technology
    • /
    • v.6 no.3
    • /
    • pp.228-236
    • /
    • 1997
  • Radioactive materials need to control, measure and protect precisely the overflow because they are dangerous. In this paper, GM-counter type radiation detector system, that can precisely measure the quantity of radioactivity using improved counting program is designed and program that can store and transfer the counted data is studied. The manufactured system, counting system of GM-counter type radiation detector, and counter program can be utilized to measure them at various methods in an atomic power plant and research centers.

  • PDF