• 전기전자학회논문지
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• 제1권1호
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• pp.1-10
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• 1997

It is well-known that rectangular bulk-Si sensors prepared by etch or epi etch-stop micromachining technology are already in practical use today, but the conventional bulk-Si sensor shows some drawbacks such as large chip size and limited applications as silicon sensor device is to be miniaturized. We consider a circular-shape SOI(Silicon-On-Insulator) micro-cavity technology to facilitate multiple sensors on very small chip, to make device easier to package than conventional sensor like pressure sensor and to provide very high over-pressure capability. This paper demonstrates the cross-functional results for stress analyses(targeting $5{\mu}m$ deflection and 100MPa stress as maximum at various applicable pressure ranges), for finding permissible diaphragm dimension by output sensitivity, and piezoresistive sensor theory from two-type SOI structures where the double SOI structure shows the most feasible deflection and small stress at various ambient pressures. Those results can be compared with the ones of circular-shape bulk-Si based sensor$^{[17]}. The SOI micro-cavity formed the sensors is promising to integrate with calibration, gain stage and controller unit plus high current/high voltage CMOS drivers onto monolithic chip.

• 제어로봇시스템학회논문지
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• 제13권7호
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• pp.616-623
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• 2007

A dual micro gas sensor array was fabricated using nano sized $SnO_2$ thin films which had good sensitivities to CO and combustible gases, or $H_2S$ gas for air quality sensors in automobile. The already existed air quality sensor detects oxidizing gases and reducing gases, the air quality sensor(AQS), located near the fresh air inlet detected the harmful gases, the fresh air inlet door/ventilation flap was closed to reduce the amount of pollution entering the vehicle cabin through HVAC(heating, ventilating, and air conditioning) system. In this study, to make $SnO_2$ thin film AQS sensor, thin tin metal layer between 1000 and $2000{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2$, $SnO_2$(pt) and $SnO_2$(+CuO) were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2$(+Pt) and $SnO_2$(CuO) showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• International Journal of Precision Engineering and Manufacturing
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• 제9권4호
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• pp.32-38
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• 2008

This paper describes a fast tool control (FTC)-based diamond turning process for fabricating large-area high-quality micro-lens arrays. The developed FTC unit has a stroke of $48{\mu}m$ and a resonance frequency of 4.9 kHz. Micro-lens arrays were fabricated using a micro-cutting tool with a nose radius of $50{\mu}m$. The FTC unit was integrated with a force sensor so that the initial position of the micro-cutting tool with respect to the workpiece surface could be detected through monitoring the contacting force. The length and depth of the designed parabolic micro-lens profile were $190{\mu}m$ and $20{\mu}m$, respectively. A micro-lens array was fabricated on a cylinder surface over an area of ${\phi}55 mm{\times}40 mm$.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 하계종합학술대회 논문집(3)
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• pp.43-46
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• 2002

This paper is about the Micro Accelerometer Sensor that collect the human's writing patterns so as to process its signals. Finally, we pursue the accuracy of digital data about the writing pattern and hope to discuss the possibility of the Micro Accelerometer Sensor Besides, we researched the compensation of signal distortion due to tiIt and analyzed the noise error in order to improve its accuracy.

• Journal of Advanced Marine Engineering and Technology
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• 제39권5호
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• pp.522-526
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• 2015

Generally, underwater unmanned vehicle have adopted an inertial navigation system (INS), dead reckoning (DR), acoustic navigation and geophysical navigation techniques as the navigation method because GPS does not work in deep underwater environment. Even if the tactical inertial sensor can provide very detail measurement during long operation time, it is not suitable to use the tactical inertial sensor for small size and low cost UUV because the tactical inertial sensor is expensive and large. One alternative to INS is attitude heading reference system (AHRS) with the micro-machined electro mechanical system (MEMS) inertial sensor because of MEMS inertial sensor's small size and low power requirement. A cost effective and small size attitude heading reference system (AHRS) which incorporates measurements from 3-axis micro-machined electro mechanical system (MEMS) gyroscopes, accelerometers, and 3-axis magnetometers has been developed to provide a complete attitude solution for UUV. The AHRS based MEMS overcome many problems that have inhibited the adoption of inertial system for small UUV such as cost, size and power consumption. Several evaluation experiments were carried out for the validation of the developed AHRS's function and these experiments results are presented. Experiments results prove the fact that the developed MEMS AHRS satisfied the required specification.

• 대한기계학회논문집 C: 기술과 교육
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• 제5권1호
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• pp.1-6
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• 2017

센서는 특정 물질을 '감지'하는 단순한 '검출기'로부터 시작되었지만, 수십 나노미터 이하 크기의 신소재, 마이크로미터 이하 크기를 가공하는 반도체 제조공정기술과 같은 나노/마이크로 공학이 접목됨으로써 데이터 처리, 통신 등의 신호처리 기능이 내장된 초소형 스마트 센서로 발전되고 있다. 최근 단순 통화 기능에 터치 가속도 이미지 센서, 인터넷 접속, 사용자에 의한 손쉬운 '앱' 소프트웨어 추가 기능 등이 합쳐진 스마트 폰의 폭발적인 보급으로 인하여 국내외 스마트 센서 산업의 시장이 급속히 확대 중이다. 또한 무인 운전 자동차, 웨어러블 전자기기, 지능형 로봇의 보급이 향후 본격화된다면, 다양한 스마트 센서의 개발 및 산업화가 더욱 많이 필요할 것으로 예상된다.

• 한국음향학회지
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• 제34권2호
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• pp.108-116
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• 2015

수중 음향 벡터센서는 음압 뿐 아니라 음파의 진행 방향에 관한 정보를 측정할 수 있는 센서이다. 본 논문에서는 미세 외팔보를 이용한 수중 음향 벡터 센서를 구현하기 위해 음향학적 이론을 바탕으로 음향과 기계 구조물의 상호작용을 이론적으로 정립하고자 하였다. 감응 방식으로 압전 효과를 이용한 두 가지 유니모프(unimorph)형태의 모델을 제시하였으며, 제시된 모델에 대하여 압전 미세 외팔보의 거동을 집중 질량 모델을 통해 음파가 임의의 주파수와 각도를 가지고 미세 외팔보로 입사할 때 나오는 신호의 크기를 구할 수 있는 전달함수를 유도하였다. 또한 이를 바탕으로 매우 얇고 유연한 구조물로 미세 외팔보를 설계하면 매질의 입자 속도에 관한 정보를 직접적으로 측정 가능한 센서로 활용할 수 있다는 것을 확인하였다.

• 센서학회지
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• 제19권3호
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• pp.197-201
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• 2010

This paper describes the fabrication and characteristics of a NO sensor using ZnO thin film integrated 3C-SiC micro heater based on polycrystalline 3C-SiC thin film of operation in harsh environments. The sensitivity, response time, and operating properties in high temperature and voltages of NO sensors based SiC MEMS are measured and analyzed. The sensitivity of device with pure ZnO thin film at the heater operating power of 13.5 mW ($300^{\circ}C$) is 0.875 in NO gas concentration of 0.046 ppm. In the case of Pt doping, the sensitivity of at power consumption of 5.9 mW ($250^{\circ}C$) was 1.92 at same gas flow rate. The ZnO with doped Pt was showed higher sensitivity, lower working temperature and faster adsorption characteristics to NO gas than pure ZnO thin film. The NO gas sensor integrated SiC micro heater is more strength than others in high voltage and temperature environments.

• Transactions on Control, Automation and Systems Engineering
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• 제3권4호
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• pp.236-241
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• 2001

Teach pendant is the most widely used means of robot teaching at present. Despite the difficulties of using the motion command buttons on the teach pendant, it is an economical, robust, and effective device for robot teaching task. This paper presents the development of a force/moment direction sensor named COSMO that can improve the teach pendant based robot teaching. Robot teaching experiment of a six axis commercial robot using the sensor is described where operator holds the sensor with a hand, and move the robot by pushing, pulling, and twisting the sensor in the direction of the desired motion. No prior knowledge of the coordinate system is required. The function of the COSMO sensor is to detect the presence f force and moment along the principal axes of the sensor coordinate system. The transducer used in the sensor is micro-switch, and this intuitive robot teaching can be implemented at a very low cost.

• 한국산학기술학회논문지
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• 제6권4호
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• pp.325-330
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• 2005

대기중의 일산화탄소 가스 농도를 측정하기 위한 마이크로 가스센서를 MEMS 공정을 이용하여 제작하였다. $SnO_2$ 가스 감응물질을 작동온도까지 가열하기 위하여 마이크로 히터를 설치하였다. 마이크로 히터에서 발생한 열이 효율적으로 감응물질에만 전달되고 실리콘 베이스로 누설되는 것을 최소화하기 위하여 마이크로 히터와 전극을 레버형으로 만들어 다리처럼 공중에 뜨게 하였으며, 이 위에 감응물질을 올려놓았다. 마이크로 가스센서의 열전달 현상을 상용 열유동 해석 전용 프로그램인 FLUENT를 이용하여 해석하였다. 해석 결과 실리콘웨이퍼 베이스의 온도가 거의 상온에 가까워 마이크로 히터에서 발생한 열이 가스 감응물질을 효과적으로 가열하여서 가스 감응물질의 열적 고립상태를 유지하고 있는 것을 알 수 있었다. 또한 감응물질을 작동온도까지 가열하기 위하여 마이크로 히터에 가하여야 하는 전류의 양을 예측할 수 있었다.