• Journal of Sensor Science and Technology
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• v.15 no.4
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• pp.245-250
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• 2006

In this paper, glass cap wafer for MEMS device package is fabricated by using sand blaster dry etcher and Its surface is studied. The surface of dry etched glass is analyzed by using SEM, and many glass particles and micro cracks are observed. If these kind of particles were dropped from glass to the surface of device, It would make critical failure to the operation of device. So, several cleaning and etching methods are induced to remove these kinds of dormant failure mode and optimized condition is found out.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.278-279
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• 2007

본 논문에서는 메조포러스 백금 전극이 적용된 무효소 혈당센서를 실리콘 기판 위에 제작하여 향후 CMOS 회로와의 집적이 가능하도록 설계하였으며, 초소형 무효소 혈당센서 구조의 최적화를 위하여 동일한 면적에서 여러 가지 구조의 센서를 설계 및 제작을 하고 그 결과를 비교 분석하였다. 제작된 무효소 혈당센서는 3전극시스템으로 구성되고 그 특성은 작동전극과 타 전극사이의 간격에 가장 민감한 변화를 보였다. 최적화된 구조를 갖는 센서는 11.1mM glucose실험에서 12.9${\mu}A$의 응답전류를 얻었으며 이 값은 효소를 사용한 센서와 비교하여도 월등히 큰 응답임을 알 수 있었다. 또한 제작된 센서들은 구조 최적화를 위하여 $9mm^2$로 동일한 크기로 실험을 하였지만, 이 크기는 응답전류가 매우 크므로 더욱더 소형화가 가능함을 알 수 있다.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.9
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• pp.53-57
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• 2009

There are technical requirements to manufacture large size functional parts with not only simple geometries like a flat or spherical surface but also sculptured geometries. In addition, the required machining accuracy for these parts is becoming more severe. In general, the form accuracy of machined parts is determined by the relative position between workpiece and tool during machining process. To improve machining accuracy the relative position errors should be maintained within the required accuracy. This study deals with the estimation and calibration of depth of cut using the AE signal in micro-machining. Also, this sensing technique can be applied to detect the initial contact between workpiece and tool.

• Journal of the Korean Society of Mechanical Technology
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• v.13 no.4
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• pp.93-99
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• 2011

This paper presents a new type of optical silicon accelerometer using deep reactive ion etching (DRIE) and micro-stereolithography technology. Optical silicon accelerometer is based on a mass suspended by four vertical beams. A vertical shutter at the end of the mass can only moves along the sensing axis in the optical path between two single-mode optical fibers. The shutter modulates intensity of light from a laser diode reaching a photo detector. With the DRIE technique for (100) silicon, it is possible to etch a vertical shutter and beam. This ensures low sensitivity to accelerations that are not along the sensing axis. The microstructure for sensor packaging and optical fiber fixing was fabricated using micro stereolithography technology. Designed sensors are two types and each resonant frequency is about 15 kHz and 5 kHz.

• Interaction and multiscale mechanics
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• v.3 no.2
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• pp.111-121
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• 2010

Dynamic analysis of nano/micro bio-sensors based on a multiscale atomistic/continuum theory is introduced. We use a generalized atomistic finite element method (GAFEM) to analyze a bio-sensor which has $3{\times}N_a{\times}N_p$ degrees of freedom, where $N_p$ is the number of representative unit cells and $N_a$ is the number of atoms per unit cell. The stiffness matrix is derived from interatomic potential between pairs of atoms. This work contains two studies: (1) the resonance analysis of nano bio-sensors with different amount of target analyte and (2) the dependence of resonance frequency on finite element mesh. We also examine the Courant-Friedrichs-Lewy (CFL) condition based on the highest resonance frequency. The CFL condition is the criterion for the time step used in the dynamic analysis by GAFEM. Our studies can be utilized to predict the performance of micro/nano bio-sensors from atomistic perspective.

• Advances in concrete construction
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• v.15 no.2
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• pp.127-135
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• 2023

The present paper develops application of TSDT and MCST to analysis of a FG cylindrical micro-shell. The present model may be used as a sensor applicable in badminton net to detect contact. The radial and axial displacement components are described based on TSDT for more accurate analysis. The effect of small scales is accounted based on MCST. The solution is presented for a SS boundary condition to account the influence of various important parameters. A comparative analysis is presented to examine the effect of order of employed shear deformation theory on the axial and radial displacements.

• Journal of Sensor Science and Technology
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• v.32 no.4
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• pp.252-256
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• 2023

A one-step method for nanoscale patterning of silver ionic ink on a substrate is developed using a microscale, elastic mold deformation. This method yields unique micro/nanoscale metallic structures that differ from those produced using the original molds. The linewidth of these metallic structures is significantly reduced (approximately 10 times) through the sidewall deformation of the original mold cavity on a thin liquid film, as verified by finite element analysis. The process facilitates the fabrication of various, isolated and complex micro/nanoscale metallic structures with negligible residual layers at low cost and high throughput. These structures can be utilized for various applications, including optoelectronics, wearable sensors, and metaverse-related devices. Our approach offers a promising tool for manipulation and fabrication of micro/nanoscale structures of various functional materials.

• Journal of Advanced Navigation Technology
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• v.11 no.4
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• pp.408-414
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• 2007

Research advances in the areas of micro-sensor device and wireless network technology, has made it possible to develop energy efficient and low cost wireless sensor nodes. In this paper, the forward error control (FEC) scheme for lower power consumption and excellent BER(Bit Error Rate) performance during transmission propose in multi-hop wireless sensor network based on FSK modem. The FEC technique uses extra processing power related to encoding and decoding, it is need complex functions to be built into the sensor node. The probability of receiving a correct bit and codeword for relaying a frame over h nodes to the sink node is calculated as a function of channel parameter, number of hops, number of bits transmitted and the distance between the different nodes.

• Transactions on Electrical and Electronic Materials
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• v.13 no.2
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• pp.106-109
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• 2012

A low power methane gas sensor with microheater was fabricated by silicon bulk micromachining technology. In order to heat up the sensing layer to operating temperature, a platinum (Pt) micro heater was embedded in the gas sensor. The line width and gap of the microheater was 20 ${\mu}m$ and 4.5 ${\mu}m$, respectively. Zinc oxide (ZnO) nanowhisker arrays were grown on a sensor from a ZnO seed layer using a hydrothermal method. A 200 ml aqueous solution of 0.1 mol zinc nitrate hexahydrate, 0.1 mol hexamethylenetetramine, and 0.02 mol polyethylenimine was used for growing ZnO nanowhiskers. Temperature distribution of the sensor was analyzed by infrared thermal camera. The optimum temperature for highest sensitivity was found to be $250^{\circ}C$ although relatively high (64%) sensitivity was obtained even at as low a temperature as $150^{\circ}C$. The power consumption was 72 mW at $250^{\circ}C$, and only 25 mW at $150^{\circ}C$.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2519-2523
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• 2003

Ultrasonic sensors are widely used in mobile robot applications to recognize external environments, because they are cheap, easy to use, and robust under varying lighting conditions. In most cases, a single ultrasonic sensor is used to measure the distance to an object based on time-of-flight (TOF) information, whereas multiple sensors are used to recognize the shape of an object, such as a corner, plane, or edge. However, the conventional sequential driving technique involves a long measurement time. This problem can be resolved by pulse coding ultrasonic signals, which allows multi-sensors to be fired simultaneously and adjacent objects to be distinguished. Accordingly, the current presents a new simultaneous coded driving system for an ultrasonic sensor array for object recognition in autonomous mobile robots. The proposed system is designed and implemented using a DSP and FPGA. A micro-controller board is made using a DSP, Polaroid 6500 ranging modules are modified for firing the coded signals, and a 5-channel coded signal generating board is made using a FPGA. To verify the proposed method, experiments were conducted in an environment with overlapping signals, and the flight distances for each sensor were obtained from the received overlapping signals using correlations and conversion to a bipolar PCM-NRZ signal.