• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.05b
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• pp.17-20
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• 2000

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD's and micro-heaters on the Si substrate, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to $SiO_2$ layer, The MgO layer improved adhesion of Pt thin-films to $SiO_2$ layer without any chemical reactions to Pt thin-films under high annealing temperatures. In investigating output characteristics of the fabricated micro-flowsensors, the output voltages increased as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at $N_2$ flow rate of 2000 seem/min, heating power of 1.2W.

• Journal of Mechanical Science and Technology
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• v.20 no.5
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• pp.668-674
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• 2006

In order to develop a cell based robot, we present a micro-mechanical force measurement system for the biological muscle actuators, which utilize glucose as a power source. The proposed measurement system is composed of a micro-manipulator, a force transducer with a glass probe, a signal processor, an inverted microscope and video recording system. Using this measurement system, the contractile force and frequency of the cardiac myocytes were measured in real time and the magnitudes of the contractile force of each cardiac myocyte under different conditions were compared. From the quantitative experimental results, we could estimate that the force of cardiac myocytes is about $20\sim40{\mu}N$, and show that there are differences between the control cells and the micro-patterned cells.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.8
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• pp.658-662
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• 2001

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the SOI(Si-on-insulator) membrane and trench structures, in which MGO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$ layer. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 250 nV at N$_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time($\tau$:63%) was about 42 msec when input flow was step-input. The results indicated that micro-flowsensors with the SOI membrane and trench structures have properties of a high-resolution and ow consume power.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.358-361
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• 1999

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD\`s and micro-heater on the Si substrate, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to SiO$_2$ layer The MgO layer improved adhesion of Pt thin-films to SiO$_2$` layer without any chemical reactions to Pt thin-films under high as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at N2 flow rate of 2000 sccm/min, heating power of 1.2W. The respons time was about 100 msec when input flow was step-input

• Journal of Sensor Science and Technology
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• v.18 no.5
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• pp.372-376
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• 2009

This paper describes the characteristics of piezoelectric micro power generators by the ANSYS FEA(finite element analysis). The micro power generator was designed to convert ambient vibration energy to electrical power as a ZnO piezoelectric material. To find optimal model in low vibration ambient, the shape of power generator was changed with different membrane width, thickness, length, and proof mass size. Using the ANSYS modal analysis, bending mode and stress distribution of optimal model were analyzed. Moreover, the displacement with the frequency range was analyzed by harmonic analysis. From the simulation results, the resonance frequency of optimal model is about 373 Hz and investigate the possibility of ZnO micro power generator for ambient vibration applications.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.25 no.1
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• pp.24-32
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• 2015

Pulse tube-type spaceborne cryocooler is widely used to cool down the infrared sensor of observation satellites. However, such cryocooler also generates micro-vibration which is the one of main sources to seriously affect the image quality during its on-orbit operation. Therefore, to comply with the mission requirement of high resolution observation satellite, additional technical efforts have been required. In this study, we proposed a spaceborne cryocooler passive vibration isolator using SMA mesh washer, which guarantees the structural safety of both the micro-vibration disturbance source and itself under harsh launch vibration loads without an additional holding mechanism and the micro-vibration isolation performance on orbit environment. To verify the micro-vibration isolation performance of the proposed vibration isolator, we performed the micro-vibration isolation measurement test using the dedicated micro-vibration measurement device proposed in this study.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1084-1087
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• 1997

In this paper, we developed the micro NCT system for punching the thin plates, which is driven is driven by the standalone type microprocessor. In order to adjust the alignment between the punch and die in-situ punching procedures, the non-contact type laser sensor for measuring the burr and micro-driving system for punching die with using the differential screw are developed. The height of burr in four directions in the punched hole of test specimen are measured, and the measured data are transferred to the personal computer by RS232C serial communication technology. In the personal computer, by using the graphic user interface type monitoring program and data handling procedures which includes the filtering algorithms, the direction and length of movement of the die position is decided and these data are transferred back to the microprocessor. The microprocessor drives the micro positioning stage based on these data. Even if this method is not a perfect solution for the in-situ alignment in micro punching, but this alignment methodology is accomplished in the same stage just after the punching that we hope to solve the alignment problem in the punching system based on this technology.

• Journal of Information Technology Services
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• v.8 no.2
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• pp.147-156
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• 2009

As the result of the rapid development of IT technology, an on-line diagnostic system using the field bus communication network coupled with a smart sensor module will be widely used at the nuclear power plant in the near future. The smart sensor system is very useful for the prompt understanding of abnormal state of the key equipments installed in the nuclear power plant. In this paper, it is assumed that a smart sensor system based on the fieldbus communication network for the surveillance and diagnostics of safety-critical equipments will be installed in the harsh-environment of the nuclear power plant. It means that the key components of fieldbus communication system including microprocessor, FPGA, and ASIC devices, are to be installed in the RPV (reactor pressure vessel) and the RCS (reactor coolant system) area, which is the area of a high dose-rate gamma irradiation fields. Gamma radiation constraints for the DBA (design basis accident) qualification of the RTD sensor installed in the harsh environment of nuclear power plant, are typically on the order of 4 kGy/h. In order to use a field bus communication network as an ad-hoc diagnostics sensor network in the vicinity of the RCS pump area of the nuclear power plant, the robust survivability of IT-based micro-electronic components in such intense gamma-radiation fields therefore should be verified. An intelligent CCD camera system, which are composed of advanced micro-electronics devices based on IT technology, have been gamma irradiated at the dose rate of about 4.2kGy/h during an hour UP to a total dose of 4kGy. The degradation performance of the gamma irradiated CCD camera system is explained.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.6 no.2
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• pp.315-322
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• 2002

A thin film oxide semiconductor micro gas sensor array which shows only 60㎽ of power consumption at an operating temperature of 30$0^{\circ}C$ has been fabricated using microfabrication and rnicrornachining techniques. Excellent thermal insulation of the membrane is achieved by the use of a double la! or structure of 0.1${\mu}{\textrm}{m}$ thick Si$_3$N$_4$ and 1${\mu}{\textrm}{m}$ thick phosphosilicate glass(PSG) prepared by low pressure chemical vapor deposition(LPCVD) and atmospheric－pressure chemical-vapor deposition(APCVD), respectively. The sensor way consists of such thin film oxide semiconductor sensing materials as 1wt.％ Pd-doped SnO$_2$, 6wt.% AI$_2$O$_3$-doped ZnO, WO$_3$ and ZnO. The thin film oxide semiconductor micro gas sensor array exhibited resistance changes usable for subsequent data processing upon exposure to various gases and the sensitivity strongly depended on the sensing layer materials. Heater Part of the sensor structure has been modified in order to improve the process yield of the sensor, and as a result of modified heater structure improved process yield has been achieved.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.46 no.3
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• pp.22-30
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• 2009

GPS and INS integrated systems are expected to become commonly available as a result of low cost Micro-Electro-Mechanical Sensor (MEMS) technology. However, the current performance achieved by low cost sensors is still relatively poor due to the large inertial sensor errors. This is particularly prevalent in the urban environment where there are significant periods of restricted sky view. To reduce the inertial sensor error, GPS and low cost INS are integrated using a Loosely Coupled Kalman Filter architecture which is appropriate in most applications where there is good satellite availability. In this paper, we present the GPS/INS sensor Integration using Loosely Coupled Kalman Filter approach. We also compare the simulation results of Wander Azimuth Strapdown Mechanization Scheme with the reference values generated by the ZH35C trajectory simulator that is describe mathematically either by the geometry of the path, or as the position of the object over time.