• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 합동 추계학술대회 논문집 정보 및 제어부문
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• pp.329-332
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• 2002

Recently, most machineries have been small size and mobile type. Then the motors used in this field are developed in micro size such as about 2mm in diameter. The structure of this motor is similar to a general brushless DC motor but because of small sige there is no position sensor such as hall sensor. In this paper, we propose synchronous driving and control method for micro brushless DC motor without position sensor. We design and manufacture this controller and perform experiment to show the effectiveness of the proposed method.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 B
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• pp.1444-1446
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• 2005

Recently most machineries have been small size and mobile type. And human body insertion type endoscope and micro robot technology has been developed. Then the motors used in this field are developed in micro size such as about 2mm in diameter. The structure of this motor is similar to a general brushless DC(BLDC) motor but because of small size there is no position sensor such as hall sensor. In this paper, a design and fabrication result of an ultra-small brushless DC motor is presented. This motor is designed to 3-phase coreless winding and operated with sensor-less type driver. Test results confirmed the feasibility of the proposed motor drive system design.

• 한국항행학회논문지
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• 제14권6호
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• pp.984-989
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• 2010

본 논문에서는 초소형 정밀 마이크로 흐름센서를 설계하기 위해 Java 멀티스레드를 이용한 병렬 프로그래밍 기법을 도입하여 센서 모듈의 성능 분석과 개선이 가능한 병렬처리형 설계 툴을 개발하였다. 연산에 따른 기본 성능을 측정하기 위하여 열운송 방정식에 지배되는 포텐셜 문제를 두 개의 실험모델로 나누어 실험을 수행하였다. 시뮬레이션 결과 네트워크 PC의 수를 증가시키면 이와 비례하는 속도향상 특성이 나타났다. 따라서 본 연구에서 제안하는 병렬화 방안은 대규모 연산모델에도 적용 가능함을 확인하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.950-952
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• 2003

This paper have been studied fabrication and characteristics of disposable pH sensor using MEMS technology. The sensor has two open-well structure, the container for the internal electrolyte and electrode were formed by anisotropically etching a silicon substrate. unlike currently used KCI saturated solution, the structure was introduced hydrogel which take an advantage of miniaturization, bulk product, a low price. PU and CA/TP used to measurement ion detection, one is reference membrane and the other is pH. fabricated sensor is encapsulated entirely with epoxy, finally sensor was estimated various ion sorts and pH ranges.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.274-274
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• 2008

This paper describes on the fabrication and characteristics of a 3C-SiC (Silicon Carbide) micro pressure sensor for harsh environment applications. The implemented micro pressure sensor used 3C-SiC thin-films heteroepitaxially grown on SOI (Si-on-insulator) structures. This sensor takes advantages of the good mechanical properties of Si as diaphragms fabricated by D-RIE technology and temperature properties of 3C-SiC piezoresistors. The fabricated pressure sensors were tasted at temperature up to $250^{\circ}C$ and indicated a sensitivity of 0.46 mV/V*bar at room temperature and 0.28 mV/V*bar at $250^{\circ}C$. The fabricated 3C-SiC/SOI pressure sensor presents a high-sensitivity and excellent temperature stability.

• 대한기계학회논문집A
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• 제32권9호
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• pp.728-732
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• 2008

This paper presents ion-based micro vibration sensor for the ultra-high frequency vibration detection. Presented sensor uses the motion of anion and cation in an electrolyte. Electrolyte vibration sensors have the high shock survival characteristics and a simple read-out circuit because of the small mass and own charges of ions. Presented sensor measures the induced electric potential by the mechanical-electrical coupling. It consist of electrolyte chamber and detection electrode. Electrolyte chamber was fabricated by PDMS molding. Detection electrode was made of gold evaporation on pyrex glass. Size of electrolyte chamber was designed as $600{\times}600{\times}100um$. Detection electrode had 200nm-thick and 42um-gap. In the experimental study, 5.8M sodium Chloride (NaCl) solution was used as electrolyte in 36nl-chamber. Mechanical vibration was measured from 2kHz to 4MHz.

• Smart Structures and Systems
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• 제1권1호
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• pp.63-82
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• 2005

This paper introduces a technology for robust and low maintenance cost sensor network capable to detect accelerations below a micro-g in a wide frequency bandwidth (above 1,000 Hz). Sensor networks with such performance are critical for navigation, seismology, acoustic sensing, and for the health monitoring of civil structures. The approach is based on the fabrication of an array of high sensitivity accelerometers, each utilizing Fabry-Perot cavity with wavelength-dependent reflectivity to allow embedded optical detection and serialization. The unique feature of the approach is that no local power source is required for each individual sensor. Instead one global light source is used, providing an input optical signal which propagates through an optical fiber network from sensor-to-sensor. The information from each sensor is embedded onto the transmitted light as an intrinsic wavelength division multiplexed signal. This optical "rainbow" of data is then assessed providing real-time sensing information from each sensor node in the network. This paper introduces the Fabry-Perot based accelerometer and examines its critical features, including the effects of imperfections and resolution estimates. It then presents serialization techniques for the creation of systems of arrayed sensors and examines the effects of serialization on sensor response. Finally, a fabrication process is proposed to create test structures for the critical components of the device, which are dynamically characterized.

• 센서학회지
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• 제20권6호
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• pp.363-367
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• 2011

This paper proposes a highly-sensitive gas flow sensor with a simple structure. The sensor is composed of a micro-heater for heating the gas medium and a pair of temperature sensors for detecting temperature differences due to gas flow in a sealed chamber on one axis. Operation of the gas flow sensor depends on the transfer of heat through the air medium. The proposed gas flow sensor has the capability to measure gas flow rates <5 $cm^3$/min with a resolution of approximately 0.01 $cm^3$/min. Furthermore, this paper reports some additional experiment results, including the sensitivity of the proposed gas flow sensor as a function of operating current and the flow of different types of gas(oxygen, carbon dioxide, and nitrogen). The fabrication process of the proposed sensor is very simple, making it a good candidate for mass production.

• 대한전자공학회논문지SD
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• 제40권12호
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• pp.17-23
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• 2003

서로 다른 동작온도를 가지는 12개의 감지막으로 구성된 고집적형 센서어레이(다이아프램의 크기가 3×5㎟가 설계되고 열동작의 관점에서 최적화되었다. 이 센서어레이는 에칭된 실리콘기판과 접합된 얇은 유리기판 위의 중앙에 하나의 히터가 위치하고 양쪽에 동작온도가 다른 감지박막이 위치하도록 설계됨으로써 개별 마이크로센서 보다 동시에 훨씬 많은 정보를 얻을 수 있는 장점을 가지고 있다. 제안된 마이크로센서 어레이는 다이아프램의 중앙에 하나의 히터만을 가지는 구조를 하고 있기 때문에 고집적 어레이구조를 실현하면서도, 히터를 중심으로 감지박막의 동작온도에 따라 다양한 감지특정을 얻을 수 있다. 또 히터 양쪽의 감지박막의 종류를 다르게 함으로써 다이아프램위의 전 감지막이 모두 다른 감지특성을 가지게 되어 고집적 센서어레이를 구현하기 용이한 구조로 밝혀졌다.

• 제어로봇시스템학회논문지
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• 제19권3호
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• pp.219-226
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• 2013

A distortion correction technique is presented to enhance the 3D scanning performance of a micro-size camera-projector system. Recently, several types of micro-size digital projectors and cameras are available. However, there have been few effort to develop a micro-size 3D scanning system. We develop a micro-sized 3D scanning system which is based on the structured light technique. Three images of phase-shifted sinusoidal patterns are projected, captured, and analyzed by the system to reconstruct 3D shapes of very small objects. To overcome inherent optical imperfection of the micro 3D sensor, we correct the vignetting and blooming effects which cause distortions in the phase image. Error analysis and 3D scanning results on small real objects are presented to show the performance of the developed 3D scanning system.