• 한국생산제조학회지
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• 제20권1호
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• pp.101-107
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• 2011

Analytical solution of micro-scale milling process is presented in order to suggest available machining conditions. The size effect should be considered to determine cutting characteristics in micro-scale cutting. The feed per tooth is the most dominant cutting parameter related to the size effect in micro-scale milling process. In order to determine the feed per tooth at which chips can be formed, the finite element method is used. The finite element method is employed by utilizing the Johnson-Cook (JC) model as a constitutive model of work material flow stress. Machining experiments are performed to validate the simulation results by using a micro-machining stage. The validation is conducted by observing cutting force signals from a cutting tool and the conditions of the machined surface of the workpiece.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.278-281
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• 2005

Today, manufacturing capability at the micro or nano scale production field is requested strongly in view of parts and product miniaturization. Miniaturized parts and products will introduce lots of benefits in terms of high precision functionality and low energy consumption. This paper presents the results of micro milling machine tool development for micro machining process. Finite element analysis has been performed to know the relationship between design dimensional variables and structural stiffness in terms of static, dynamic, thermal aspects. Performance evaluation through machining has been tested and discussed for achievable machining characteristics.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.627-628
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• 2006

High speed milling process is emerging as an important fabrication process benefits include the ability to fabricate micro and meso-scale parts out of a greater range of materials and with more varied geometry. It also enables the creation of micro and meso-scale molds for injection molding. Factors affecting surface roughness have not been studied in depth for this process. A series of experiments has been conducted in order to begin to characterize the factors affecting surface roughness and determine the range of attainable surface roughness values for the high speed milling process. It has previously been shown that run-out creates a greater problem for the dimensional accuracy of pans created by high speed milling process. And run-out also has a more significant effect on the surface quality of milled parts. The surface roughness traces reveal large peak to valley variations. This run-out is generated by spindle dynamics and tool geometry. In order to investigate the relationship between tool alignment errors and surface roughness the scallop generating mechanism in the ball-end milling with tool alignement errors has been studied and simulated. The results indicate that tool alignment errors have no significant effects ell the dimension of scallops in for flat planes.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1793-1797
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• 2003

After the micro turning lathe was developed in the last year by AMR Laboratory in Yeungnam university, a micromilling machine is developed for micro/meso machining. This machine is integrated with PZT-driven micro-sliders, micro-linear encoders, aerostatic spindle which has maximum 150,000 rpm. It is applicable to milling and drilling of micro scale. This paper presents the possibility of micro/meso machining and characteristics of micro end milling process by using micro machine. A machining of micro parts using 0.2 mm flat end mill was achieved by micro-milling machine. Experimental results show the machining capability and positional accuracy of this machine is good enough for machining micro parts.

• 한국기계가공학회지
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• 제8권1호
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• pp.31-36
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• 2009

Micro-machining technology has been adopted for shape accuracy of micrometer and sub-micrometer scale, surface roughness of tens nanometer in industries. In micro-machining process the quality of machined surface is derived from machining condition and tooling. This paper investigates AE(acoustic emission) and cutting force signals according to machined surface quality related to machining condition. Machined surface quality was analyzed by the AE and cutting force parameter which reflect surface morphology. The characteristics of signal were extracted for process optimization by monitoring both the tool condition and the machined surface texture in micro end milling process.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.482-486
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• 2004

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies, such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper presents that the recent development and our research goals in FIB nano machining technology are given. The emphasis will be on direct milling, or chemical vapor deposition techniques (CVD), and this can distinguish the FIB technology from the contemporary photolithography process and provide a vital alternative to it. After an introduction to the technology and its FIB principles, the recent developments in using milling or deposition techniques for making various high-quality devices and high-precision components at the micro/nano meter scale are examined and discussed. Finally, conclusions are presented to summarize the recent work and to suggest the areas for improving the FIB milling technology and for studying our future research.

• Design & Manufacturing
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• 제14권2호
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• pp.56-61
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• 2020

Recently, research for machining next-generation micro semiconductor processes and micro patterns has been actively conducted. In particular, it is applied to various industrial fields depending on the machining method in the case of FIB (Focused ion beam) milling. In this study, intends to deal with FIB milling machining technology for ultra-precision diamond tool fabrication technology. Ultra-precision diamond tools require nano-scale precision, and FIB milling is a useful method for nano-scale precision machining. However, FIB milling has a problem of Gaussian characteristics that are differently formed according to the beam current due to the input of an ion beam source, and there are process conditions to be considered, such as a side clearance angle problem of a diamond tool that is differently formed according to the tilting angle. A series of process steps for fabrication a ultra-precision diamond tool were studied and analyzed for each process. It was confirmed that the effect on the fabrication process was large depending on the spot size of the beam and the current of the beam as a result of the experimental analysis.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1171-1174
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• 2005

Manufacturing capability at the micro or nano scale production field is requested strongly in view of parts and product miniaturization. Miniaturized parts and products will introduce lots of benefits in terms of high precision functionality and low energy consumption. This paper presents the results of micro milling machine tool development for micro machining process. Finite element analysis has been performed to know the relationship between design dimensional variables and structural stiffness in terms of static, dynamic, thermal aspects. Performance evaluation through machining has been tested and discussed for achievable machining characteristics.

• 대한기계학회논문집A
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• 제34권10호
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• pp.1493-1498
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• 2010

본 논문에서는 압축냉각공기, MQL 및 $MoS_2$ 나노유체 MQL 을 적용한 메소스케일 밀링의 가공 특성에 관한 실험적 연구를 수행하였다. 마이크로/메소 밀링 가공 실험 수행을 위하여 BLDC 스핀들과 DC 모터슬라이드를 장착한 데스크톱 크기의 3 자유도 메소 스케일 기계가공 시스템을 구현하였고, 가공 시편의 표면거칠기 측정 및 분석을 통해 가공성능 평가를 수행하였다. 실험을 통해 압축냉각공기, MQL 및 $MoS_2$ 나노유체 MQL 을 사용한 경우 건식가공에 비하여 표면거칠기가 향상되는 것을 발견하였으며 특히 $MoS_2$ 나노유체 MQL 과 압축냉각공기를 동시에 적용하였을 경우의 가공 표면거칠기가 가장 우수함을 확인하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.199-202
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• 2005

High speed milling process is emerging as an important fabrication process benefits include the ability to fabricate micro and meso-scale parts out of a greater range of materials and with more varied geometry. It also enables the creation of micro and meso-scale molds for injection molding. Factors affecting surface roughness have not been studied in depth for this process. A series of experiments has been conducted in order to begin to characterize the factors affecting surface roughness and determine the range of attainable surface roughness values for the high speed milling process. It has previously been shown that run-out creates a greater problem for the dimensional accuracy of parts created by high speed milling process. And run-out also has a more significant effect on the surface quality of milled parts. The surface roughness traces reveal large peak to valley variations. This run-out is generated by spindle dynamics and tool geometry. In order to investigate the relationship between tool setting errors and surface roughness end tilted mills were used to cut aluminum samples. The results indicate that tool setting errors have significant effects on surface roughness and cutting forces.