• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.1
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• pp.101-107
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• 2011

Analytical solution of micro-scale milling process is presented in order to suggest available machining conditions. The size effect should be considered to determine cutting characteristics in micro-scale cutting. The feed per tooth is the most dominant cutting parameter related to the size effect in micro-scale milling process. In order to determine the feed per tooth at which chips can be formed, the finite element method is used. The finite element method is employed by utilizing the Johnson-Cook (JC) model as a constitutive model of work material flow stress. Machining experiments are performed to validate the simulation results by using a micro-machining stage. The validation is conducted by observing cutting force signals from a cutting tool and the conditions of the machined surface of the workpiece.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.278-281
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• 2005

Today, manufacturing capability at the micro or nano scale production field is requested strongly in view of parts and product miniaturization. Miniaturized parts and products will introduce lots of benefits in terms of high precision functionality and low energy consumption. This paper presents the results of micro milling machine tool development for micro machining process. Finite element analysis has been performed to know the relationship between design dimensional variables and structural stiffness in terms of static, dynamic, thermal aspects. Performance evaluation through machining has been tested and discussed for achievable machining characteristics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.627-628
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• 2006

High speed milling process is emerging as an important fabrication process benefits include the ability to fabricate micro and meso-scale parts out of a greater range of materials and with more varied geometry. It also enables the creation of micro and meso-scale molds for injection molding. Factors affecting surface roughness have not been studied in depth for this process. A series of experiments has been conducted in order to begin to characterize the factors affecting surface roughness and determine the range of attainable surface roughness values for the high speed milling process. It has previously been shown that run-out creates a greater problem for the dimensional accuracy of pans created by high speed milling process. And run-out also has a more significant effect on the surface quality of milled parts. The surface roughness traces reveal large peak to valley variations. This run-out is generated by spindle dynamics and tool geometry. In order to investigate the relationship between tool alignment errors and surface roughness the scallop generating mechanism in the ball-end milling with tool alignement errors has been studied and simulated. The results indicate that tool alignment errors have no significant effects ell the dimension of scallops in for flat planes.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1793-1797
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• 2003

After the micro turning lathe was developed in the last year by AMR Laboratory in Yeungnam university, a micromilling machine is developed for micro/meso machining. This machine is integrated with PZT-driven micro-sliders, micro-linear encoders, aerostatic spindle which has maximum 150,000 rpm. It is applicable to milling and drilling of micro scale. This paper presents the possibility of micro/meso machining and characteristics of micro end milling process by using micro machine. A machining of micro parts using 0.2 mm flat end mill was achieved by micro-milling machine. Experimental results show the machining capability and positional accuracy of this machine is good enough for machining micro parts.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.8 no.1
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• pp.31-36
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• 2009

Micro-machining technology has been adopted for shape accuracy of micrometer and sub-micrometer scale, surface roughness of tens nanometer in industries. In micro-machining process the quality of machined surface is derived from machining condition and tooling. This paper investigates AE(acoustic emission) and cutting force signals according to machined surface quality related to machining condition. Machined surface quality was analyzed by the AE and cutting force parameter which reflect surface morphology. The characteristics of signal were extracted for process optimization by monitoring both the tool condition and the machined surface texture in micro end milling process.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.482-486
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• 2004

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies, such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper presents that the recent development and our research goals in FIB nano machining technology are given. The emphasis will be on direct milling, or chemical vapor deposition techniques (CVD), and this can distinguish the FIB technology from the contemporary photolithography process and provide a vital alternative to it. After an introduction to the technology and its FIB principles, the recent developments in using milling or deposition techniques for making various high-quality devices and high-precision components at the micro/nano meter scale are examined and discussed. Finally, conclusions are presented to summarize the recent work and to suggest the areas for improving the FIB milling technology and for studying our future research.

• Design & Manufacturing
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• v.14 no.2
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• pp.56-61
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• 2020

Recently, research for machining next-generation micro semiconductor processes and micro patterns has been actively conducted. In particular, it is applied to various industrial fields depending on the machining method in the case of FIB (Focused ion beam) milling. In this study, intends to deal with FIB milling machining technology for ultra-precision diamond tool fabrication technology. Ultra-precision diamond tools require nano-scale precision, and FIB milling is a useful method for nano-scale precision machining. However, FIB milling has a problem of Gaussian characteristics that are differently formed according to the beam current due to the input of an ion beam source, and there are process conditions to be considered, such as a side clearance angle problem of a diamond tool that is differently formed according to the tilting angle. A series of process steps for fabrication a ultra-precision diamond tool were studied and analyzed for each process. It was confirmed that the effect on the fabrication process was large depending on the spot size of the beam and the current of the beam as a result of the experimental analysis.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1171-1174
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• 2005

Manufacturing capability at the micro or nano scale production field is requested strongly in view of parts and product miniaturization. Miniaturized parts and products will introduce lots of benefits in terms of high precision functionality and low energy consumption. This paper presents the results of micro milling machine tool development for micro machining process. Finite element analysis has been performed to know the relationship between design dimensional variables and structural stiffness in terms of static, dynamic, thermal aspects. Performance evaluation through machining has been tested and discussed for achievable machining characteristics.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.10
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• pp.1493-1498
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• 2010

This paper present the characteristics of micro- and meso-scale milling processes in which compressed cold air, minimum quantity lubrication (MQL) and $MoS_2$ nanofluid MQL are used. For process characterization, the microand meso-scale milling experiments are conducted using desktop meso-scale machine tool system and the surface roughness is measured. The experimental results show that the use of compressed chilly air and nanofluid MQL in the micro- and meso-scale milling processes is effective in improving the surface finish.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.199-202
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• 2005

High speed milling process is emerging as an important fabrication process benefits include the ability to fabricate micro and meso-scale parts out of a greater range of materials and with more varied geometry. It also enables the creation of micro and meso-scale molds for injection molding. Factors affecting surface roughness have not been studied in depth for this process. A series of experiments has been conducted in order to begin to characterize the factors affecting surface roughness and determine the range of attainable surface roughness values for the high speed milling process. It has previously been shown that run-out creates a greater problem for the dimensional accuracy of parts created by high speed milling process. And run-out also has a more significant effect on the surface quality of milled parts. The surface roughness traces reveal large peak to valley variations. This run-out is generated by spindle dynamics and tool geometry. In order to investigate the relationship between tool setting errors and surface roughness end tilted mills were used to cut aluminum samples. The results indicate that tool setting errors have significant effects on surface roughness and cutting forces.