• Title/Summary/Keyword: Micro-mold method

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4 Inch Wafer-Scale Replicability Enhancement in Hot Embossing by using PDMS-Cushioned Si Mold (PDMS 쿠션을 갖는 Si 몰드에 의한 핫엠보싱 공정에서의 4 인치 웨이퍼 스케일 전사성 향상)

  • Kim Heung-Kyu;Ko Young-Bae;Kang Jeong-Jin;Heo Young-Moo
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.8 s.185
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    • pp.178-184
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    • 2006
  • Hot embossing is to fabricate desired pattern on the polymer substrate by pressing the patterned mold against the substrate which is heated above the glass transition temperature, and it is a high throughput fabrication method for bio chip, optical microstructure, etc. due to the simultaneous large area patterning. However, the bad pattern fidelity in large area patterning is one of the obstacles to applying the hot embossing technology for mass production. In the present study, PDMS pad was used as a cushion on the backside of the micro-patterned 4 inch Si mold to improve the pattern fidelity over the 4 inch PMMA sheet by increasing the conformal contact between the Si mold and the PMMA sheet. The pattern replicability improvement over 4 inch wafer scale was evaluated by comparing the replicated pattern height and depth for PDMS-cushioned Si mold against the rigid Si mold without PDMS cushion.

A Study on Compensation for tool deformation machining errors in micro end-milling (마이크로 엔드밀링에서 공구변형 가공오차 보상에 관한 연구)

  • Jong-In Son;Byeong-Uk Song
    • Design & Manufacturing
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    • v.17 no.4
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    • pp.24-32
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    • 2023
  • In this study, we introduce research aimed at minimizing machining errors without compromising productivity by compensating for the machining errors caused by tool deformation. Our approach experimentally establishes the direct correlation between cutting depth and machining error, and creates predictive models using mathematical functions. This method allows for the prediction of compensated cutting depths to obtain the desired cutting profiles, thereby maximizing the compensation of machining errors in the cutting process.

Comparison of Micro Trench Machining Characteristics with Nonferrous Metal and Polymer using Single Diamond Cutting Tool (단결정 다이아몬드 공구에 의한 비철금속과 폴리머 소재의 마이크로 트렌치 가공특성 비교)

  • Choi, Hwan-Jin;Jeon, Eun-Chae;Choi, Doo-Sun;Je, Tae-Jin;Kang, Myung-Chang
    • Journal of Powder Materials
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    • v.20 no.5
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    • pp.355-358
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    • 2013
  • Micro trench structures are applied in gratings, security films, wave guides, and micro fluidics. These micro trench structures have commonly been fabricated by micro electro mechanical system (MEMS) process. However, if the micro trench structures are machined using a diamond tool on large area plate, the resulting process is the most effective manufacturing method for products with high quality surfaces and outstanding optical characteristics. A nonferrous metal has been used as a workpiece; recently, and hybrid materials, including polymer materials, have been applied to mold for display fields. Thus, the machining characteristics of polymer materials should be analyzed. In this study, machining characteristics were compared between nonferrous metals and polymer materials using single crystal diamond (SCD) tools; the use of such materials is increasing in machining applications. The experiment was conducted using a square type diamond tool and a shaper machine tool with cutting depths of 2, 4, 6 and 10 ${\mu}m$ and a cutting speed of 200 mm/s. The machined surfaces, chip, and cutting force were compared through the experiment.

Capillary-driven Rigiflex Lithography for Fabricating High Aspect-Ratio Polymer Nanostructures (모세관 리소그라피를 이용한 고종횡비 나노구조 형성법)

  • Jeong, Hoon-Eui;Lee, Sung-Hoon;Kim, Pil-Nam;Suh, Kahp-Y.
    • Journal of the Korean Society of Visualization
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    • v.5 no.1
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    • pp.3-8
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    • 2007
  • We present simple methods for fabricating high aspect-ratio polymer nanostructures on a solid substrate by rigiflex lithography with tailored capillarity and adhesive force. In the first method, a thin, thermoplastic polymer film was prepared by spin coating on a substrate and the temperature was raised above the polymer's glass transition temperature ($T_g$) while in conformal contact with a poly(urethane acrylate) (PUA) mold having nano-cavities. Consequently, capillarity forces the polymer film to rise into the void space of the mold, resulting in nanostructures with an aspect ratio of ${\sim}4$. In the second method, very high aspect-ratio (>20) nanohairs were fabricated by elongating the pre-formed nanostructures upon removal of the mold with the aid of tailored capillarity and adhesive force at the mold/polymer interface. Finally, these two methods were further used to fabricate micro/nano hierarchical structures by sequential application of the molding process for mimicking nature's functional surfaces such as a lotus leaf and gecko foot hairs.

The Application of DLC(diamond-like carbon) Film for Plastic Injection Mold by Hybrid Method of RF Sputtering and Ion Source (RF 스퍼터링과 이온소스 복합방식에 의한 플라스틱사출금형(SKD11)의 DLC막 응용)

  • Kim, Mi-Seon;Hong, Sung-Pill
    • Journal of the Korean institute of surface engineering
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    • v.42 no.4
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    • pp.173-178
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    • 2009
  • DLC film was synthesized on plastic injection mold(SKD11, $30\;mm\;{\times}\;19\;mm\;{\times}\;0.5\;mm$) and Si(100) wafer for 2 h at $130^{\circ}C$ under 6 mTorr using hybrid method of rf sputtering and ion source. The obtained film was analysed by Raman spectroscopy, AFM, TEM, Nano indenter and scratch tester, etc. The film was defined as an amorphous phase. In the Raman spectrum, broad peak of $sp^2$-bonded carbon attributed to graphite at $1550\;cm^{-1}$ were observed, and the ratio of ID($sp^3$ diamond intensity)/IG($sp^2$ graphite intensity) was approximately 0.54. The adhesion of DLC film was more than 80 N with scratch tester when $0.2\;{\mu}m$ thickness Cr was coated as interlayer. The micro-hardness was distributed at 35~37 GPa. The friction coefficient was 0.02~0.07, and surface roughness(Ra) was 0.34~1.64 nm. The lifetime of DLC coated plastic injection mold using as a connector part in computer was more than 2 times of non-coated mold.

The Optimization of Injection Molding System Using Axiomatic Approach (공리적 개념을 적용한 사출성형 시스템의 최적설계)

  • Kim, Jong-Hun;Lee, Jong-Soo;Cha, Sung-Woon
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.6
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    • pp.1020-1027
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    • 2003
  • A traditional mold design has been conducted by an experience-based trial and error, whereby the mold designer would decide the gate locations and processing conditions based on the caring characteristics and its functional requirements. The paper suggests an optimal gate location and processing conditions in the injection molding using a global search method referred to as micro genetic algorithm( ${\mu}$ GA). ${\mu}$ GA yields the optimal solution with a small size of population without respect to design variables for saving time that is needed to calculate the fitness of many individuals. Due to the reason, the paper uses a commercial analysis package of injection molding(CAPA) to analysis a state of flux. In addition to that, axiomatic approach .is applied in the beginning of design. It is a useful method to draw a well-organized and reasonable idea to handle a problem.

The excimer laser ablation of PET for nickel electroforming (니켈 전주도금을 위한 PET의 엑시머 레이저 어블레이션)

  • Shin, Dong-Sik;Lee, Je-Hoon;Seo, Jung;Kim, Do-Hoon
    • Laser Solutions
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    • v.6 no.2
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    • pp.35-41
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    • 2003
  • In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation by excimer laser radiation could be used successfully to make 3-D microstructure of PET. The mechanism for ablative decomposition of PET with KrF excimer laser(λ: 248nm, pulse duration: 5ns) was explained by photochemical process. And this process showed PET to be adopted in polymer master for nickel mold insert. Nickel electroforming by using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

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Machining condition monitoring for micro-grooving on mold steel using fuzzy clustering method (퍼지 클러스터링을 이용한 금형강에 미세 그루브 가공시 가공상태 모니터링)

  • 이은상;곽철훈;김남훈
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.11
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    • pp.47-54
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    • 2003
  • Research during the past several years has established the effectiveness of acoustic emission (AE)-based sensing methodologies for machine condition analysis and process. AE has been proposed and evaluated for a variety of sensing tasks as well as for use as a technique for quantitative studies of manufacturing process. STD11 has been known as difficult-to-cut materials. The micro-grooving machine was developed for this study and the experiments were performed using CBN blade for machining STD11. Evaluating the machining conditions, frequency spectrum analysis of acoustic emission (AE) signals according to each conditions were applied. Fuzzy clustering method for associating the preprocessor outputs with the appropriate decisions was followed by frequency spectrum analysis. FFT is used to decompose AE signal into different frequency bands in time domain, the root mean square (RMS) values extracted from the decomposed signal of each frequency band were used as features.