• Title/Summary/Keyword: Micro-mirror

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Extraction of Factors Effecting Surface Roughness Using the System of Experiments in the Ultra-precision Mirror Surface Finishing (실험 계획법을 이용한 초정밀 경면 연마 가공에서 표면 거칠기에 영향을 미치는 인자의 검출)

  • 배명일;김홍배;김기수;남궁석
    • Journal of the Korean Society for Precision Engineering
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    • v.15 no.2
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    • pp.53-60
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    • 1998
  • In this study, it is experimented to find factors effecting surface roughness using the system of experiments. in the mirror surface finishing system. (1) The film feed and oscillation frequency in $40{\mu}m$ abrasive film, grinding speed in $30{\mu}m$, and machining time in $15{\mu}m$15 are the main factors effecting the surface roughness. (2) Applying the optimal finishing condition to $40{\mu}m$, $30{\mu}m$, $15{\mu}m$ abrasive finishing film in sequence, it is possible to obtian about Ra 10 nm surface roughness on SM45C workpiece. (3) Application of the system of experments to the micro abrasive grain film finishing was very effective method in the extraction of main factor and optimal condition.

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Ultra Precision Machining Technique for Optical System Parts (초정밀 가공기를 활용한 광학계 부품 가공기술)

  • Yang, Sun-Choel;Kim, Sang-Hyuk;Huh, Myung-Sang;Chang, Ki-Soo;Park, Soon-Sub;Won, Jong-Ho;Kim, Geon-Hee
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.11 no.2
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    • pp.13-19
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    • 2012
  • Ultra Precision Machining Techniques, such as manufacturing Micro Lens Array(MLA), off-axis mirror, $F-{\theta}$ lens for laser printer, are achieved, based on technologies in consequence of development of modern high-precision machining mechanism. Above all, FTS(Fast Tool Servo) and STS(Slow Tool Servo) are more innovative technologies for reducing time and development costs. In this paper, it is described that MLA machining technique by FTS, off-axis mirror machining technique by STS, optics for observing space, and development of infrared aspheric lens for a thermal imaging microscope.

Determination of Efficient Superfinishing Conditions for Mirror Surface Finishing of Stainless Steel (스테인레스 강의 경면가공을 위한 효율적 수퍼피니싱 조건의 결정)

  • Kim, Sang-Kyu;Cho, Young-Tae;Jung, Yoon-Gyo
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.2
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    • pp.100-106
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    • 2013
  • Stainless steel has some excellent properties as the material for the mechanical component. Purpose of this study is carried out to obtain mirror surface on the surperfinishing of stainless steel with high efficiency. To achieve this, we have conducted a series of polishing experiment for stainless steel using abrasive film from the perspective of oscillation speed, the rotational speed of workpiece, contact roller hardness, contact pressure and feed rate. Abrasive film used this study is a micro-finishing film and a lapping film. Furthermore, the polishing characteristics and efficiency of stainless steel is discussed through measuring optimal polishing time and surface roughness. From the obtained results, it was confirmed that efficient superfinishing conditions and polishing characteristic of Stainless steel can be determined.

Design of Electromagnetically Driven Micro Scanning Mirror for Laser Animation System (레이저 디스플레이를 위한 전자력 구동 스캐닝 미러의 설계)

  • Lee, Kyoung-Gun;Jang, Yun-Ho;Yoo, Byung-Wook;Jin, Joo-Young;Lim, Yong-Geun;Kim, Yong-Kweon
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.58 no.3
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    • pp.578-585
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    • 2009
  • In this paper, we present the design of an electromagnetic scanning mirror with torsional springs. The scanning mirror consisting of torsional springs and electromagnetic coils was designed for the applications of laser animation systems. We analyzed and optimized three types of torsional springs, namely, straight beam springs (SBS), classic serpentine springs (CSS), and rotated serpentine springs (RSS). The torsional springs were analyzed in terms of electrical resistance, fabrication error tolerance, and resonance mode separation of each type using analytical formula or numerical analysis. The RSS has advantages over the others as follows: 1) A low resistance of conductors, 2) wide resonance mode separation, 3) strong fabrication error tolerance, 4) a small footprint. The double-layer coils were chosen instead of single-layer coils with respect to electromagnetic forces. It resulted in lower power consumption. The geometry of the scanning mirror was optimized by calculations; RSS turn was 12 and the width of double-layer coil was $100{\mu}m$, respectively. When the static rotational angle is 5 degrees, the power consumption of the mirror plate was calculated to be 9.35 mW since the resistance of the coil part and a current is $122{\Omega}$ and 8.75 mA, respectively. The power consumption of full device including the mirror plate and torsional springs was calculated to be 9.63 mW.

Evaluation on the Optimum Grinding of Aspheric Surface Micro Lens for Camera Phone (휴대폰 카메라용 비구면 마이크로 렌즈 최적 연삭가공 평가)

  • Baek Seung-Yub;Lee Eun-Sang
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.15 no.2
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    • pp.1-9
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    • 2006
  • As consumers in optics, electronics, aerospace and electronics industry grow, the demand for ultra-precision aspheric surface lens increases higher. To enhance the precision and productivity of ultra precision aspheric surface micro lens, the development of ultra-precision grinding system and process for the aspheric surface micro lens are described. In the work reported in this paper, an ultra-precision grinding system for manufacturing the aspheric surface micro lens was developed by considering the factors affecting the ground surface roughness and profile accuracy. This paper deals with mirror grinding of an aspheric surface micro lens by resin bonded diamond wheel and spherical lens of BK7. The optimization of grinding conditions on ground surface roughness and profiles accuracy is investigated using the design of experiments.

Characteristic of Mirror Surface ELID Grinding of Large Scale Diametrical Silicon Wafer with Rotary Type Grinding Machine (로타리 연삭에 의한 대직경 Si-wafer의 ELID 경면 연삭특성)

  • 박창수;김원일;이윤경;왕덕현;김경년
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2002.04a
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    • pp.660-665
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    • 2002
  • Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of grinding wheel in the in-feed machining method. In this study, grinding experiments by the rotary surface grinding machine with straight type wheels ware conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding n/c equipment with an ELID wit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2 - 6 nm in Ra.

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Mirror Surface Grinding Characteristics and Mechanism of Carbon Fiber Reinforced Plastics (탄소섬유강화 플라스틱의 경면연삭가공 특성)

  • 박규열;이대길;중천위웅
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.18 no.10
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    • pp.2514-2522
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    • 1994
  • The mirror surface grinding of carbon fiber reinforced plastics(CFRP) was realized by using the metal bonded super-abrasive micro grain wheel with electrolytic in-process dressing(ELID). The maximum surface roughness $R_{max}$ of CFRP which was obtained with #6,000 wheel, was 0.65 $\mu{m}$, which was rougher surface finish compared to those of hard and brittle materials with the same mesh number wheel with ELID. The grinding performance was much dependent on the grinding direction and the best surface roughness was obtained at $90^{\circ}C$ grinding with fiber direction. The spark-out effect on the surface improvement was significant when smaller mesh number grinding wheels were used. From the surface observations of CFRP with scanning electron microscope(SEM) and Auger electron spectroscopy(AES), it was found that the mirror surface grinding of CFRP was generated by the homogenization due to carbonization of the ground surface and smearing of chips composed of the carbon fiber and carbonized epoxy resin into the ground surface.

Property of Carbon Layer for C/W Multilayer Mirror (C/W 다층박막 거울의 탄소층 특성 Property of Carbon Layer for C/W Multilayer Mirror)

  • Park, Byoung-Hun;Choi, Hyung-Wouk;Oh, Sun-Ju;Yoon, Kwon-Ha;Chon, Kwon-Su
    • Journal of the Korean Society of Radiology
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    • v.4 no.4
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    • pp.33-36
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    • 2010
  • Multilayer mirrors are very useful for applications of high energy X-ray. X-rays of high energy require very small thickness, a few nanometers, in the d-spacing of a multilayer mirror. Each layer is composed of a multilayr mirror influences to interfacial roughness or interdiffusion which gives rise to degrade specular reflection. Carbon layer of 1 nm thick in a C/W multilayer mirror of 3.25 nm d-spacing was examined. Carbon as well as tungsten layers were very uniform, and there was no micro-structure in carbon layers. However, interdiffusion between carbon and tungste layers was observed by a transmission electron microscope.