• Proceedings of the Optical Society of Korea Conference
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• 2000.08a
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• pp.154-155
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• 2000

Optical switches using MEMS(Micro Electro Mechanical Systems) process have been widely developed since conventional optical switches cannot meet the requirements of new systems. $N_2$ type micro-mirror switches are easy to control, have simple optical systems but have difficulties in expanding the ports. Micromirrors of 2N type switches must be tilted at various angles and have relatively complicated optical systems but have advantage in expanding ports. Another type of optical switch using MEMS process is micro-waveguide type. It is reliable than other types since it has no moving parts.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.400-401
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• 2009

In this paper we report a micro projector including of RGB sources, a $3{\times}1$ Fiber Optic Color Synthesizer (FOCS), and a two dimensional micro mechanical scanning mirror. We further report a modifier micro collimator which can enhance the resolution of the screened image.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2198-2200
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• 2000

This paper reports on the measurement of angle between micro mirror and substrate in. the Micro Optical Cross Connect(MOXC). MOXC consists of beam collimators and $N{\times}N$ micro mirrors that are fabricated by using MEMS technology. Using subpixel level image processing, it is possible to measure the angle with the resolution of 0.27$^{\circ}$.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.591-596
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• 2006

Lead zirconate titanate(PZT) thin films have been attracting worldwide interests in exploring their potential properties [1-3] or the origins [4-6] of their excellent dielectic, ferroelectric and piezoelectric properties near the morphotropic phase boundary (MPB). PZT thin films are expected to apply to the memory devices, micro electro mechanical systems (MEMS), and display because of their superior ferroelectric, pyroelectric, piezoelectric and electron emission properties. In this study, high- performance piezoelectric PZT thin films for actuated mirror array and optical scanner were developed by controlling the several factors, such as molecular-designed precursor, seeding layer and the residual stress in films, by a chemical solution deposition (CSD).

• Proceedings of the Optical Society of Korea Conference
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• 2007.07a
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• pp.187-188
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• 2007

Four kinds of mirror substrates with same surface roughness were fabricated. On those substrates, a dielectric multi-layer coating with high reflectivity was deposited by ion beam sputtering technique. Most of the fused silica mirrors showed lower scattering than the ZERODUR mirrors one, which deposited on substrates similar in surface roughness. The ZERODUR mirrors scattering strongly depend on the micro-structure of $Ta_2O_5/SiO_2$ thin films wear deposited on ZERODUR substrates.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.8 no.2
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• pp.163-168
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• 2015

The conventional simple-injection and unilateral-learning methods have the great disadvantages in special education outcomes for intellectual disabilities student. In this paper, we propose a digital micro-mirror system that learners themselves can manipulate the contents by using the various technology on user-interaction and augmented reality. Through the verification tests conducted by special education professionals, it is confirmed that the proposed commercial system can be used as a useful system in the special learning fields requiring high immersion.

• Proceedings of the Optical Society of Korea Conference
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• 2005.02a
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• pp.314-315
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• 2005

• The Bulletin of The Korean Astronomical Society
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• v.36 no.2
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• pp.132.2-132.2
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• 2011

We are developing Adaptive Optics (AO) system for astronomical use. The He-Ne laser works as an artificial light source. The tip-tilt correction servo is added to our AO system. The tip-tilt term, among the Zernike terms, is the biggest contributor of wavefront deformation caused by atmospheric turbulence at small telescopes. The tip-tilt correction servo consists of a Piezo tip-tilt platform with a mirror, a quadrant photodiode as a tip-tilt sensor, and controllers. The Shack-Hartmann wavefront sensor measures the residual wavefront errors and they are corrected by the MEMS (Micro Electro Mechanical System) deformable mirror. The MEMS deformable mirror allows the compact size at low cost compare to adaptive secondary mirror and other deformable mirrors. As the frame rates of the MEMS deformable mirror is about tens of kHz, the frame rates of the detector in wavefront sensor is the bottleneck of the wavefront correction speed. For faster performance, we replaced a CCD which provides frame rates only 70 Hz with a CMOS with frame rates up to 450 Hz.

• Journal of Power System Engineering
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• v.10 no.2
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• pp.99-103
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• 2006

The laser interferometer has been used for measurement of the micro displacement error. Although the laser interferometer is widely accepted as a tool for measurement of motion accuracy, the set-up procedure is time-consuming because of the strict requirement on alignment between a laser head and optic units. This paper addresses the development of a laser interferometer to measure the micro displacement for a micro machine. The portable laser interferometer which integrates a laser probe and optics, is developed for the convenient measurement. For the experiment, moving mirror set up on the micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is obtained and analyzed by LabView. Finally experiments are found out the relation between micro displacement and output signal.

• Journal of Electrical Engineering and Technology
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• v.1 no.2
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• pp.263-267
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• 2006

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.