• 반도체디스플레이기술학회지
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• 제18권1호
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• pp.32-37
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• 2019

Titanium dioxide ($TiO_2$) is a promising dielectric material in the semiconductor industry for its high dielectric constant. However, for utilization on Si substrate, $TiO_2$ film meets with a difficulty due to the large leakage currents caused by its small conduction band energy offset from Si substrate. In this study, we propose an in-situ plasma oxidation process in plasma-enhanced atomic layer deposition (PE-ALD) system to form an oxide barrier layer which can reduce the leakage currents from Si substrate to $TiO_2$ film. $TiO_2$ film depositions were followed by the plasma oxidation process using tetrakis(dimethylamino)titanium (TDMAT) as a Ti precursor. In our result, $SiO_2$ layer was successfully introduced by the plasma oxidation process and was used as a barrier layer between the Si substrate and $TiO_2$ film. Metal-oxide-semiconductor ($TiN/TiO_2/P-type$ Si substrate) capacitor with plasma oxidation barrier layer showed improved C-V and I-V characteristics compared to that without the plasma oxidation barrier layer.

• 마이크로전자및패키징학회지
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• 제10권2호
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• pp.1-5
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• 2003

기존 형상의 미세 가열기를 이용한 마이크로 시스템 패키징의 문제점을 해결하기 위해 새로운 형상의 미세 가열기를 제작하여 패키징 실험을 시행하였다. 기존 형상의 미세 가열기와 새로운 미세 가열기의 형상을 각각 제작하여 접합시에 미세 가열기에 발생하는 열분포를 IR카메라를 이용하여 실험하였다. 기존 형상의 미세 가열기가 불균일하게 가열되는 반면, 새로운 형상의 미세 가열기는 매우 균일하게 가열되는 형상을 나타내었고, IR 카메라를 이용한 실험 결과를 바탕으로 각기 다른 형상의 미세 가열기를 이용하여 접합 실험을 실시하였다. 접합 실험시 사용한 미세 가열기는 폭 $50{\mu}m$, 두께 $2{\mu}m$로 제작하였으며, 0.2Mpa 의 압력을 Pyrex glass cap에 가한 상태에서 150mA의 전류를 공급하여 접합을 완료하였다. 접합이 완료된 시편들에 대해서 IPA를 통한 leakage check실험을 실시하였으며, 기존 형상의 미세 가열기를 이용한 시편들은 66%가 테스트를 통과한 반면 새로운 형상의 미세 가열기를 이용한 시편들은 85%이상이 테스트를 통과하였다. Leakage 실험을 통과한 각각의 시편들에 대해서 접합력 측정을 실시한 결과, 기존 형상의 미세 가열기를 이용한 시편들은 15∼21Mpa의 접합력을 나타내었고, 새로운 형상의 미세 가열기를 이용한 시편들은 25∼30Mpa의 우수한 접합력을 나타내었다.

• International Journal of Fluid Machinery and Systems
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• 제2권1호
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• pp.72-79
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• 2009

The effect of symmetric and asymmetric micro regenerative pump impellers on their pressure performance was studied. The shut off head of the pump with the symmetric impeller was about 2.5 times as that with the asymmetric impeller. The computation of the internal flow was performed to clarify the cause of the increase of the head. It was found that the contribution of the angular momentum supply was larger than that of shear stress for the head development in both cases. The larger head and momentum supply in the case of the symmetric impeller were caused by larger recirculated flow rate and larger angular momentum difference between the inlet and outlet to the impeller. The larger recirculated flow rate was caused by smaller pressure gradient in the direction of recirculated flow. The decrease of the circumferential velocity in the casing was attributed to the smaller local flow rate in the casing.

• 대한기계학회논문집A
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• 제32권9호
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• pp.720-727
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• 2008

Microfluidic single chip integrating thermopneumatic micropump and micro check valve are developed. The micropump and micorvalve are made of biocompatible materials, glass and PDMS, so as to be applicable to the biochip. By using the passive-type check valve, backward flow and fluid leakage are blocked and flow control is stable and precise. The chip is composed of three PDMS layers and a glass substrate. In the chip, flow channel and pump chamber were made on the PDMS layers by the replica molding technique and pump heater was made on the glass substrate by Cr/Au deposition. Diameter of the pump chamber is 7 mm and the width and depth of the channel are 200 and $180{\mu}m$, respectively. The PDMS layers chip and the heater deposited glass chip are combined by a jig and a clamp for pumping operation, and they are separable so that PDMS chip is used as a disposable but the heater chip is able to be used repeatedly. Pumping performance was simulated by CFD software and investigated experimentally. The performance was the best when the duty ratio of the applied voltage to the heater was 33%.

• Transactions on Electrical and Electronic Materials
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• 제6권3호
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• pp.110-114
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• 2005

We present a micro fluxgate magnetic sensor having solenoid coils and racetrack shaped magnetic core, which was designed to decrease the .operating power and magnetic flux leakage. Electroplated copper coils of $6\;{\mu}m$ thickness and the core of $3\;{\mu}m$ thickness were separated by benzocyclobutane (BCB) having a high insulation and good planarization characters. Permalloy $(Ni_{0.8}Fe_{0.2})$ as a magnetic core was also electroplated under 2000 gauss to induce the magnetic anisotropy. The core had the high DC effective permeability of $\~1,300$ and coercive field of $\~0.1$ Oe. The fabricated fluxgate sensor had the very small actual size of $3.0\times1.7\;mm^2$. The fluxgate sensor with a racetrack shaped core had the high sensitivity .of $\~350$ V/T at excitation condition of 3 $V_{P-P}$ and 2 MHz square wave. When two fluxgates were perpendicularly aligned in terrestrial field, their two-axis output signals were very useful to commercialize an electronic azimuth compass for the portable navigation system.

• Tribology and Lubricants
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• 제31권5호
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• pp.221-228
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• 2015

It is possible to prevent a piston from contacting the cylinder by changing the shape of the piston or by applying micro-textures, such as micro-grooves or micro-holes, over the piston surface. Usually, the minimum radial clearance reaches its minimum value at the beginning of the suction stroke because the pressure around the piston is low and almost axisymmetric such that the net pressure force on the piston is not sufficiently high to support the piston from touching the cylinder. In this study, we apply a series of saw-tooth-shaped grooves on the piston surface, and numerically investigate the effects of groove depth, groove angle, and the number of grooves with radial clearance variations using a finite difference method. We conduct a dynamic analysis of the piston for various changes in groove geometries to obtain the minimum radial clearance variation for the entire compression cycle. The minimum radial clearance increases while friction loss decreases when we apply the series of saw-tooth-shaped grooves on the piston. In addition, we analyze the impact of the change in the groove shape variable due to changes in radial clearance. Leakage variations are relevant to radial clearance, but have almost no effect on the groove parameters.

• Restorative Dentistry and Endodontics
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• 제24권3호
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• pp.453-464
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• 1999

The non-vital bleaching technique has been used widely as a very effective treatment method on discolored non-vital teeth. But periodontal tissue deterioration and cervical external root resorption have been reported because of the high toxicity of hydrogen peroxide in bleaching agents. So in previous studies, placement of base over the root canal obturation prior to bleaching has been suggested in order to prevent microleakage of bleaching agents, however, the effectiveness of base is still controversial. The purpose of this study was to evaluate the effects of base and root canal sealer on prevention of leakage of bleaching agents in non-vital bleaching. Fifty-two extracted sound teeth with single root were used. For root canal obturation, Tubuli seal$^{(R)}$(Kerr Co., USA) was used in 39 teeth and in others, AH-26$^{(R)}$(De Trey Dentsply, Inc., Switzerland) was used as a root canal sealer. 26 teeth among the teeth obturated with Tubuli seal$^{(R)}$ were divided into two groups, and Dentin cement$^{(R)}$(GC corp., Japan) and JRM$^{(R)}$(De Trey Dentsply, Inc. Germany) were used in each group as a intracanal base. In all teeth, non-vital bleaching using bleaching agent mixed with methylene blue dye was performed and all specimens were stored in $37^{\circ}C$ water bath for 72 hours. After sectioning longitudinally, the depth of dye leakage was measured with digital vernier calipers under the stereobinocular microscope using ${\times}40$ magnification. It can be concluded as follows: 1. The microleakage of bleaching agent was observed ill all groups regardless of type of the base and the sealer. 2. The microleakage in the groups using AH-26$^{(R)}$ as a sealer was significantly reduced (p<0.05). 3. In the groups with intracanal base, micro leakage was observed through almost the whole depth of the base and there was no significant difference between Dentin cement$^{(R)}$ and IRM$^{(R)}$ group(p>0.05). In conclusion, all the basing materials and the sealers in this study did not prevent the microleakage of bleaching agent. Therefore further studies and attempts to seal off the pulp chamber will be necessary.

• 한국염색가공학회지
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• 제19권1호
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• pp.37-44
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• 2007

In this study, for textile use, the octadecane of phase change materials(PCM) was encapsulated in several micro-diameter shell which prevents leakage of the material during its liquid phase. Microencapsulated PCM(PM) was prepared with the different weight ratio of core material to wall material and by interfacial polymerization methods using polyurea as shell material. Phase stability for O/W emulsion of PCM and PVA aq. (PE) was evaluated by Turbiscan Lab. The capsule formation win identified using FT-IR. Physical properties of microcapsules including diameter, particle distribution, morphology were investigated. Thermal transport properties of suede treated with PM(SPM) were determined by KES-F7 system.

• 한국해양공학회지
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• 제8권1호
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• pp.50-61
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• 1994

A 300 meter class ROV(CROV300) is composed of three parts : a surface unit, a tether cable and an underwater vehicle. The vehicle controller is based on two processors : an Intel 8097-16-bit one chip micro-processor and a Texas Instruments TMS320E25 digital signal processor. In this paper, the surface controller, the vehicle controller and peripheral devices interfaced with the processors are described. These controllers transmit/receive measured status data and control commands through RS422 serial communication. Depth, heading, trimming, camera tilting, and leakage signals are acquired through the embedded AD converters of the 8097. On the other hand, altitude of ROV and lbstacle avoidance signals are processed by the DSP processor and periodically fetched by the 8097. The processor is interfaced with a 4-channel 12-bit D/A converter to generate control signals for DC motors an dseveral transistors to handle the relays for on/off switching of external devices.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 추계학술대회 논문집
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• pp.81-84
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• 1998

New diagnostic techniques have been tried on the applications of chemical, physical and micro-structural methods because there was a limit to diagnose degradation in Korean Underground Residential Distribution (URD) power cables with the conventional electrical methods. In this study, non-electrical properties were carried out as such. Characterization of interface layer was analyzed by X-ray, characterization of insulator by water tree, degree of crosslinking, shrinkage as well as ${\mu}$ -FTIR, characterization of semiconductive layer by volume resistivity. Electrical properties were also performed by leakage current.