• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.151-152
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• 2007

• 전기의세계
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• 제50권5호
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• pp.16-21
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• 2001

• 제어로봇시스템학회논문지
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• 제19권11호
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• pp.979-983
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• 2013

The three-dimensional measurement method of confocal systems is a spot scanning method which has a high resolution and good illumination efficiency. However, conventional confocal systems had a weak point in that it has to perform XY axis scanning to achieve FOV (Field of View) vision through spot scanning. There are some methods to improve this problem involving the use of a galvano mirror [1], pin-hole array, etc. Therefore, in this paper we propose a method to improve a parallel mode confocal system using a micro-lens and pin-hole array in a dual microscope configuration. We made an area scan possible by using a combination MLA (Micro Lens Array) and pin-hole array, and used an objective lens to improve the light transmittance and signal-to-noise ratio. Additionally, we made it possible to change the objective lens so that it is possible to select a lens considering the reflection characteristic of the measuring object and proper magnification. We did an experiment using 5X, 2.3X objective lens, and did a calibration of height using a VLSI calibration target.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1294-1298
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• 2005

In this study, combined micro press and surface finishing process are proposed to fabricate the micro nozzle array on a stainless steel sheet metal. In micro hole punching process the burr occurs inevitably, but the burr must be minimized in order to improve the quality and accuracy of the product. For this reason, subsequent magnetic field-assisted finishing technique is applied to remove the burr which exists around the nozzles for ink-jet printer head and proved to be a feasible for deburring by experiment. The deburring characteristics of sheet metals were investigated changing with polishing time and magnetic abrasive size. After the deburring, the burr size has remarkably reduced and roundness of the hole also has improved.

• International Journal of Automotive Technology
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• 제5권1호
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• pp.9-16
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• 2004

An experimental study was carried out to characterize the spray atomization process of micro-machined port fuel injectors with a piezoelectric atomization device, which can generate pressure pulsations through vibration of a piezoelectric transducer. In this study, several types of micro-machined arrays such as 30∼200-microns of hole arrays were tested. Both a dual-stream and a central-port injectors with micro-machined arrays were tested and compared with normal port fuel injectors. The spray visualization was conducted to characterize overall spray structure and phase Doppler particle analyzer (PDPA) system was used to quantify the droplet size and velocity. In addition, the pressure history was recorded by using digitized signal from pressure transducer. The results showed that modulation is effective to the spray atomization for tested injectors and atomization performance depends on injector design factors, orifice sizes, and frequency and power of the modulator. A number of resonance frequencies of the modulator was modified by injector parameters and temperature. In addition, our results suggested that design of sufficient space among holes is critical to avoid droplet coalescence in the multi-hole micro-machined injectors.

• International Journal of Precision Engineering and Manufacturing
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• 제7권4호
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• pp.18-22
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• 2006

Although many efforts have been made in making nanometer-sized holes, there is still a major challenge in fabricating individual single-digit nanometer holes in a more controllable way for different materials, size distribution and hole shapes. In this paper we describe our efforts to use a top down approach in nanofabrication method to make single-digit nanoholes. There are three major steps towards the fabrication of a single-digit nanohole. 1) Preparing the freestanding thin film by epitaxial deposition and electrochemical etching. 2) Making sub-micro holes ($0.2{\mu}\;to\;0.02{\mu}$) by focused ion beam (FIB), electron beam (EB), atomic force microscope (AFM), and others methods. 3) Reducing the hole size to less than 10 nm by epitaxial deposition, FIB or EB induced deposition and micro coating. Preliminary work has been done on thin films (30 nm in thickness) preparation, sub-micron hole fabrication, and E-beam induced deposition. The results are very promising.

• 한국정밀공학회지
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• 제17권7호
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• pp.20-27
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• 2000

한국은행의 지식기반산업의 국민 경제적 역할 분석에 따르면, 91년부터 99년까지 지식기반산업의 연평균 성장률은 13.7%로 다른 산업의 4.1%보다 3배 이상 높은 것으로 조사되었다. 그중 항공기, 사무계산 및 회계용 기기, 의약품, 영상 음향 통신장비 등 첨단제조업은 이 기간 중 연평균 20.1% 성장을 기록하였다. 이와 같은 첨단제조업에서는 제품 내 부품의 정밀가공 기술이 필수적이다. 그 중에서도 미세 가공에 대한 관심은 지속적으로 증가하고 있는 추세이다.(중략)

• 한국정밀공학회지
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• 제27권11호
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• pp.17-23
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• 2010

Titanium alloy is one of the hard processing materials made by the traditional manufacturing method because of the excellent mechanical strength. Ablation of titanium alloy is investigated by using a femtosecond laser which is a regenerative amplified Ti:sapphire laser with 1kHz repetition rate, 184fs pulse duration time and 785nm wavelength. Experiments are carried out under various ablation conditions with different pulse overlap ratios for the rectangular shape and micro hole. Test results show that the ablation characteristic according to pulse overlap ratio of titanium alloy seems to be as non-linear type at the different zone of energy fluence. The optimal condition of rectangular shape processing is obtained at the laser peak power 1.3mW, pulse overlap ratio of 90%, beam gap of $1\;{\mu}m$. The micro hole has a good quality from the pulse overlap ratio of 99% at the same laser peak power. With the optimal processing condition, the fine rectangular shape and micro hole without burr and thermal damage are achieved.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2007년도 제29회 추계학술대회논문집
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• pp.285-288
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• 2007

레이저가공에서 나타나는 가공부위의 용융된 물질을 밀어내는 가스의 역할을 모사하기 위하여, 구멍이 있는 평판 상부에 충돌하는 마이크로 초음속 제트유동의 경계층 효과가 수치해석적으로 연구되었다. 충돌유동과 충격파의 구조 및 구멍통과 질량유량이 관찰되어 경계층 영향이 고려되지 않은 과거 연구와 비교되었다. 노즐내부 유동의 경계층 효과로 인하여 가공부위 상부에서 보다 강한 마하디스크가 생성되고, 아울러 구멍통과 질량유량도 줄어드는 것이 관찰되었다.

• 한국생산제조학회지
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• 제20권2호
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• pp.180-186
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• 2011

This paper describes a micro electrical discharge machining (MEDM) technique that uses an insulated tool in combination with ultrasonic vibration to drill micro holes. As the machining depth becomes deeper, the dispersion of debris and circulation of the dielectric fluid are difficult to occur. Consequently, machining becomes unstable in the machining region and unnecessary electrochemical dissolution and secondary discharge sparking occur at the tool side face. To reduce the amount of unnecessary side machining, an insulated tool was used. Ultrasonic vibration was applied to the MEDM work fluid to better remove debris. Through these methods, a $1000\;{\mu}m$ thick stainless steel plate was machined by using a $73\;{\mu}m$ diameter electrode. The diameters of the hole entrance and exit were $96\;{\mu}m$ and $88\;{\mu}m$, respectively. It took only 351s to completely drill one hole.